The Design and Optimization of a Highly Sensitive and Overload-Resistant Piezoresistive Pressure Sensor
Abstract
:1. Introduction
2. Experimental Section
2.1. Structural Design
2.2. Structural Analysis
2.3. Fabrication
2.4. Package and Measurement
3. Results and Discussion
3.1. Experimental Results
3.2. Discussion
4. Conclusions
Acknowledgments
Author Contributions
Conflicts of Interest
References
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Parameter | B | H | I | L | W | t |
---|---|---|---|---|---|---|
Dimension (μm) | 20–50 | 20–30 | 1500–1600 | 5400–5700 | 200–500 | 150–500 |
Parameter | Value |
---|---|
Temperature (°C) | 20 |
Supply voltage (V) | 3 |
Zero point offset (mV) | 4.196 |
Full scale span (mV) | 23.781 |
Sensitivity (μV/V/Pa) | 17.339 |
Nonlinearity (%FS) | 2.556 |
Hysteresis (%FS) | 0.514 |
Repeatability (%FS) | 0.759 |
Accuracy (%FS) | 2.715 |
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Meng, X.; Zhao, Y. The Design and Optimization of a Highly Sensitive and Overload-Resistant Piezoresistive Pressure Sensor. Sensors 2016, 16, 348. https://doi.org/10.3390/s16030348
Meng X, Zhao Y. The Design and Optimization of a Highly Sensitive and Overload-Resistant Piezoresistive Pressure Sensor. Sensors. 2016; 16(3):348. https://doi.org/10.3390/s16030348
Chicago/Turabian StyleMeng, Xiawei, and Yulong Zhao. 2016. "The Design and Optimization of a Highly Sensitive and Overload-Resistant Piezoresistive Pressure Sensor" Sensors 16, no. 3: 348. https://doi.org/10.3390/s16030348
APA StyleMeng, X., & Zhao, Y. (2016). The Design and Optimization of a Highly Sensitive and Overload-Resistant Piezoresistive Pressure Sensor. Sensors, 16(3), 348. https://doi.org/10.3390/s16030348