Next Article in Journal
A Noncontact FMCW Radar Sensor for Displacement Measurement in Structural Health Monitoring
Next Article in Special Issue
Heat Transfer and Friction Characteristics of the Microfluidic Heat Sink with Variously-Shaped Ribs for Chip Cooling
Previous Article in Journal
Application of HFCT and UHF Sensors in On-Line Partial Discharge Measurements for Insulation Diagnosis of High Voltage Equipment
Previous Article in Special Issue
A Wafer Level Vacuum Encapsulated Capacitive Accelerometer Fabricated in an Unmodified Commercial MEMS Process
Article Menu

Export Article

Open AccessArticle
Sensors 2015, 15(4), 7388-7411;

An Analytical Model for Squeeze-Film Damping of Perforated Torsional Microplates Resonators

1,* and 2
School of Mechanical Engineering, Southeast University, Jiangning, Nanjing 211189, China
Nanjing University of Posts and Telecommunications, Nanjing 210003, China
Author to whom correspondence should be addressed.
Academic Editor: Stefano Mariani
Received: 7 January 2015 / Revised: 16 March 2015 / Accepted: 19 March 2015 / Published: 25 March 2015
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering)
Full-Text   |   PDF [999 KB, uploaded 25 March 2015]   |  


Squeeze-film damping plays a significant role in the performance of micro-resonators because it determines their quality factors. Perforations in microstructures are often used to control the squeeze-film damping in micro-resonators. To model the perforation effects on the squeeze-film damping, many analytical models have been proposed, however, most of the previous models have been concerned with the squeeze-film damping due to the normal motion between the perforated vibrating plate and a fixed substrate, while there is a lack of works that model the squeeze-film damping of perforated torsion microplates, which are also widely used in MEMS devices. This paper presents an analytical model for the squeeze-film damping of perforated torsion microplates. The derivation in this paper is based on a modified Reynolds equation that includes compressibility and rarefaction effects. The pressure distribution under the vibrating plate is obtained using the double sine series. Closed-form expressions for the stiffness and the damping coefficients of the squeeze-film are derived. The accuracy of the model is verified by comparing its results with the finite element method (FEM) results and the experimental results available in the literature. The regime of validity and limitations of the present model are assessed. View Full-Text
Keywords: perforated torsion microplate; squeeze-film damping; quality factor perforated torsion microplate; squeeze-film damping; quality factor

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

Share & Cite This Article

MDPI and ACS Style

Li, P.; Fang, Y. An Analytical Model for Squeeze-Film Damping of Perforated Torsional Microplates Resonators. Sensors 2015, 15, 7388-7411.

Show more citation formats Show less citations formats

Related Articles

Article Metrics

Article Access Statistics



[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top