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Micromachines 2014, 5(3), 594-606; doi:10.3390/mi5030594

SU-8 as a Material for Microfabricated Particle Physics Detectors

1
Physics Department, European Organization for Nuclear Research (CERN), CH-1211 Geneva 23, Switzerland
2
Microsystems Laboratory, École Polytechnique Fédérale de Lausanne (EPFL), Station 17, CH-1015 Lausanne, Switzerland
3
Gersteltec Sàrl, General-Guisan 26, CH-1009 Pully, Switzerland
*
Author to whom correspondence should be addressed.
Received: 17 June 2014 / Revised: 1 August 2014 / Accepted: 4 August 2014 / Published: 26 August 2014
(This article belongs to the Special Issue 15 Years of SU8 as MEMS Material)
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Abstract

Several recent detector technologies developed for particle physics applications are based on microfabricated structures. Detectors built with this approach generally exhibit the overall best performance in terms of spatial and time resolution. Many properties of the SU-8 photoepoxy make it suitable for the manufacturing of microstructured particle detectors. This article aims to review some emerging detector technologies making use of SU-8 microstructuring, namely micropattern gaseous detectors and microfluidic scintillation detectors. The general working principle and main process steps for the fabrication of each device are reported, with a focus on the advantages brought to the device functionality by the use of SU-8. A novel process based on multiple bonding steps for the fabrication of thin multilayer microfluidic scintillation detectors developed by the authors is presented. Finally, a brief overview of the applications for the discussed devices is given. View Full-Text
Keywords: SU-8; particle detectors; micropattern gaseous detectors; Micromegas; microfluidics; scintillation detectors; microfluidic scintillation detectors SU-8; particle detectors; micropattern gaseous detectors; Micromegas; microfluidics; scintillation detectors; microfluidic scintillation detectors
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This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Maoddi, P.; Mapelli, A.; Jiguet, S.; Renaud, P. SU-8 as a Material for Microfabricated Particle Physics Detectors. Micromachines 2014, 5, 594-606.

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