Special Issue "15 Years of SU8 as MEMS Material"
A special issue of Micromachines (ISSN 2072-666X).
Deadline for manuscript submissions: closed (31 March 2015)
Interest in the use of SU8 as MEMS material was first expressed in 1997; since then SU8 has significantly contributed to the development of a large array of microsystems. First used as a negative photoresist, the high aspect ratio components that were quickly obtained, and the possibility to easily pattern multilevel structures, made it a polymer of choice for the UV-LIGA process, and led to its early adoption in industrial applications. In the last 15 years, SU8 has been largely used in academic research for a large range of applications: structural components, optical waveguides, micro-channels for microfluidic and lab-on-chip applications, micro-mixers, cell-chips, bio-related applications, etc. In addition to UV-photolithography, many other micro-patterning methods have been used to process SU8, such as electron-beam lithography, laser ablation, thermal and UV nano-imprinting, inkjet printing, molding, etc. Composite materials based on SU8 have also been developed by the addition of a wide variety of fillers such as nanoparticles, carbon nanotubes, carbon black, ceramic powders, and many others.
This Special Issue aims to highlight the current state of the art in the use of SU8 for microtechnology. We invite contributions on all aspects related to SU8, including its processing techniques, its use in new composite resists, its academic and industrial developments, its use for manufacturing systems in optics, biology, medicine, chemistry, mechanics, fluidics, etc.
We are looking forward to receiving your contributions.
Prof. Dr. Philippe Renaud
Dr. Arnaud Bertsch
Manuscript Submission Information
Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All papers will be peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.
Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.
Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 1200 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.
- SU8-based composite materials
- New processing techniques for SU8
- SU8 as structural material
- Etching SU8
- Innovative micro-components
- Medical devices
- SU8-based waveguides
- Application of SU8 in optics
- Characterization of SU8 and SU8-based composites
- PDMS devices made from SU8 molding
- Lab on a chip
- Beyond SU8: alternative high aspect ratio resists