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Micromachines 2014, 5(3), 432-441; doi:10.3390/mi5030432

Fabrication and Characterization of Flexible Electrowetting on Dielectrics (EWOD) Microlens

Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, WI 53707, USA
* Author to whom correspondence should be addressed.
Received: 19 May 2014 / Revised: 16 June 2014 / Accepted: 16 June 2014 / Published: 4 July 2014
(This article belongs to the Special Issue Microlenses)
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We present a flexible variable-focus converging microlens actuated by electrowetting on dielectric (EWOD). The microlens is made of two immiscible liquids and a soft polymer, polydimethylsiloxane (PDMS). Parylene intermediate layer is used to produce robust flexible electrode on PDMS. A low-temperature PDMS-compatible fabrication process has been developed to reduce the stress on the lens structure. The lens has been demonstrated to be able to conform to curved surfaces smoothly. The focal length of the microlens is 29–38 mm on a flat surface, and 31–41 mm on a curved surface, varying with the voltage applied. The resolving power of the microlens is 25.39 line pairs per mm by a 1951 United States Air Force (USAF) resolution chart and the lens aberrations are measured by a Shack-Hartmann wavefront sensor. The focal length behavior on a curved surface is discussed and for the current lens demonstrated the focal length is slightly longer on the curved surface as a result of the effect of the curved PDMS substrate.
Keywords: microlenses; microlens arrays; compound eye; tunable lenses; hydrogels microlenses; microlens arrays; compound eye; tunable lenses; hydrogels
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Li, C.; Jiang, H. Fabrication and Characterization of Flexible Electrowetting on Dielectrics (EWOD) Microlens. Micromachines 2014, 5, 432-441.

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