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Porous Silicon Structures as Optical Gas Sensors

Emitech, Inc., Fall River, MA 02720, USA
Academic Editor: W. Rudolf Seitz
Sensors 2015, 15(8), 19968-19991;
Received: 15 July 2015 / Revised: 4 August 2015 / Accepted: 6 August 2015 / Published: 14 August 2015
(This article belongs to the Special Issue Silicon Based Optical Sensors)
PDF [2292 KB, uploaded 14 August 2015]


We present a short review of recent progress in the field of optical gas sensors based on porous silicon (PSi) and PSi composites, which are separate from PSi optochemical and biological sensors for a liquid medium. Different periodical and nonperiodical PSi photonic structures (bares, modified by functional groups or infiltrated with sensory polymers) are described for gas sensing with an emphasis on the device specificity, sensitivity and stability to the environment. Special attention is paid to multiparametric sensing and sensor array platforms as effective trends for the improvement of analyte classification and quantification. Mechanisms of gas physical and chemical sorption inside PSi mesopores and pores of PSi functional composites are discussed. View Full-Text
Keywords: porous silicon; gas sensors; optical; sensor arrays; multiparametric porous silicon; gas sensors; optical; sensor arrays; multiparametric

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Levitsky, I.A. Porous Silicon Structures as Optical Gas Sensors. Sensors 2015, 15, 19968-19991.

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