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Entropy 2019, 21(4), 396;

Mechanical Properties and Corrosion Resistance of NbTiAlSiZrNx High-Entropy Films Prepared by RF Magnetron Sputtering

1,†, 1,†, 2,3,4,†, 2,3,4,5, 6, 2,3,4 and 1,*
State Key Laboratory of Advanced Metals and Materials, University of Science and Technology Beijing, Beijing 100083, China
School of Mechanical Engineering, Qinghai University, Xining 810016, China
Qinghai Provincial Engineering Research Center of High Performance Light Metal Alloys and Forming, Xining 810016, China
Qinghai Provincial Key Laboratory of New Light Alloys, Xining 810016, China
University of Sheffield, Sheffield S37GE, UK
School of Materials Science, Shanghai DianJi University, Shanghai 201306, China
Author to whom correspondence should be addressed.
These authors contributed equally: Q. Xing, H. Wang and M. Chen.
Received: 28 February 2019 / Revised: 5 April 2019 / Accepted: 8 April 2019 / Published: 13 April 2019
(This article belongs to the Special Issue High-Entropy Materials)
PDF [5031 KB, uploaded 23 April 2019]


In this study, we designed and fabricated NbTiAlSiZrNx high-entropy alloy (HEA) films. The parameters of the radio frequency (RF) pulse magnetron sputtering process were fixed to maintain the N2 flux ratio at 0%, 10%, 20%, 30%, 40%, and 50%. Subsequently, NbTiAlSiZrNx HEA films were deposited on the 304 stainless steel (SS) substrate. With an increasing N2 flow rate, the film deposited at a RN of 50% had the highest hardness (12.4 GPa), the highest modulus (169 GPa), a small roughness, and a beautiful color. The thicknesses of the films were gradually reduced from 298.8 nm to 200 nm, and all the thin films were of amorphous structure. The electrochemical corrosion resistance of the film in a 0.5 mol/L H2SO4 solution at room temperature was studied and the characteristics changed. The HEA films prepared at N2 flow rates of 10% and 30% were more prone to corrosion than 304 SS, but the corrosion rate was lower than that of 304 SS. NbTiAlSiZrNx HEA films prepared at N2 flow rates of 20%, 40%, and 50% were more corrosion-resistant than 304 SS. In addition, the passivation stability of the NbTiAlSiZrNx HEA was worse than that of 304 SS. Altogether, these results show that pitting corrosion occurred on NbTiAlSiZrNx HEA films. View Full-Text
Keywords: thin films; high-entropy alloy films; hardness; corrosion-resistance thin films; high-entropy alloy films; hardness; corrosion-resistance

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Xing, Q.; Wang, H.; Chen, M.; Chen, Z.; Li, R.; Jin, P.; Zhang, Y. Mechanical Properties and Corrosion Resistance of NbTiAlSiZrNx High-Entropy Films Prepared by RF Magnetron Sputtering. Entropy 2019, 21, 396.

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