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Journal: Sensors, 2016
Volume: 16
Number: 158

Article: Laterally Driven Resonant Pressure Sensor with Etched Silicon Dual Diaphragms and Combined Beams
Authors: by Xiaohui Du, Yifang Liu, Anlin Li, Zhou Zhou, Daoheng Sun and Lingyun Wang
Link: https://www.mdpi.com/1424-8220/16/2/158

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