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Sensors 2016, 16(3), 389;

A Novel Digital Closed Loop MEMS Accelerometer Utilizing a Charge Pump

Department of Precision Instrument, Tsinghua University, Beijing 100084, China
Institute of Microelectronics, Tsinghua University, Beijing 100084, China
Author to whom correspondence should be addressed.
Academic Editor: Jörg F. Wagner
Received: 11 January 2016 / Revised: 14 March 2016 / Accepted: 15 March 2016 / Published: 18 March 2016
(This article belongs to the Special Issue Inertial Sensors and Systems 2016)
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This paper presents a novel digital closed loop microelectromechanical system (MEMS) accelerometer with the architecture and experimental evaluation. The complicated timing diagram or complex power supply in published articles are circumvented by using a charge pump system of adjustable output voltage fabricated in a 2P4M 0.35 µm complementary metal-oxide semiconductor (CMOS) process, therefore making it possible for interface circuits of MEMS accelerometers to be integrated on a single die on a large scale. The output bitstream of the sigma delta modulator is boosted by the charge pump system and then applied on the feedback comb fingers to form electrostatic forces so that the MEMS accelerometer can operate in a closed loop state. Test results agree with the theoretical formula nicely. The nonlinearity of the accelerometer within ±1 g is 0.222% and the long-term stability is about 774 µg. View Full-Text
Keywords: MEMS accelerometer; closed loop; sigma delta modulator; charge pump MEMS accelerometer; closed loop; sigma delta modulator; charge pump

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Chu, Y.; Dong, J.; Chi, B.; Liu, Y. A Novel Digital Closed Loop MEMS Accelerometer Utilizing a Charge Pump. Sensors 2016, 16, 389.

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