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Highly Stable Liquid Metal-Based Pressure Sensor Integrated with a Microfluidic Channel

1 and 1,2,*
Department of Medical System Engineering, GIST, Gwangju 500-712, Korea
School of Mechatronics, GIST, Gwangju 500-712, Korea
Author to whom correspondence should be addressed.
Academic Editor: Vittorio M.N. Passaro
Sensors 2015, 15(5), 11823-11835;
Received: 29 April 2015 / Revised: 19 May 2015 / Accepted: 19 May 2015 / Published: 21 May 2015
(This article belongs to the Section Physical Sensors)
PDF [2164 KB, uploaded 21 May 2015]


Pressure measurement is considered one of the key parameters in microfluidic systems. It has been widely used in various fields, such as in biology and biomedical fields. The electrical measurement method is the most widely investigated; however, it is unsuitable for microfluidic systems because of a complicated fabrication process and difficult integration. Moreover, it is generally damaged by large deflection. This paper proposes a thin-film-based pressure sensor that is free from these limitations, using a liquid metal called galinstan. The proposed pressure sensor is easily integrated into a microfluidic system using soft lithography because galinstan exists in a liquid phase at room temperature. We investigated the characteristics of the proposed pressure sensor by calibrating for a pressure range from 0 to 230 kPa (R2 > 0.98) using deionized water. Furthermore, the viscosity of various fluid samples was measured for a shear-rate range of 30–1000 s1. The results of Newtonian and non-Newtonian fluids were evaluated using a commercial viscometer and normalized difference was found to be less than 5.1% and 7.0%, respectively. The galinstan-based pressure sensor can be used in various microfluidic systems for long-term monitoring with high linearity, repeatability, and long-term stability. View Full-Text
Keywords: pressure sensor; liquid metal; galinstan; microfluidic; viscosity pressure sensor; liquid metal; galinstan; microfluidic; viscosity

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Jung, T.; Yang, S. Highly Stable Liquid Metal-Based Pressure Sensor Integrated with a Microfluidic Channel. Sensors 2015, 15, 11823-11835.

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