In-Plane Resonant Nano-Electro-Mechanical Sensors: A Comprehensive Study on Design, Fabrication and Characterization Challenges
Hassani, F.A.; Tsuchiya, Y.; Mizuta, H. In-Plane Resonant Nano-Electro-Mechanical Sensors: A Comprehensive Study on Design, Fabrication and Characterization Challenges. Sensors 2013, 13, 9364-9387. https://doi.org/10.3390/s130709364
Hassani FA, Tsuchiya Y, Mizuta H. In-Plane Resonant Nano-Electro-Mechanical Sensors: A Comprehensive Study on Design, Fabrication and Characterization Challenges. Sensors. 2013; 13(7):9364-9387. https://doi.org/10.3390/s130709364
Chicago/Turabian StyleHassani, Faezeh A., Yoshishige Tsuchiya, and Hiroshi Mizuta. 2013. "In-Plane Resonant Nano-Electro-Mechanical Sensors: A Comprehensive Study on Design, Fabrication and Characterization Challenges" Sensors 13, no. 7: 9364-9387. https://doi.org/10.3390/s130709364