Special Issue "15 Years of SU8 as MEMS Material"

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A special issue of Micromachines (ISSN 2072-666X).

Deadline for manuscript submissions: closed (30 June 2014)

Special Issue Editors

Guest Editor
Prof. Dr. Phillipe Renaud
EPFL-STI-IMT-LMIS, BM-Station 17, CH-1015 Lausanne, Switzerland
Website: http://people.epfl.ch/philippe.renaud?lang=en
E-Mail: philippe.renaud@epfl.ch
Phone: +41 21 693 67 97
Fax: +41 21 693 59 50
Interests: bioMEMS; microfluidics; cell chips; bioelectronics; biosensors

Guest Editor
Dr. Arnaud Bertsch
EPFL-STI-IMT-LMIS, BM-Station 17, CH-1015 Lausanne, Switzerland
Website: http://people.epfl.ch/cgi-bin/people?id=113143&op=publications&lang=en&cvlang=en
E-Mail: arnaud.bertsch@epfl.ch
Phone: +41 21 693 66 06
Fax: +41 21 693 59 50
Interests: polymers; MEMS processes; BioMEMS; stereolithography; medical devices

Special Issue Information

Dear Colleagues,

Interest in the use of SU8 as MEMS material was first expressed in 1997; since then SU8 has significantly contributed to the development of a large array of microsystems. First used as a negative photoresist, the high aspect ratio components that were quickly obtained, and the possibility to easily pattern multilevel structures, made it a polymer of choice for the UV-LIGA process, and led to its early adoption in industrial applications. In the last 15 years, SU8 has been largely used in academic research for a large range of applications: structural components, optical waveguides, micro-channels for microfluidic and lab-on-chip applications, micro-mixers, cell-chips, bio-related applications, etc. In addition to UV-photolithography, many other micro-patterning methods have been used to process SU8, such as electron-beam lithography, laser ablation, thermal and UV nano-imprinting, inkjet printing, molding, etc. Composite materials based on SU8 have also been developed by the addition of a wide variety of fillers such as nanoparticles, carbon nanotubes, carbon black, ceramic powders, and many others.

This Special Issue aims to highlight the current state of the art in the use of SU8 for microtechnology. We invite contributions on all aspects related to SU8, including its processing techniques, its use in new composite resists, its academic and industrial developments, its use for manufacturing systems in optics, biology, medicine, chemistry, mechanics, fluidics, etc.

We are looking forward to receiving your contributions.

Prof. Dr. Philippe Renaud
Dr. Arnaud Bertsch
Guest Editors

Submission

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. Papers will be published continuously (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are refereed through a peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed Open Access quarterly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 500 CHF (Swiss Francs). English correction and/or formatting fees of 250 CHF (Swiss Francs) will be charged in certain cases for those articles accepted for publication that require extensive additional formatting and/or English corrections.

Keywords

  • SU8
  • UV-LIGA
  • Nanopatterning
  • SU8-based composite materials
  • New processing techniques for SU8
  • SU8 as structural material
  • Etching SU8
  • Innovative micro-components
  • Cell-chips
  • Medical devices
  • SU8-based waveguides
  • Application of SU8 in optics
  • Characterization of SU8 and SU8-based composites
  • PDMS devices made from SU8 molding
  • Lab on a chip
  • Beyond SU8: alternative high aspect ratio resists

Published Papers (8 papers)

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Displaying article 1-8
p. 738-755
by , ,  and
Micromachines 2014, 5(3), 738-755; doi:10.3390/mi5030738
Received: 14 July 2014; in revised form: 9 September 2014 / Accepted: 12 September 2014 / Published: 22 September 2014
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(This article belongs to the Special Issue 15 Years of SU8 as MEMS Material)
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p. 766-782
by
Micromachines 2014, 5(3), 766-782; doi:10.3390/mi5030766
Received: 26 June 2014; in revised form: 4 September 2014 / Accepted: 9 September 2014 / Published: 22 September 2014
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(This article belongs to the Special Issue 15 Years of SU8 as MEMS Material)
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p. 594-606
by , ,  and
Micromachines 2014, 5(3), 594-606; doi:10.3390/mi5030594
Received: 17 June 2014; in revised form: 1 August 2014 / Accepted: 4 August 2014 / Published: 26 August 2014
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(This article belongs to the Special Issue 15 Years of SU8 as MEMS Material)
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p. 583-593
by , , , , , , , , ,  and
Micromachines 2014, 5(3), 583-593; doi:10.3390/mi5030583
Received: 29 June 2014; in revised form: 2 August 2014 / Accepted: 18 August 2014 / Published: 25 August 2014
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(This article belongs to the Special Issue 15 Years of SU8 as MEMS Material)
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p. 486-495
by  and
Micromachines 2014, 5(3), 486-495; doi:10.3390/mi5030486
Received: 17 June 2014; in revised form: 14 July 2014 / Accepted: 15 July 2014 / Published: 23 July 2014
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(This article belongs to the Special Issue 15 Years of SU8 as MEMS Material)
p. 442-456
by , ,  and
Micromachines 2014, 5(3), 442-456; doi:10.3390/mi5030442
Received: 5 May 2014; in revised form: 8 June 2014 / Accepted: 7 July 2014 / Published: 18 July 2014
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(This article belongs to the Special Issue 15 Years of SU8 as MEMS Material)
p. 263-274
by ,  and
Micromachines 2014, 5(2), 263-274; doi:10.3390/mi5020263
Received: 21 March 2014; in revised form: 1 May 2014 / Accepted: 8 May 2014 / Published: 19 May 2014
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(This article belongs to the Special Issue 15 Years of SU8 as MEMS Material)
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p. 216-227
by , ,  and
Micromachines 2014, 5(2), 216-227; doi:10.3390/mi5020216
Received: 25 March 2014; in revised form: 11 April 2014 / Accepted: 14 April 2014 / Published: 23 April 2014
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Last update: 31 January 2014

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