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Journal: Sensors, 2012
Volume: 12
Number: 13985

Article: Physically-Based Reduced Order Modelling of a Uni-Axial Polysilicon MEMS Accelerometer
Authors: by Aldo Ghisi, Stefano Mariani, Alberto Corigliano and Sarah Zerbini
Link: https://www.mdpi.com/1424-8220/12/10/13985

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