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Open AccessReview

Thermal-Performance Instability in Piezoresistive Sensors: Inducement and Improvement

by Yan Liu 1,2, Hai Wang 1,*, Wei Zhao 1, Hongbo Qin 1 and Xuan Fang 1
School of Electro-Mechanical Engineering, Xidian University, Xi’an 710071, China
State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710054, China
Author to whom correspondence should be addressed.
Academic Editor: Stefano Mariani
Sensors 2016, 16(12), 1984;
Received: 6 September 2016 / Revised: 17 November 2016 / Accepted: 18 November 2016 / Published: 24 November 2016
(This article belongs to the Collection Modeling, Testing and Reliability Issues in MEMS Engineering)
The field of piezoresistive sensors has been undergoing a significant revolution in terms of design methodology, material technology and micromachining process. However, the temperature dependence of sensor characteristics remains a hurdle to cross. This review focuses on the issues in thermal-performance instability of piezoresistive sensors. Based on the operation fundamental, inducements to the instability are investigated in detail and correspondingly available ameliorative methods are presented. Pros and cons of each improvement approach are also summarized. Though several schemes have been proposed and put into reality with favorable achievements, the schemes featuring simple implementation and excellent compatibility with existing techniques are still emergently demanded to construct a piezoresistive sensor with excellent comprehensive performance. View Full-Text
Keywords: piezoresistive sensor; thermal-performance instability; inducement; improvement piezoresistive sensor; thermal-performance instability; inducement; improvement
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Liu, Y.; Wang, H.; Zhao, W.; Qin, H.; Fang, X. Thermal-Performance Instability in Piezoresistive Sensors: Inducement and Improvement. Sensors 2016, 16, 1984.

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