Du, X.; Liu, Y.; Li, A.; Zhou, Z.; Sun, D.; Wang, L.
Laterally Driven Resonant Pressure Sensor with Etched Silicon Dual Diaphragms and Combined Beams. Sensors 2016, 16, 158.
https://doi.org/10.3390/s16020158
AMA Style
Du X, Liu Y, Li A, Zhou Z, Sun D, Wang L.
Laterally Driven Resonant Pressure Sensor with Etched Silicon Dual Diaphragms and Combined Beams. Sensors. 2016; 16(2):158.
https://doi.org/10.3390/s16020158
Chicago/Turabian Style
Du, Xiaohui, Yifang Liu, Anlin Li, Zhou Zhou, Daoheng Sun, and Lingyun Wang.
2016. "Laterally Driven Resonant Pressure Sensor with Etched Silicon Dual Diaphragms and Combined Beams" Sensors 16, no. 2: 158.
https://doi.org/10.3390/s16020158
APA Style
Du, X., Liu, Y., Li, A., Zhou, Z., Sun, D., & Wang, L.
(2016). Laterally Driven Resonant Pressure Sensor with Etched Silicon Dual Diaphragms and Combined Beams. Sensors, 16(2), 158.
https://doi.org/10.3390/s16020158