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Micromachines, Volume 5, Issue 3 (September 2014), Pages 408-796

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Research

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p. 408-419
by , ,  and
Micromachines 2014, 5(3), 408-419; doi:10.3390/mi5030408
Received: 28 May 2014; in revised form: 24 June 2014 / Accepted: 26 June 2014 / Published: 2 July 2014
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(This article belongs to the Special Issue Laser Micro- and Nano- Processing)
p. 420-431
by , ,  and
Micromachines 2014, 5(3), 420-431; doi:10.3390/mi5030420
Received: 2 May 2014; in revised form: 18 June 2014 / Accepted: 26 June 2014 / Published: 3 July 2014
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p. 432-441
by  and
Micromachines 2014, 5(3), 432-441; doi:10.3390/mi5030432
Received: 19 May 2014; in revised form: 16 June 2014 / Accepted: 16 June 2014 / Published: 4 July 2014
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(This article belongs to the Special Issue Microlenses)
p. 442-456
by , ,  and
Micromachines 2014, 5(3), 442-456; doi:10.3390/mi5030442
Received: 5 May 2014; in revised form: 8 June 2014 / Accepted: 7 July 2014 / Published: 18 July 2014
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(This article belongs to the Special Issue 15 Years of SU8 as MEMS Material)
p. 457-471
by  and
Micromachines 2014, 5(3), 457-471; doi:10.3390/mi5030457
Received: 30 May 2014; in revised form: 11 July 2014 / Accepted: 15 July 2014 / Published: 21 July 2014
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(This article belongs to the Special Issue Microlenses)
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p. 472-485
by , , ,  and
Micromachines 2014, 5(3), 472-485; doi:10.3390/mi5030472
Received: 10 June 2014; in revised form: 9 July 2014 / Accepted: 16 July 2014 / Published: 22 July 2014
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(This article belongs to the Special Issue Laser Micro- and Nano- Processing)
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p. 496-504
by , ,  and
Micromachines 2014, 5(3), 496-504; doi:10.3390/mi5030496
Received: 5 June 2014; in revised form: 22 July 2014 / Accepted: 29 July 2014 / Published: 4 August 2014
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(This article belongs to the Special Issue Microlenses)
p. 505-514
by , , , , ,  and
Micromachines 2014, 5(3), 505-514; doi:10.3390/mi5030505
Received: 2 July 2014; in revised form: 24 July 2014 / Accepted: 25 July 2014 / Published: 6 August 2014
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(This article belongs to the Special Issue Laser Micro- and Nano- Processing)
p. 515-527
by , , ,  and
Micromachines 2014, 5(3), 515-527; doi:10.3390/mi5030515
Received: 16 April 2014; in revised form: 3 August 2014 / Accepted: 4 August 2014 / Published: 7 August 2014
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p. 528-546
by  and
Micromachines 2014, 5(3), 528-546; doi:10.3390/mi5030528
Received: 19 December 2013; in revised form: 22 July 2014 / Accepted: 31 July 2014 / Published: 11 August 2014
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p. 547-557
by , , ,  and
Micromachines 2014, 5(3), 547-557; doi:10.3390/mi5030547
Received: 25 June 2014; in revised form: 2 August 2014 / Accepted: 5 August 2014 / Published: 19 August 2014
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(This article belongs to the Special Issue Microactuators)
p. 558-569
by , ,  and
Micromachines 2014, 5(3), 558-569; doi:10.3390/mi5030558
Received: 3 July 2014; in revised form: 12 August 2014 / Accepted: 18 August 2014 / Published: 21 August 2014
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(This article belongs to the Special Issue Power MEMS)
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p. 570-582
by , , ,  and
Micromachines 2014, 5(3), 570-582; doi:10.3390/mi5030570
Received: 30 May 2014; in revised form: 21 July 2014 / Accepted: 21 July 2014 / Published: 22 August 2014
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(This article belongs to the Special Issue Advances in MMICs)
p. 583-593
by , , , , , , , , ,  and
Micromachines 2014, 5(3), 583-593; doi:10.3390/mi5030583
Received: 29 June 2014; in revised form: 2 August 2014 / Accepted: 18 August 2014 / Published: 25 August 2014
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(This article belongs to the Special Issue 15 Years of SU8 as MEMS Material)
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p. 607-621
by , ,  and
Micromachines 2014, 5(3), 607-621; doi:10.3390/mi5030607
Received: 9 June 2014; in revised form: 10 August 2014 / Accepted: 20 August 2014 / Published: 28 August 2014
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(This article belongs to the Special Issue Microlenses)
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p. 654-666
by ,  and
Micromachines 2014, 5(3), 654-666; doi:10.3390/mi5030654
Received: 17 July 2014; in revised form: 24 July 2014 / Accepted: 6 August 2014 / Published: 1 September 2014
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(This article belongs to the Special Issue Micromixer & Micromixing)
p. 667-680
by  and
Micromachines 2014, 5(3), 667-680; doi:10.3390/mi5030667
Received: 11 August 2014; in revised form: 1 September 2014 / Accepted: 3 September 2014 / Published: 10 September 2014
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p. 681-696
by , , ,  and
Micromachines 2014, 5(3), 681-696; doi:10.3390/mi5030681
Received: 17 July 2014; in revised form: 27 August 2014 / Accepted: 27 August 2014 / Published: 10 September 2014
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p. 697-710
by  and
Micromachines 2014, 5(3), 697-710; doi:10.3390/mi5030697
Received: 18 August 2014; in revised form: 4 September 2014 / Accepted: 4 September 2014 / Published: 11 September 2014
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(This article belongs to the Special Issue Laser Micro- and Nano- Processing)
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p. 711-721
by ,  and
Micromachines 2014, 5(3), 711-721; doi:10.3390/mi5030711
Received: 5 June 2014; in revised form: 9 August 2014 / Accepted: 3 September 2014 / Published: 12 September 2014
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(This article belongs to the Special Issue Advances in MMICs)
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p. 722-737
by  and
Micromachines 2014, 5(3), 722-737; doi:10.3390/mi5030722
Received: 12 June 2014; in revised form: 18 August 2014 / Accepted: 5 September 2014 / Published: 18 September 2014
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(This article belongs to the Special Issue Micro/Nano Fabrication)
p. 738-755
by , ,  and
Micromachines 2014, 5(3), 738-755; doi:10.3390/mi5030738
Received: 14 July 2014; in revised form: 9 September 2014 / Accepted: 12 September 2014 / Published: 22 September 2014
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(This article belongs to the Special Issue 15 Years of SU8 as MEMS Material)
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p. 756-765
by , ,  and
Micromachines 2014, 5(3), 756-765; doi:10.3390/mi5030756
Received: 1 August 2014; in revised form: 10 September 2014 / Accepted: 12 September 2014 / Published: 22 September 2014
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(This article belongs to the Special Issue Laser Micro- and Nano- Processing)
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p. 766-782
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Micromachines 2014, 5(3), 766-782; doi:10.3390/mi5030766
Received: 26 June 2014; in revised form: 4 September 2014 / Accepted: 9 September 2014 / Published: 22 September 2014
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(This article belongs to the Special Issue 15 Years of SU8 as MEMS Material)
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p. 783-796
by , ,  and
Micromachines 2014, 5(3), 783-796; doi:10.3390/mi5030783
Received: 4 August 2014; in revised form: 5 September 2014 / Accepted: 11 September 2014 / Published: 23 September 2014
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(This article belongs to the Special Issue Micropumps: Design, Fabrication and Applications)

Review

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p. 486-495
by  and
Micromachines 2014, 5(3), 486-495; doi:10.3390/mi5030486
Received: 17 June 2014; in revised form: 14 July 2014 / Accepted: 15 July 2014 / Published: 23 July 2014
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(This article belongs to the Special Issue 15 Years of SU8 as MEMS Material)
p. 594-606
by , ,  and
Micromachines 2014, 5(3), 594-606; doi:10.3390/mi5030594
Received: 17 June 2014; in revised form: 1 August 2014 / Accepted: 4 August 2014 / Published: 26 August 2014
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(This article belongs to the Special Issue 15 Years of SU8 as MEMS Material)
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p. 622-653
by ,  and
Micromachines 2014, 5(3), 622-653; doi:10.3390/mi5030622
Received: 17 June 2014; in revised form: 24 July 2014 / Accepted: 19 August 2014 / Published: 29 August 2014
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