Next Article in Journal
Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect
Previous Article in Journal
Evaluation of Deployment Challenges of Wireless Sensor Networks at Signalized Intersections
Open AccessArticle

Passive Resistor Temperature Compensation for a High-Temperature Piezoresistive Pressure Sensor

by Zong Yao 1,2, Ting Liang 1,2,*, Pinggang Jia 1,2, Yingping Hong 1,2, Lei Qi 1,2, Cheng Lei 1,2, Bin Zhang 1,2, Wangwang Li 1,2, Diya Zhang 1,2 and Jijun Xiong 1,2,*
1
National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan 030051, China
2
Key Laboratory for Instrumentation Science & Dynamic Measurement, North University of China, Ministry of Education, Taiyuan 030051, China
*
Authors to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Sensors 2016, 16(7), 1142; https://doi.org/10.3390/s16071142
Received: 17 June 2016 / Revised: 10 July 2016 / Accepted: 19 July 2016 / Published: 22 July 2016
(This article belongs to the Section Physical Sensors)
The main limitation of high-temperature piezoresistive pressure sensors is the variation of output voltage with operating temperature, which seriously reduces their measurement accuracy. This paper presents a passive resistor temperature compensation technique whose parameters are calculated using differential equations. Unlike traditional experiential arithmetic, the differential equations are independent of the parameter deviation among the piezoresistors of the microelectromechanical pressure sensor and the residual stress caused by the fabrication process or a mismatch in the thermal expansion coefficients. The differential equations are solved using calibration data from uncompensated high-temperature piezoresistive pressure sensors. Tests conducted on the calibrated equipment at various temperatures and pressures show that the passive resistor temperature compensation produces a remarkable effect. Additionally, a high-temperature signal-conditioning circuit is used to improve the output sensitivity of the sensor, which can be reduced by the temperature compensation. Compared to traditional experiential arithmetic, the proposed passive resistor temperature compensation technique exhibits less temperature drift and is expected to be highly applicable for pressure measurements in harsh environments with large temperature variations. View Full-Text
Keywords: high-temperature piezoresistive pressure sensor; passive resistor; temperature compensation high-temperature piezoresistive pressure sensor; passive resistor; temperature compensation
Show Figures

Figure 1

MDPI and ACS Style

Yao, Z.; Liang, T.; Jia, P.; Hong, Y.; Qi, L.; Lei, C.; Zhang, B.; Li, W.; Zhang, D.; Xiong, J. Passive Resistor Temperature Compensation for a High-Temperature Piezoresistive Pressure Sensor. Sensors 2016, 16, 1142.

Show more citation formats Show less citations formats
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Access Map by Country/Region

1
Back to TopTop