Sensors 2015, 15(4), 7388-7411; https://doi.org/10.3390/s150407388
An Analytical Model for Squeeze-Film Damping of Perforated Torsional Microplates Resonators
1
School of Mechanical Engineering, Southeast University, Jiangning, Nanjing 211189, China
2
Nanjing University of Posts and Telecommunications, Nanjing 210003, China
*
Author to whom correspondence should be addressed.
Academic Editor: Stefano Mariani
Received: 7 January 2015 / Revised: 16 March 2015 / Accepted: 19 March 2015 / Published: 25 March 2015
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering)
Abstract
Squeeze-film damping plays a significant role in the performance of micro-resonators because it determines their quality factors. Perforations in microstructures are often used to control the squeeze-film damping in micro-resonators. To model the perforation effects on the squeeze-film damping, many analytical models have been proposed, however, most of the previous models have been concerned with the squeeze-film damping due to the normal motion between the perforated vibrating plate and a fixed substrate, while there is a lack of works that model the squeeze-film damping of perforated torsion microplates, which are also widely used in MEMS devices. This paper presents an analytical model for the squeeze-film damping of perforated torsion microplates. The derivation in this paper is based on a modified Reynolds equation that includes compressibility and rarefaction effects. The pressure distribution under the vibrating plate is obtained using the double sine series. Closed-form expressions for the stiffness and the damping coefficients of the squeeze-film are derived. The accuracy of the model is verified by comparing its results with the finite element method (FEM) results and the experimental results available in the literature. The regime of validity and limitations of the present model are assessed. View Full-Text
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Li, P.; Fang, Y. An Analytical Model for Squeeze-Film Damping of Perforated Torsional Microplates Resonators. Sensors 2015, 15, 7388-7411.