Fabrication of Capacitive Acoustic Resonators Combining 3D Printing and 2D Inkjet Printing Techniques
AbstractA capacitive acoustic resonator developed by combining three-dimensional (3D) printing and two-dimensional (2D) printed electronics technique is described. During this work, a patterned bottom structure with rigid backplate and cavity is fabricated directly by a 3D printing method, and then a direct write inkjet printing technique has been employed to print a silver conductive layer. A novel approach has been used to fabricate a diaphragm for the acoustic sensor as well, where the conductive layer is inkjet-printed on a pre-stressed thin organic film. After assembly, the resulting structure contains an electrically conductive diaphragm positioned at a distance from a fixed bottom electrode separated by a spacer. Measurements confirm that the transducer acts as capacitor. The deflection of the diaphragm in response to the incident acoustic single was observed by a laser Doppler vibrometer and the corresponding change of capacitance has been calculated, which is then compared with the numerical result. Observation confirms that the device performs as a resonator and provides adequate sensitivity and selectivity at its resonance frequency. View Full-Text
- Supplementary File 1:
Supplementary (PDF, 1272 KB)
Share & Cite This Article
Haque, R.I.; Ogam, E.; Loussert, C.; Benaben, P.; Boddaert, X. Fabrication of Capacitive Acoustic Resonators Combining 3D Printing and 2D Inkjet Printing Techniques. Sensors 2015, 15, 26018-26038.
Haque RI, Ogam E, Loussert C, Benaben P, Boddaert X. Fabrication of Capacitive Acoustic Resonators Combining 3D Printing and 2D Inkjet Printing Techniques. Sensors. 2015; 15(10):26018-26038.Chicago/Turabian Style
Haque, Rubaiyet I.; Ogam, Erick; Loussert, Christophe; Benaben, Patrick; Boddaert, Xavier. 2015. "Fabrication of Capacitive Acoustic Resonators Combining 3D Printing and 2D Inkjet Printing Techniques." Sensors 15, no. 10: 26018-26038.