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Entropy Generation and Thermoelastic Damping in the In-plane Vibration of Microring Resonators

1
College of Automobile and Traffic Engineering, Nanjing Forestry University, Nanjing 210037, China
2
School of Mechanical Engineering, Southeast University, Nanjing 211189, China
*
Author to whom correspondence should be addressed.
Entropy 2019, 21(7), 631; https://doi.org/10.3390/e21070631
Received: 10 May 2019 / Revised: 24 June 2019 / Accepted: 25 June 2019 / Published: 27 June 2019
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Abstract

Thermoelastic damping is a critical issue for designing very high quality factor microresonators. This paper derives the entropy generation, associated with the irreversibility in heat conduction, that is used for ring resonators in in-plane vibration and presents an analytical model of thermoelastic damping according to heat increments calculated by entropy theory. We consider the heat flow only in radial thickness of the ring and obtain a complex temperature field that is out of phase with the mechanical stress. The thermoelastic dissipation is calculated in the perspective of heat increments that appear due to entropy generation. The analytical model is validated by comparing with an LR (Lifshitz and Roukes) model, finite-element method and measurement. The accuracy of the present model is found to be very high for different ambient temperatures and structures. The effects of structure dimensions and vibration frequencies on entropy generation and thermoelastic damping is investigated for ring resonators under in-plane vibration. View Full-Text
Keywords: thermoelastic damping; entropy generation; quality factor; ring resonator; in-plane mode thermoelastic damping; entropy generation; quality factor; ring resonator; in-plane mode
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Tai, Y.; Li, P.; Zheng, Y.; Tian, J. Entropy Generation and Thermoelastic Damping in the In-plane Vibration of Microring Resonators. Entropy 2019, 21, 631.

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