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Micromachines 2014, 5(3), 697-710; https://doi.org/10.3390/mi5030697

Three-Dimensional Glass Monolithic Micro-Flexure Fabricated by Femtosecond Laser Exposure and Chemical Etching

Mechanical Engineering Department, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands
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Received: 18 August 2014 / Revised: 4 September 2014 / Accepted: 4 September 2014 / Published: 11 September 2014
(This article belongs to the Special Issue Laser Micro- and Nano- Processing)
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Abstract

Flexures are components of micro-mechanisms efficiently replacing classical multi-part joints found at the macroscale. So far, flexures have been limited to two-dimensional planar designs due to the lack of a suitable three-dimensional micromanufacturing process. Here we demonstrate and characterize a high-strength transparent monolithic three-dimensional flexural component fabricated out of fused silica using non-ablative femtosecond laser processing combined with chemical etching. As an illustration of the potential use of this flexure, we propose a design of a Hoecken linkage entirely made with three-dimensional cross-spring pivot hinges. View Full-Text
Keywords: flexure; femtosecond laser; three-dimensional micromachining; cross-spring pivot; optomechanics; Hoecken (Hoekens) linkage flexure; femtosecond laser; three-dimensional micromachining; cross-spring pivot; optomechanics; Hoecken (Hoekens) linkage
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This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).
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Tielen, V.; Bellouard, Y. Three-Dimensional Glass Monolithic Micro-Flexure Fabricated by Femtosecond Laser Exposure and Chemical Etching. Micromachines 2014, 5, 697-710.

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