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Journal: Sensors, 2016
Volume: 16
Number: 158
Article:
Laterally Driven Resonant Pressure Sensor with Etched Silicon Dual Diaphragms and Combined Beams
Authors:
by
Xiaohui Du, Yifang Liu, Anlin Li, Zhou Zhou, Daoheng Sun and Lingyun Wang
Link:
https://www.mdpi.com/1424-8220/16/2/158
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