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Journal: Sensors, 2011
Volume: 11
Number: 6257
Article:
Implementation of the CMOS MEMS Condenser Microphone with Corrugated Metal Diaphragm and Silicon Back-Plate
Authors:
by
Chien-Hsin Huang, Chien-Hsing Lee, Tsung-Min Hsieh, Li-Chi Tsao, Shaoyi Wu, Jhyy-Cheng Liou, Ming-Yi Wang, Li-Che Chen, Ming-Chuen Yip and Weileun Fang
Link:
https://www.mdpi.com/1424-8220/11/6/6257
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