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Sensors 2016, 16(11), 1880;

Organic Vapour Sensing Properties of Area-Ordered and Size-Controlled Silicon Nanopillar

1,2,3,*, 1, 1, 1 and 1,3,*
State-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, China
Authors to whom correspondence should be addressed.
Academic Editor: W. Rudolf Seitz
Received: 13 September 2016 / Revised: 1 November 2016 / Accepted: 3 November 2016 / Published: 9 November 2016
(This article belongs to the Section Chemical Sensors)
PDF [2405 KB, uploaded 9 November 2016]


Here, a silicon nanopillar array (Si-NPA) was fabricated. It was studied as a room-temperature organic vapour sensor, and the ethanol and acetone gas sensing properties were detected with I-V curves. I-V curves show that these Si-NPA gas sensors are sensitive to ethanol and acetone organic vapours. The turn-on threshold voltage is about 0.5 V and the operating voltage is 3 V. With 1% ethanol gas vapour, the response time is 5 s, and the recovery time is 15 s. Furthermore, an evaluation of the gas sensor stability for Si-NPA was performed. The gas stability results are acceptable for practical detections. These excellent sensing characteristics can mainly be attributed to the change of the overall dielectric constant of Si-NPA caused by the physisorption of gas molecules on the pillars, and the filling of the gas vapour in the voids. View Full-Text
Keywords: ordered silicon nanopillar; organic vapour; gas sensing ordered silicon nanopillar; organic vapour; gas sensing

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Li, W.; Feng, Z.; Dai, E.; Xu, J.; Bai, G. Organic Vapour Sensing Properties of Area-Ordered and Size-Controlled Silicon Nanopillar. Sensors 2016, 16, 1880.

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