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Journal: Sensors, 2013
Volume: 13
Number: 9364
Article:
In-Plane Resonant Nano-Electro-Mechanical Sensors: A Comprehensive Study on Design, Fabrication and Characterization Challenges
Authors:
by
Faezeh Arab Hassani, Yoshishige Tsuchiya and Hiroshi Mizuta
Link:
https://www.mdpi.com/1424-8220/13/7/9364
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