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Sensors 2016, 16(7), 1061;

An Optical Sensor for Measuring the Position and Slanting Direction of Flat Surfaces

Department of Mechanical Engineering and Advanced Institute of Manufacturing with High-Tech Innovations, National Chung Cheng University, Chiayi County 62102, Taiwan
Graduate Institute of Opto-Mechatronics, National Chung Cheng University, Chiayi County 62102, Taiwan
Author to whom correspondence should be addressed.
Academic Editor: Changzhi Li
Received: 23 May 2016 / Revised: 4 July 2016 / Accepted: 5 July 2016 / Published: 9 July 2016
(This article belongs to the Special Issue Non-Contact Sensing)
Full-Text   |   PDF [3367 KB, uploaded 9 July 2016]   |  


Automated optical inspection is a very important technique. For this reason, this study proposes an optical non-contact slanting surface measuring system. The essential features of the measurement system are obtained through simulations using the optical design software Zemax. The actual propagation of laser beams within the measurement system is traced by using a homogeneous transformation matrix (HTM), the skew-ray tracing method, and a first-order Taylor series expansion. Additionally, a complete mathematical model that describes the variations in light spots on photoelectric sensors and the corresponding changes in the sample orientation and distance was established. Finally, a laboratory prototype system was constructed on an optical bench to verify experimentally the proposed system. This measurement system can simultaneously detect the slanting angles (x, z) in the x and z directions of the sample and the distance (y) between the biconvex lens and the flat sample surface. View Full-Text
Keywords: flat surfaces; autofocus; autocollimator flat surfaces; autofocus; autocollimator

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Chen, Y.-T.; Huang, Y.-S.; Liu, C.-S. An Optical Sensor for Measuring the Position and Slanting Direction of Flat Surfaces. Sensors 2016, 16, 1061.

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