Next Article in Journal
A Noncontact FMCW Radar Sensor for Displacement Measurement in Structural Health Monitoring
Next Article in Special Issue
Heat Transfer and Friction Characteristics of the Microfluidic Heat Sink with Variously-Shaped Ribs for Chip Cooling
Previous Article in Journal
Application of HFCT and UHF Sensors in On-Line Partial Discharge Measurements for Insulation Diagnosis of High Voltage Equipment
Previous Article in Special Issue
A Wafer Level Vacuum Encapsulated Capacitive Accelerometer Fabricated in an Unmodified Commercial MEMS Process
Open AccessArticle

An Analytical Model for Squeeze-Film Damping of Perforated Torsional Microplates Resonators

by 1,* and 2
1
School of Mechanical Engineering, Southeast University, Jiangning, Nanjing 211189, China
2
Nanjing University of Posts and Telecommunications, Nanjing 210003, China
*
Author to whom correspondence should be addressed.
Academic Editor: Stefano Mariani
Sensors 2015, 15(4), 7388-7411; https://doi.org/10.3390/s150407388
Received: 7 January 2015 / Revised: 16 March 2015 / Accepted: 19 March 2015 / Published: 25 March 2015
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering)
Squeeze-film damping plays a significant role in the performance of micro-resonators because it determines their quality factors. Perforations in microstructures are often used to control the squeeze-film damping in micro-resonators. To model the perforation effects on the squeeze-film damping, many analytical models have been proposed, however, most of the previous models have been concerned with the squeeze-film damping due to the normal motion between the perforated vibrating plate and a fixed substrate, while there is a lack of works that model the squeeze-film damping of perforated torsion microplates, which are also widely used in MEMS devices. This paper presents an analytical model for the squeeze-film damping of perforated torsion microplates. The derivation in this paper is based on a modified Reynolds equation that includes compressibility and rarefaction effects. The pressure distribution under the vibrating plate is obtained using the double sine series. Closed-form expressions for the stiffness and the damping coefficients of the squeeze-film are derived. The accuracy of the model is verified by comparing its results with the finite element method (FEM) results and the experimental results available in the literature. The regime of validity and limitations of the present model are assessed. View Full-Text
Keywords: perforated torsion microplate; squeeze-film damping; quality factor perforated torsion microplate; squeeze-film damping; quality factor
Show Figures

Figure 1

MDPI and ACS Style

Li, P.; Fang, Y. An Analytical Model for Squeeze-Film Damping of Perforated Torsional Microplates Resonators. Sensors 2015, 15, 7388-7411. https://doi.org/10.3390/s150407388

AMA Style

Li P, Fang Y. An Analytical Model for Squeeze-Film Damping of Perforated Torsional Microplates Resonators. Sensors. 2015; 15(4):7388-7411. https://doi.org/10.3390/s150407388

Chicago/Turabian Style

Li, Pu; Fang, Yuming. 2015. "An Analytical Model for Squeeze-Film Damping of Perforated Torsional Microplates Resonators" Sensors 15, no. 4: 7388-7411. https://doi.org/10.3390/s150407388

Find Other Styles

Article Access Map by Country/Region

1
Only visits after 24 November 2015 are recorded.
Search more from Scilit
 
Search
Back to TopTop