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Sensors 2016, 16(4), 513;

A High Performance Torque Sensor for Milling Based on a Piezoresistive MEMS Strain Gauge

The State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, No. 28, Xianning West Road, Xi’an 710049, China
Author to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Received: 29 January 2016 / Revised: 22 March 2016 / Accepted: 4 April 2016 / Published: 9 April 2016
(This article belongs to the Section Physical Sensors)
Full-Text   |   PDF [5681 KB, uploaded 9 April 2016]   |  


In high speed and high precision machining applications, it is important to monitor the machining process in order to ensure high product quality. For this purpose, it is essential to develop a dynamometer with high sensitivity and high natural frequency which is suited to these conditions. This paper describes the design, calibration and performance of a milling torque sensor based on piezoresistive MEMS strain. A detailed design study is carried out to optimize the two mutually-contradictory indicators sensitivity and natural frequency. The developed torque sensor principally consists of a thin-walled cylinder, and a piezoresistive MEMS strain gauge bonded on the surface of the sensing element where the shear strain is maximum. The strain gauge includes eight piezoresistances and four are connected in a full Wheatstone circuit bridge, which is used to measure the applied torque force during machining procedures. Experimental static calibration results show that the sensitivity of torque sensor has been improved to 0.13 mv/Nm. A modal impact test indicates that the natural frequency of torque sensor reaches 1216 Hz, which is suitable for high speed machining processes. The dynamic test results indicate that the developed torque sensor is stable and practical for monitoring the milling process. View Full-Text
Keywords: torque; sensitivity; frequency; MEMS strain gauge torque; sensitivity; frequency; MEMS strain gauge

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Qin, Y.; Zhao, Y.; Li, Y.; Zhao, Y.; Wang, P. A High Performance Torque Sensor for Milling Based on a Piezoresistive MEMS Strain Gauge. Sensors 2016, 16, 513.

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