Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy
Abstract
:1. Introduction
2. X-Y Dual-axial Pneumatic-piezoelectric Hybrid Actuator for Positioning Control
3. Controller Design
3.1. Self-Organizing Fuzzy Sliding Mode Control
3.2. Decoupling Compensator
3.2.1. Decoupling compensator for single axis
3.2.2. X-Y decoupling compensator
3.3. Controller Design
4. Experiments
4.1. Position Control of Pneumatic Actuator
4.2. Position Control of Piezoelectric Actuator
4.3. Position Control of the Pneumatic-Piezoelectric Hybrid Actuator for Single Axis
4.4. Robustness Test of the Pneumatic-Piezoelectric Hybrid Actuator for Single Axis
4.5. Position Control of the XY Dual-Axial Pneumatic-Piezoelectric Hybrid Actuators
5. Conclusions
Acknowledgments
References
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Component | Specification |
---|---|
Pneumatic actuator | X-axis: Piston diameter: φ25 mm Stroke: 600 mm Y-axis: Piston diameter: φ25 mm Stroke: 500 mm |
Piezoelectric actuator | Stack type Stroke: 100 μm Driving voltage: 0∼150 V |
Piezoelectric amplifier | Input : 0∼5V Output: 0∼150 V |
Proportional servo valve | 5/3 directional flow control valve Driving voltage:0∼10 V Rated volume flow: 700 L/min. Max. hysteresis: 0.4% –3 dB Bandwidth: 125 Hz for 100% stroke |
Linear encoder | Resolution: 20 nm |
Data acquisition card | 12 bits D/A (digital-to-analog); 16 bits DIO (digital input/digital output) |
Counter card | 3 × 24-bits counters 1.0 MHz input rate |
PC-Based Controller | Industrial PC Pentium 4 CPU |
(a) Pneumatic controller | |
αpneu = 50 | Gs = 0.1 |
Gu = 0.8 | γV / MV = 0.001 |
T(σpneu) ={−1, −0.67, −0.1, 0, 0.1, 0.67, 1} | |
T(upneu) ={−1 −0.66 −0.33 0 0.33 0.66 1} |
(b) Piezoelectric controller | |
αpzt = 50 | Gs = 4.8 |
Gu = 0.4 | γV / MV = 0.0007 |
T(σpzt) ={−1 −0.25 −0.01 0 0.01 0.25 1} | |
T(upzt) ={−0.5 −0.22 −0.01 0 0.01 0.22 0.5} |
(c) Decoupling compensator - single axis | |
αw = 4 | Gs = 0.5 |
Gu = 0.8 | |
T(σpzt) ={−1 −0.4 −0.1 0 0.1 0.4 1} | |
T(upzt) ={−1 −0.6 −0.3 0 0.3 0.6 1} |
(d) Decoupling compensator—XY axis | |
αxy = 4 | Gs = 0.02 |
αyx = 4 | Gu = 0.04 |
T(σyx) ={−0.1 −0.004 0 0.005 0.1} | |
T(uyx) ={−0.025 −0.0125 0 0.0125 0.025} | |
T(σxy) ={−0.1 −0.005 0 0.0005 0.1} | |
T(uxy) ={−0.05 −0.025 0 0.025 0.05} |
X-axis response | Y-axis response | |||
---|---|---|---|---|
without X-Y decoupling controller | with X-Y decoupling controller | without X-Y decoupling controller | with X-Y decoupling controller | |
Rising time tr | 3.034 s | 3.035 s | 2.545 s | 2.555 s |
Steady state error ess | 20 nm at 4.035 s | 20 nm at 3.425 s | 20 nm at 4.205 s | 20 nm at 3. 553 s |
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Chiang, M.-H. Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy. Sensors 2010, 10, 2675-2693. https://doi.org/10.3390/s100402675
Chiang M-H. Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy. Sensors. 2010; 10(4):2675-2693. https://doi.org/10.3390/s100402675
Chicago/Turabian StyleChiang, Mao-Hsiung. 2010. "Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy" Sensors 10, no. 4: 2675-2693. https://doi.org/10.3390/s100402675
APA StyleChiang, M.-H. (2010). Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy. Sensors, 10(4), 2675-2693. https://doi.org/10.3390/s100402675