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Journal: Sensors, 2015
Volume: 15
Number: 14745
Article:
Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type
Authors:
by
Cheng-Hua Tsai, Chun-Wei Tsai, Hsu-Tang Chang, Shih-Hsiang Liu and Jui-Che Tsai
Link:
https://www.mdpi.com/1424-8220/15/6/14745
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