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Micromachines 2014, 5(3), 722-737; doi:10.3390/mi5030722

Fabrication and Testing of an Osmotic Pressure Sensor for Glucose Sensing Application

1
Department of Electronics and Electrical Engineering, Indian Institute of Technology Guwahati, Assam-781039, India
2
Centre for Nanotechnology, Indian Institute of Technology Guwahati, Assam-781039, India
*
Author to whom correspondence should be addressed.
Received: 12 June 2014 / Revised: 18 August 2014 / Accepted: 5 September 2014 / Published: 18 September 2014
(This article belongs to the Special Issue Micro/Nano Fabrication)
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Abstract

This paper presents a chemical reaction-free sensor, based on the osmosis principle, fabricated to measure the change in glucose concentration levels. The sensor consists of a square cavity filled with a known concentration of glucose solution and sealed with a semi-permeable membrane. The volume inside the cavity changes in proportion to the glucose concentration outside the device and introduces the displacement in the silicon (Si) membrane on the top. The main considerations targeted for this sensor are better response time, chemical-free nature, improved lifetime and absence of any mechanical excitations. Moreover, as the size of a system plays a major role, efforts have been taken to reduce the dimension of the presented system. The designed glucose sensor is fabricated by employing a bulk micromachining technology on a SOI (silicon on insulator) substrate. This will allow batch fabrication, as well as the integration of the electronic circuit on the same substrate. The output voltage obtained is varied from View Full-Text
Keywords: diabetes; glucose sensor; MEMS (micro-electro-mechanical systems); osmosis; piezoresistive pressure sensor; semi-permeable membrane diabetes; glucose sensor; MEMS (micro-electro-mechanical systems); osmosis; piezoresistive pressure sensor; semi-permeable membrane
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Ch, N.; Paily, R.P. Fabrication and Testing of an Osmotic Pressure Sensor for Glucose Sensing Application. Micromachines 2014, 5, 722-737.

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