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Open AccessArticle

Novel Designs for Application Specific MEMS Pressure Sensors

Department of Micro- and Nanotechnology, Technical University of Denmark, DTU Nanotech, Building 345E, DK-2800 Kgs. Lyngby, Denmark
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Sensors 2010, 10(11), 9541-9563; https://doi.org/10.3390/s101109541
Received: 2 August 2010 / Revised: 25 September 2010 / Accepted: 20 October 2010 / Published: 28 October 2010
(This article belongs to the Special Issue State-of-the-Art Sensors Technology in Denmark)
In the framework of developing innovative microfabricated pressure sensors, we present here three designs based on different readout principles, each one tailored for a specific application. A touch mode capacitive pressure sensor with high sensitivity (14 pF/bar), low temperature dependence and high capacitive output signal (more than 100 pF) is depicted. An optical pressure sensor intrinsically immune to electromagnetic interference, with large pressure range (0–350 bar) and a sensitivity of 1 pm/bar is presented. Finally, a resonating wireless pressure sensor power source free with a sensitivity of 650 KHz/mmHg is described. These sensors will be related with their applications in harsh environment, distributed systems and medical environment, respectively. For many aspects, commercially available sensors, which in vast majority are piezoresistive, are not suited for the applications proposed. View Full-Text
Keywords: micromachined; pressure; capacitive; optical; wireless; silicon; MEMS; MOEMS micromachined; pressure; capacitive; optical; wireless; silicon; MEMS; MOEMS
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MDPI and ACS Style

Fragiacomo, G.; Reck, K.; Lorenzen, L.; Thomsen, E.V. Novel Designs for Application Specific MEMS Pressure Sensors. Sensors 2010, 10, 9541-9563.

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