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Journal: Sensors, 2010
Volume: 10
Number: 2675

Article: Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy
Authors: by Mao-Hsiung Chiang
Link: https://www.mdpi.com/1424-8220/10/4/2675

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