Micromachines doi: 10.3390/mi15030411
Authors: Zhen Cao Qi Sun Chuanfeng Ma Biao Hou Licheng Jiao
This paper presents a machine learning-based figure of merit model for superjunction (SJ) U-MOSFET (SSJ-UMOS) with a modulated drift region utilizing semi-insulating poly-crystalline silicon (SIPOS) pillars. This SJ drift region modulation is achieved through SIPOS pillars beneath the trench gate, focusing on optimizing the tradeoff between breakdown voltage (BV) and specific ON-resistance (RON,sp). This analytical model considers the effects of electric field modulation, charge-coupling, and majority carrier accumulation due to additional SIPOS pillars. Gaussian process regression is employed for the figure of merit (FOM = BV2/RON,sp) prediction and hyperparameter optimization, ensuring a reasonable and accurate model. A methodology is devised to determine the optimal BV-RON,sp tradeoff, surpassing the SJ silicon limit. The paper also delves into a discussion of optimal structural parameters for drift region, oxide thickness, and electric field modulation coefficients within the analytical model. The validity of the proposed model is robustly confirmed through comprehensive verification against TCAD simulation results.
]]>Micromachines doi: 10.3390/mi15030410
Authors: Kyohei Yamashita Tomoka Yamaguchi Shigehiro Ikeno Asuka Koyama Tetsuo Aono Ayaka Mori Shoto Serizawa Yuji Ishikawa Eiji Tokunaga
Previous studies of motility at low temperatures in Chlamydomonas reinhardtii have been conducted at temperatures of up to 15 °C. In this study, we report that C. reinhardtii exhibits unique motility at a lower temperature range (−8.7 to 1.7 °C). Cell motility was recorded using four low-cost, easy-to-operate observation systems. Fast Fourier transform (FFT) analysis at room temperature (20–27 °C) showed that the main peak frequency of oscillations ranged from 44 to 61 Hz, which is consistent with the 60 Hz beat frequency of flagella. At lower temperatures, swimming velocity decreased with decreasing temperature. The results of the FFT analysis showed that the major peak shifted to the 5–18 Hz range, suggesting that the flagellar beat frequency was decreasing. The FFT spectra had distinct major peaks in both temperature ranges, indicating that the oscillations were regular. This was not affected by the wavelength of the observation light source (white, red, green or blue LED) or the environmental spatial scale of the cells. In contrast, cells in a highly viscous (3.5 mPa·s) culture at room temperature showed numerous peaks in the 0–200 Hz frequency band, indicating that the oscillations were irregular. These findings contribute to a better understanding of motility under lower-temperature conditions in C. reinhardtii.
]]>Micromachines doi: 10.3390/mi15030409
Authors: Chang He Jie Ding Xuge Fan
The mechanical characteristics of graphene ribbons with an attached proof mass that can be used as NEMS transducers have been minimally studied, which hinders the development of graphene-based NEMS devices. Here, we simulated the mechanical characteristics of graphene ribbons with an attached proof mass using the finite element method. We studied the impact of force, residual stress, and geometrical size on displacement, strain, resonant frequency, and fracture strength of graphene ribbons with an attached proof mass. The results show that the increase of width and thickness of graphene ribbons would result in a decrease of the displacement and strain but also an increase of resonant frequency. The increase of the length of graphene ribbons has an insignificant impact on the strain, but it could increase the displacement and decrease the resonant frequency. The increase of residual stress in the graphene ribbons decreases its strain and displacement. The estimated fracture strength of graphene shows limited dependence on its thickness, with an estimated value of around 148 GPa. These findings contribute to the understanding of the mechanical characteristics of graphene ribbons with an attached proof mass and lay the solid foundation for the design and manufacture of high-performance graphene-based NEMS devices such as accelerometers.
]]>Micromachines doi: 10.3390/mi15030408
Authors: Zhouyi Xiang Min Chen Yonghui Deng Songhua Huang Sanli Liu Ji Li
In response to the increasing demand for high-performance capacitors, with a simultaneous emphasis on minimizing their physical size, a common practice involves etching deep vias and coating them with functional layers to enhance operational efficiency. However, these deep vias often cause warpages during the processing stage. This study focuses on the numerical modeling of wafer warpage that occurs during the deposition of three thin layers onto these vias. A multi-step mechanical and thermal homogenization approach is proposed to estimate the warpage of the silicon wafer. The efficiency and accuracy of this numerical homogenization strategy are validated by comparing detailed and homogenized models. The multi-step homogenization method yields more accurate results compared to the conventional direct homogenization method. Theoretical analysis is also conducted to predict the shape of the wafer warpage, and this study further explores the impact of via depth and substrate thickness.
]]>Micromachines doi: 10.3390/mi15030407
Authors: Xinran Ji Yu Chen Jing Li Dian Wang Yue Zhao Qiannan Wu Mengwei Li
A terahertz band (0.1–10 THz) has the characteristics of rich spectrum resources, high transmission speed, strong penetration, and clear directionality. However, the terahertz signal will suffer serious attenuation and absorption during transmission. Therefore, a terahertz antenna with high gain, high efficiency, and wide bandwidth is an indispensable key component of terahertz wireless systems and has become a research hotspot in the field of antennas. In this paper, a high-gain broadband antenna is presented for terahertz applications. The antenna is a three-layer structure, fed by a grounded coplanar waveguide (GCPW), using polytetrafluoroethylene (PTFE) material as the dielectric substrate, and the metal through-hole of the dielectric substrate forms a substrate-integrated waveguide (SIW) structure. The metal fence structure is introduced to reduce the coupling effect between the radiation patches and increase the radiation bandwidth and gain. The center frequency is 0.6366 THz, the operating bandwidth is 0.61–0.68 THz, the minimum value of the voltage standing wave ratio (VSWR) is 1.00158, and the peak gain is 13.14 dBi. In addition, the performance of the designed antenna with a different isolation structure, the length of the connection line, the height of the substrate, the radius of the through-hole, and the thickness of the patch is also studied.
]]>Micromachines doi: 10.3390/mi15030406
Authors: Qian Cai Jiachi Ye Belal Jahannia Hao Wang Chandraman Patil Rasul Al Foysal Redoy Abdulrahman Sidam Sinan Sameer Sultan Aljohani Muhammed Umer Aseel Alsulami Essa Shibli Bassim Arkook Yas Al-Hadeethi Hamed Dalir Elham Heidari
Graphene, renowned for its exceptional electrical, optical, and mechanical properties, takes center stage in the realm of next-generation electronics. In this paper, we provide a thorough investigation into the comprehensive fabrication process of graphene field-effect transistors. Recognizing the pivotal role graphene quality plays in determining device performance, we explore many techniques and metrological methods to assess and ensure the superior quality of graphene layers. In addition, we delve into the intricate nuances of doping graphene and examine its effects on electronic properties. We uncover the transformative impact these dopants have on the charge carrier concentration, bandgap, and overall device performance. By amalgamating these critical facets of graphene field-effect transistors fabrication and analysis, this study offers a holistic understanding for researchers and engineers aiming to optimize the performance of graphene-based electronic devices.
]]>Micromachines doi: 10.3390/mi15030405
Authors: Heyu Yin Sylmarie Dávila-Montero Andrew J. Mason
To non-invasively monitor personal biological and environmental samples in Internet of Things (IoT)-based wearable microfluidic sensing applications, the particle size could be key to sensing, which emphasizes the need for particle size fractionation. Deterministic lateral displacement (DLD) is a microfluidic structure that has shown great potential for the size fractionation of micro- and nano-sized particles. This paper introduces a new externally balanced multi-section cascade DLD approach with a section-scaling technique aimed at expanding the dynamic range of particle size separation. To analyze the design tradeoffs of this new approach, a robust model that also accounts for practical fabrication limits is presented, enabling designers to visualize compromises between the overall device size and the achievement of various performance goals. Furthermore, results show that a wide variety of size fractionation ranges and size separation resolutions can be achieved by cascading multiple sections of an increasingly smaller gap size and critical separation dimension. Model results based on DLD theoretical equations are first presented, followed by model results that apply the scaling restrictions associated with the second order of effects, including practical fabrication limits, the gap/pillar size ratio, and pillar shape.
]]>Micromachines doi: 10.3390/mi15030404
Authors: Zhen Hu Man Cui Tao Shi
As a core component of power conversion systems, insulated gate bipolar transistor (IGBT) modules continually suffer from severe thermal damage caused by temperature swings and shear stress, resulting in fatigue failure. Bond wires falling off is one of the failure modes of IGBT modules. Given that the number of fallen-off bond wires is a significant parameter to evaluate the health status of the IGBT modules, this paper proposes an online identification model to recognize the number of fallen-off bond wires during normal operation. Firstly, a database containing datum Vce,on−Tj−IC (collector–emitter on-state voltage Vce,on, chip junction temperature Tj, collector current IC) planes with different fallen-off bond wires is built based on an offline aging test. Secondly, a Foster network model and a special circuit are designed to measure the junction temperature Tj and the collector–emitter on-state voltage Vce,on, respectively. Thirdly, the feature points of the IGBT module represented by Vce,on, Tj, and IC are given to the database to recognize the number of fallen-off bond wires according to the position of the feature points in the datum plane. The experimental results show that the proposed method can determine the fallen-off bond wires under the operation condition.
]]>Micromachines doi: 10.3390/mi15030403
Authors: Aiqin Zhang Xuehao Chen Jiahui Wang Yong He Jianying Zhou
Autostereoscopy is usually perceived at finite viewpoints that result from the separated pixel array of a display system. With directionally illuminated autostereoscopy, the separation of the illumination channel from the image channel provides extra flexibility in optimizing the performance of autostereoscopy. This work demonstrates that by taking advantage of illumination freedom, seamless viewpoints in the sweet viewing region, where the ghosting does not cause significant discomfort, are realized. This realization is based on illuminating the screen with a polyline array of light emitting diodes (LEDs), and continuous viewpoints are generated through independent variation in the radiance of each individual LED column. This new method is implemented in the directionally illuminated display for both single and multiple viewers, proving its effectiveness as a valuable technique for achieving a high-quality and high-resolution autostereoscopic display with seamless viewpoints.
]]>Micromachines doi: 10.3390/mi15030402
Authors: Jing Wang Lei Wang Peng Jin Zhen Zhang Pengxuan Li Ritao Xiao
For vibration isolation systems, vibration suppression and platform positioning are both important. Since absolute velocity feedback causes difficulty in achieving positioning while suppressing vibration, an H∞ control strategy based on sensor fusion feedback is proposed in this paper. The signals of inertial and displacement sensors are fused through a pair of complementary filters. Thus, active control based on the fusion signal could concurrently achieve vibration and position control since it is a displacement signal. In addition, the obtained fusion signals have a lower noise level. In this way, simultaneous positioning and vibration suppression can be established using the sensor fusion strategy. On this basis, in order to obtain an optimal H∞ controller, system damping can be maximized by using the performance weight function to attenuate noise; the system bandwidth is determined by the uncertainty weight function, which can avoid the effect of high-frequency modes of the system. The effectiveness of the proposed strategy is verified by comparing it with the conventional absolute velocity feedback strategy on a 3-DOF isolator.
]]>Micromachines doi: 10.3390/mi15030401
Authors: Zhikui Duan Huosheng Li Shaobo He Yongxi Long Xinmei Yu Qingqing Ke
In this paper, we present a fully integrated circuit without inductance implementing Chua’s chaotic system. The circuit described in this study utilizes the SMIC 180 nm CMOS process and incorporates a multi-path voltage-controlled oscillator (VCO). The integral-differential nonlinear resistance is utilized as a variable impedance component in the circuit, constructed using discrete devices from a microelectronics standpoint. Meanwhile, the utilization of a multi-path voltage-controlled oscillator ensures the provision of an adequate oscillation frequency and a stable waveform for the chaotic circuit. The analysis focuses on the intricate and dynamic behaviors exhibited by the chaotic microelectronic circuit. The experimental findings indicate that the oscillation frequency of the VCO can be adjusted within a range of 198 MHz to 320 MHz by manipulating the applied voltage from 0 V to 1.8 V. The circuit operates within a 1.8 V environment, and exhibits power consumption, gain–bandwidth product (GBW), area, and Lyapunov exponent values of 1.0782 mW, 4.43 GHz, 0.0165 mm2, and 0.6435∼1.0012, respectively. The aforementioned circuit design demonstrates the ability to generate chaotic behavior while also possessing the benefits of low power consumption, high frequency, and a compact size.
]]>Micromachines doi: 10.3390/mi15030400
Authors: Shimin Ge Juncheng Xiao Shan Li Dong Yuan Yuhua Dong Shengdong Zhang
This study reveals the pronounced density of oxygen vacancies (Vo) at the back channel of back-channel-etched (BCE) a-InGaZnO (a-IGZO) thin-film transistors (TFTs) results from the sputtered deposition rather than the wet etching process of the source/drain metal, and they are distributed within approximately 25 nm of the back surface. Furthermore, the existence and distribution depth of the high density of Vo defects are verified by means of XPS spectra analyses. Then, the mechanism through which the above Vo defects lead to the instability of BCE a-IGZO TFTs is elucidated. Lastly, it is demonstrated that the device instability under high-humidity conditions and negative bias temperature illumination stress can be effectively alleviated by etching and thus removing the surface layer of the back channel, which contains the high density of Vo defects. In addition, this etch method does not cause a significant deterioration in the uniformity of electrical characteristics and is quite convenient to implement in practical fabrication processes. Thus, a novel and effective solution to the device instability of BCE a-IGZO TFTs is provided.
]]>Micromachines doi: 10.3390/mi15030399
Authors: Jianing Zhao Yongzhen Dong Hao Li Tianming Li Wei Liu Yihong Zhou Haiyang Wang Biao Hu Fang Li Keqiang Wang Bin Qiu
The power capacity of reflectarray antennas (RAs) is investigated through full-wave simulations and high-power microwave (HPM) experiments in this paper. In order to illustrate the results in detail, two RA elements are designed. The simulated power handling capacity of two RA elements are 7.17 MW/m2 and 2.3 GW/m2, respectively. To further study the HPM RA, two RA prototypes operating at 2.8 GHz are constructed with the aperture size of 1 m × 1 m. Simulations and experimental measurements are conducted for the two prototypes. The experimental results demonstrate that, even when subjected to 1 GW of power, the radiation beam of the RA with the second elements can still propagate in the intended direction. This research will establish a basis for advancing the practicality of RAs in HPM applications.
]]>Micromachines doi: 10.3390/mi15030398
Authors: Emmanuel Bender Joseph B. Bernstein Duane S. Boning
In this review, recent trends in microelectronics packaging reliability are summarized. We review the technology from early packaging concepts, including wire bond and BGA, to advanced techniques used in HI schemes such as 3D stacking, interposers, fan-out packaging, and more recently developed silicon interconnect fabric integration. This review includes approaches for both design modification studies and packaged device validation. Methods are explored for compatibility in new complex packaging assemblies. Suggestions are proposed for optimizations of the testing practices to account for the challenges anticipated in upcoming HI packaging schemes.
]]>Micromachines doi: 10.3390/mi15030397
Authors: Irma Rocio Vazquez Zeynel Guler Nathan Jackson
Piezoelectric thin films are extensively used as sensing or actuating layers in various micro-electromechanical systems (MEMS) applications. However, most piezoelectrics are stiff ceramics, and current polymer piezoelectrics are not compatible with microfabrication due to their low Curie Temperature. Recent polymer-composite piezoelectrics have gained interest but can be difficult to pattern. Photodefinable piezoelectric films could resolve these challenges by reducing the manufacturability steps by eliminating the etching process. But they typically have poor resolution and thickness properties. This study explores methods of enhancing the manufacturability of piezoelectric composite films by optimizing the process parameters and synthesis of SU-8 piezo-composite materials. Piezoelectric ceramic powders (barium titanate (BTO) and lead zirconate titanate (PZT)) were integrated into SU-8, a negative epoxy-based photoresist, to produce high-resolution composites in a non-cleanroom environment. I-line (365 nm) light was used to enhance resolution compared to broadband lithography. Two variations of SU-8 were prepared by thinning down SU-8 3050 and SU-8 3005. Different weight percentages of the piezoelectric powders were investigated: 5, 10, 15 and 20 wt.% along with varied photolithography processing parameters. The composites’ transmittance properties were characterized using UV-Vis spectroscopy and the films’ crystallinity was determined using X-ray diffraction (XRD). The 0–3 SU-8/piezo composites demonstrated resolutions < 2 μm while maintaining bulk piezoelectric coefficients d33 > 5 pm V−1. The films were developed with thicknesses >10 μm. Stacked layers were achieved and demonstrated significantly higher d33 properties.
]]>Micromachines doi: 10.3390/mi15030396
Authors: Hao Li Shenghuan Zhang Qiaoyu Chen Zhaoyang Du Xingyu Chen Xiaodan Chen Shiyi Zhou Shuwen Mei Linda Ke Qinglei Sun Zuowei Yin Jie Yin Zheng Li
The plasma rotating electrode process (PREP) is an ideal method for the preparation of metal powders such as nickel-based, titanium-based, and iron-based alloys due to its low material loss and good degree of sphericity. However, the preparation of silver alloy powder by PREP remains challenging. The low hardness of the mould casting silver alloy leads to the bending of the electrode rod when subjected to high-speed rotation during PREP. The mould casting silver electrode rod can only be used in low-speed rotation, which has a negative effect on particle refinement. This study employed continuous casting (CC) to improve the surface hardness of S800 Ag (30.30% higher than mould casting), which enables a high rotation speed of up to 37,000 revolutions per minute, and silver alloy powder with an average sphericity of 0.98 (5.56% higher than gas atomisation) and a sphericity ratio of 97.67% (36.28% higher than gas atomisation) has been successfully prepared. The dense S800 Ag was successfully fabricated by laser powder bed fusion (LPBF), which proved the feasibility of preparing high-quality powder by the “CC + PREP” method. The samples fabricated by LPBF have a Vickers hardness of up to 271.20 HV (3.66 times that of mould casting), leading to a notable enhancement in the strength of S800 Ag. In comparison to GA, the S800 Ag powder prepared by “CC + PREP” exhibits greater sphericity, a higher sphericity ratio and less satellite powder, which lays the foundation for dense LPBF S800 Ag fabrication.
]]>Micromachines doi: 10.3390/mi15030395
Authors: Nenad Mitrović Zorana Golubović Aleksandra Mitrović Milan Travica Isaak Trajković Miloš Milošević Aleksandar Petrović
The three-point bending test is a valuable method for evaluating the mechanical properties of 3D-printed biomaterials, which can be used in various applications. The use of 3D printing in specimen preparation enables precise control over material composition and microstructure, facilitating the investigation of different printing parameters and advanced materials. The traditional approach to analyzing the mechanical properties of a material using a three-point bending test has the disadvantage that it provides only global information about the material’s behavior. This means that it does not provide detailed insight into the local strain distribution within the material. However, the 2D Digital Image Correlation (DIC) method offers additional insight, especially in terms of strain localization. DIC is an optical technique that measures full-field displacements and strains on the surface of a sample. PLA and enhanced PLA-X material were utilized to create three-point bending samples. The aim of this paper was to analyze and compare the influence of aging on the mechanical properties of PLA and enhanced PLA-X materials using three-point bending coupled with the DIC method. The results showed statistically significant differences between the PLA and PLA-X, for both the new and aged materials. The aged PLA samples had the highest average value of maximal force around 68 N, which was an increase of 8.8% compared to the new PLA samples. On the other hand, the aged PLA-X material had an increase of 7.7% in the average maximal force compared to the new PLA-X samples. When comparing the two materials, the PLA samples had higher maximal force values, 6.2% for the new samples, and 7.3% for the aged samples. The DIC results showed that both the new PLA and PLA-X samples endured higher strain values at Points 1 and 2 than the aged ones, except for the aged PLA-X sample at Point 2, where the new sample had higher strain values. However, for the first 5 min of the experiment, both materials exhibited identical behavior, after which point significant differences started to occur for both materials, as well as at Points 1 and 2. A more profound comprehension of the biomechanical characteristics of both PLA and PLA-X material is essential to enhance the knowledge for potential biomedical applications. The DIC method was found to be a powerful tool for analyzing the deformation and failure behavior of samples and for complementing the traditional approach to material testing.
]]>Micromachines doi: 10.3390/mi15030394
Authors: Xufeng Wen Yanfeng Gao Hua Zhang Yaxin Yang
Machining special microstructures on the surface of silicon nitride ceramics helps improve their service performance. However, the high brittleness and low fracture toughness of silicon nitride ceramics make it extremely difficult to machine microstructures on their surface. In this study, a femtosecond laser is used to machine parallel grooved microstructures on the surface of silicon nitride ceramics. The effects of the laser polarization angle, laser single pulse energy, scanning line spacing, and laser scan numbers on the surface morphology and geometric characteristics of grooved microstructures are researched. It is found that a greater angle between the direction of the scanning path and laser polarization is helpful to obtain a smoother surface. As the single pulse energy increases, debris and irregular surface structures will emerge. Increasing the laser scan line spacing leads to clearer and more defined parallel grooved microstructures. The groove depth increases with the increase in the scan numbers. However, when a certain number of scans is reached, the depth will not increase further. This study serves as a valuable research foundation for the femtosecond laser processing of silicon nitride ceramic materials.
]]>Micromachines doi: 10.3390/mi15030393
Authors: Ke Wang Hongding Wang Yanlong Zhang Huirong Shi Jiahao Shi
Deterministic polishing based on jet electrochemical machining (Jet-ECM) is a stress-free machining method for low-rigidity and ultra-precision workpieces. The nozzle is equivalent to a special tool in deterministic polishing, and the workpiece material is removed using the mechanism of electrochemical dissolution at the position where the nozzle passes. By precisely regulating the nozzle’s movement speed and dwell time, the quantity of material removed from the workpiece at a designated position can be finely adjusted. With this mechanism, the improvement of the workpiece shape accuracy can be achieved by planning the nozzle trajectory and nozzle movement speed. However, due to the positioning errors of the polishing device, the actual position of the nozzle may deviate from the theoretical position, resulting in errors in material removal amount, which affects the accuracy and stability of the polishing process. This study established a mathematical model to analyze the influence of nozzle positioning errors in deterministic polishing based on Jet-ECM. This model has been used to design a specific deterministic polishing device based on Jet-ECM. With the proposed deterministic polishing device, the surface shape of the workpiece is converged. The surface peak-to-valley (PV) value of the φ 50 mm workpiece (valid dimensions = 90% of the central region) indicated that the shape error of the surface was reduced from 2.67 μm to 1.24 μm in 34 min. The power spectral density (PSD) method was used to evaluate the height distribution and height characteristics of the workpiece surface. The results show that the low frequency spatial error is reduced significantly after processing. This study improves the accuracy of the stress-free deterministic polishing methods and further expands the use of deterministic polishing in industry.
]]>Micromachines doi: 10.3390/mi15030392
Authors: Amer Kotb Kyriakos E. Zoiros Wei Chen
Silicon waveguides are essential to integrated photonics, which is where optical and electronic components are coupled together on a single silicon chip. These waveguides allow for the integration of signal processing and optical transmission, which advances data centers, telecommunications, and other optical applications. Thus, our study involves the simulation of essential all-optical logic operations, namely XOR, AND, OR, NOT, NOR, NAND, and XNOR, and utilizes M-shaped silicon optical waveguides at a wavelength of 1.55 μm. This simulation is conducted through Lumerical FDTD solutions. The suggested waveguide comprises four identical slots, configured in the shape of the letter ‘M’, and all of which are formed of core silicon and silica cladding. These logic operations work based on constructive and destructive interferences that are caused by phase changes in the input optical beams. The contrast ratio (CR) is employed to quantitatively and comparatively assess the degree to which the target logic operations are efficiently executed. The simulation results indicate that, compared to other reported designs, the considered logic functions constructed using the proposed waveguide can be implemented with higher CRs. The outcomes of this paper can be utilized regarding the implementation of optoelectronic combinational logic circuits of enhanced functionality.
]]>Micromachines doi: 10.3390/mi15030390
Authors: Xuetiao Ma Yiran Shen
For some so-called computationally difficult problems, using the method of Boolean logic is fundamentally inefficient. For example, the vertex coloring problem looks very simple, but the number of possible solutions increases sharply with the increase of graph vertices. This is the difficulty of the problem. This complexity has been widely studied because of its wide applications in the fields of data science, life science, social science, and engineering technology. Consequently, it has inspired the use of alternative and more effective non-Boolean methods for obtaining solutions to similar problems. In this paper, we explore the research on a new generation of computers that use local active memristors coupling. First, we study the dynamics of the memristor coupling network. Then, the simplified system phase model is obtained. This research not only clarifies a physics-based calculation method but also provides a foundation for the construction of customized analog computers to effectively solve NP-hard problems.
]]>Micromachines doi: 10.3390/mi15030389
Authors: Michael Krause Analise Marshall Jeffrey K. Catterlin Terak Hornik Emil P. Kartalov
Negative features in microdevices find a wide range of applications. The process of 3D printing has revolutionized their fabrication due to the combination of good resolution and integration capability. Herein, we report on a systematic study of the effects of materials and print directions on the 3D printing of microfluidic channels as negative features under PolyJet technology. Specifically, the Statasys Objet500 printer was used for this study. We printed two sets of chips (n=10 each), each of which contains channel pairs of a high-contrast reference material and a sacrificial material, respectively. Both materials were embedded in a clear photopolymer resin. The channel pairs ranged in planned width from 64 to 992 μm. To explore the effect on print orientation, channels were printed either parallel or perpendicular with respect to the jetting head’s movement. The width of each channel of a pair was compared for each planned width and each combination of materials. The effect of print orientation on channel morphology was also investigated. We found that reproducibility and accuracy were highest at a planned channel width of approximately ≥600 μm and that channel morphology was most suitable when the jetting head of the printer moved parallel to the channel’s longitudinal axis. The results should be of interest to any users who wish to create negative features using PolyJet 3D technology.
]]>Micromachines doi: 10.3390/mi15030391
Authors: Subodh Barthwal Surbhi Uniyal Sumit Barthwal
Superhydrophobic surfaces, characterized by exceptional water repellency and self-cleaning properties, have gained significant attention for their diverse applications across industries. This review paper comprehensively explores the theoretical foundations, various fabrication methods, applications, and associated challenges of superhydrophobic surfaces. The theoretical section investigates the underlying principles, focusing on models such as Young’s equation, Wenzel and Cassie–Baxter states, and the dynamics of wetting. Various fabrication methods are explored, ranging from microstructuring and nanostructuring techniques to advanced material coatings, shedding light on the evolution of surface engineering. The extensive applications of superhydrophobic surfaces, spanning from self-cleaning technologies to oil–water separation, are systematically discussed, emphasizing their potential contributions to diverse fields such as healthcare, energy, and environmental protection. Despite their promising attributes, superhydrophobic surfaces also face significant challenges, including durability and scalability issues, environmental concerns, and limitations in achieving multifunctionality, which are discussed in this paper. By providing a comprehensive overview of the current state of superhydrophobic research, this review aims to guide future investigations and inspire innovations in the development and utilization of these fascinating surfaces.
]]>Micromachines doi: 10.3390/mi15030388
Authors: Renyi Li Chen Ge Chenwei Liang Shichang Zhong
This paper introduces the structure and characteristics of an internal-matching high-power Doherty power amplifier based on GaN HEMT devices with 0.25 μm process platforms from the Nanjing Electronic Devices Institute. Through parameter extraction and load-pull testing of the model transistor, an EE_HEMT model for the 1.2 mm gate-width GaN HEMT device was established. This model serves as the foundation for designing a high-power three-stage Doherty power amplifier. The amplifier achieved a saturated power gain exceeding 9 dB in continuous wave mode, with a saturated power output of 49.7 dBm. The drain efficiency was greater than 65% at 2.6 GHz. At 9 dB power back-off point, corresponding to an output power of 40.5 dBm, the drain efficiency remained above 55%. The performance of the amplifier remains consistent within the 2.55–2.62 GHz frequency range. The measured power, efficiency, and gain of the designed Doherty power amplifier align closely with the simulation results based on the EE_HEMT model, validating the accuracy of the established model. Furthermore, the in-band matching design reduces the size and weight of the amplifier. The amplifier maintains normal operation even after high and low-temperature testing, demonstrating its reliability. In conjunction with DPD (digital pre-distortion) for the modulated signal test, the amplifier exhibits extremely high linearity (ACLR < −50.93 dBc). This Doherty power amplifier holds potential applications in modern wireless communication scenarios.
]]>Micromachines doi: 10.3390/mi15030387
Authors: Wenyao Zhang Ya Zhang Xiao Miao Ling Zhao Changqing Zhu
Hematite is one of the most promising photoanode materials for the study of photoelectrochemical (PEC) water splitting because of its ideal bandgap with sufficient visible light absorption and stability in alkaline electrolytes. However, owing to the intrinsically high electron-hole recombination, the PEC performance of hematite is still far below that expected. The efficient charge separation can be achieved via growth of FeOOH on hematite photoanode. In this study, hematite nanostructures were successfully grown on the surface of iron foil by the simple immersion deposition method and thermal oxidation treatment. Furthermore, cocatalyst FeOOH was successfully added to the hematite nanostructure surface to improve charge separation and charge transfer, and thus promote the photoelectrochemical water splitting. By utilizing the FeOOH overlayer as a cocatalyst, the photocurrent density of hematite exhibited a substantial 86% increase under 1.5 VRHE, while the onset potential showed an apparent shift towards the cathodic direction. This can be ascribed to the high reaction area for the nanostructured morphology and high electrocatalytic activity of FeOOH that enhanced the amount of photogenerated holes and accelerated the kinetics of water splitting.
]]>Micromachines doi: 10.3390/mi15030386
Authors: Cheng-Mu Tsai Sung-Jr Wu Yi-Chin Fang Pin Han
Fingerprint recognition is a widely used biometric authentication method in LED-backlight smartphones. Due to the increasing demand for full-screen smartphones, under-display fingerprint recognition has become a popular trend. In this paper, we propose a design of an optical fingerprint recognition lens for under-display smartphones. The lens is composed of three plastic aspheric lenses, with an effective focal length (EFL) of 0.61 mm, a field of view (FOV) of 126°, and a total track length (TTL) of 2.54 mm. The image quality of the lens meets the target specifications, with MTF over 80% in the center FOV and over 70% in the 0.7 FOV, distortion less than 8% at an image height of 1.0 mm, and relative illumination (RI) greater than 25% at an image height of 1.0 mm. The lens also meets the current industry standards in terms of tolerance sensitivity and Monte Carlo analysis.
]]>Micromachines doi: 10.3390/mi15030385
Authors: Yun Zhao Bo Zhu Jiangqiao Ding Sheng Li
A wideband multi-polarized square-horn antenna based on an orthogonal mode transducer (OMT) is developed for working in the whole W-band in this paper. The designed antenna is capable of radiating multiple polarization modes as horizontal polarization (HP) and vertical polarization (VP) when as single-port excitation and left-handed circular polarization (LHCP) and right-handed circular polarization (RHCP) when as dual-port excitation, owing to the characteristic of the OMT with the transmitting of orthogonally polarized waves. A CNC-layered fabrication approach is proposed, which means that the antenna prototype integrating with a Boifot-type OMT, turning waveguide, twisting waveguide and phase shifter is divided into three layers along the vertical direction to be fabricated based on computerized numerical control (CNC) technology. In the design, the turning waveguide and twisting waveguide are employed to achieve plane consistency of the antenna branch ports. Furthermore, a phase shifter is designed to compensate the orthogonally polarized waves, which can keep the phase of the orthogonally polarized waves consistent in a wideband frequency range from 75 GHz to 110 GHz. A prototype is fabricated and measured to verify the performance of the proposed multi-polarization antenna, and the measured results agree well with the simulation ones. In the whole W-band, the value of return loss is better than 10 dB of all polarization modes, and the value of AR of the LHCP and RHCP is below 3.5 dB. The maximum gain of the antenna reaches up to 18.8 dBi at 110 GHz. In addition, regarding the layered structure, the possible layered assembly error analysis is discussed, which verifies the feasibility of the layered machining for this antenna.
]]>Micromachines doi: 10.3390/mi15030384
Authors: Duy-Linh Vu Quang-Tan Nguyen Pil-Seung Chung Kyoung-Kwan Ahn
Recently, triboelectric nanogenerators (TENGs) have emerged as having an important role in the next wave of technology due to their large potential applications in energy harvesting and smart sensing. Recognizing this, a device based on TENGs, which can solve some of the problems in the liquid flow measurement process, was considered. In this paper, a new method to measure the liquid flow rate through a pipe which is based on the triboelectric effect is reported. A single-electrode flowing liquid-based TENG (FL-TENG) was developed, comprising a silicon pipe and an electrode coated with a polyvinylidene fluoride (PVDF) membrane. The measured electrical responses show that the FL-TENG can generate a peak open-circuit voltage and peak short-circuit current of 2.6 V and 0.3 µA when DI water is passed through an 8 mm cell FL-TENG at a flow rate of 130 mL/min and reach their maximum values of 17.8 V–1.57 µA at a flow rate of 1170 mL/min, respectively. Importantly, the FL-TENG demonstrates a robust linear correlation between its electrical output and the flow rate, with the correlation coefficient R2 ranging from 0.943 to 0.996. Additionally, this study explores the potential of the FL-TENG to serve as a self-powered sensor power supply in future applications, emphasizing its adaptability as both a flow rate sensor and an energy harvesting device.
]]>Micromachines doi: 10.3390/mi15030383
Authors: Yue Cao Miaojuan Zhang Chong Fan Jian-Xin Chen
In this manuscript, a broadband transmitarray antenna (TA) using a metasurface-based element is presented for millimeter-wave communication applications. The metasurface-based TA element adopts a receiver–transmitter configuration: metasurfaces are applied as the receiver and transmitter, and slot-coupled differentially fed striplines are used as the phase compensation. The designed TA element achieves good transmission performance with a more than 360° transmission phase shift range and less than 1-dB transmission insertion loss within a wide frequency range. To verify the proposed TA, a prototype is fabricated based on the conventional printed circuit board (PCB) process, and a pyramid horn is designed as the source. The measured results show that the proposed TA with the differential feed network presents a 1-dB gain bandwidth of 26.2% from 23.5 to 30.5 GHz and a peak gain of 24.5 dBi. The designed TA is a promising alternative for millimeter-wave communications applications because of its high gain, broad bandwidth, low costs, and convenient integration with other circuits.
]]>Micromachines doi: 10.3390/mi15030382
Authors: Carlotta Kortmann Taieb Habib Christopher Heuer Dörte Solle Janina Bahnemann
Continuous chromatography has emerged as one of the most attractive methods for protein purification. Establishing such systems involves installing several chromatographic units in series to enable continuous separation processes and reduce the cost of the production of expensive proteins and biopharmaceuticals (such as monoclonal antibodies). However, most of the established systems are bulky and plagued by high dead volume, which requires further optimization for improved separation procedures. In this article, we present a miniaturized periodic counter-current chromatography (PCCC) system, which is characterized by substantially reduced dead volume when compared to traditional chromatography setups. The PCCC device was fabricated by 3D printing, allowing for flexible design adjustments and rapid prototyping, and has great potential to be used for the screening of optimized chromatography conditions and protocols. The functionality of the 3D-printed device was demonstrated with respect to the capture and polishing steps during a monoclonal antibody purification process. Furthermore, this novel miniaturized system was successfully used for two different chromatography techniques (affinity and ion-exchange chromatography) and two different types of chromatographic units (columns and membrane adsorbers). This demonstrated versability underscores the flexibility of this kind of system and its potential for utilization in various chromatography applications, such as direct product capture from perfusion cell cultures.
]]>Micromachines doi: 10.3390/mi15030381
Authors: Hui Deng Guojiao Lv Huan Deng Zesheng Liu
Conventional integral imaging (InIm) three-dimensional (3D) display has the defect of a small viewing angle and usually presents a single 3D image. In this paper, we propose a viewing-angle-enhanced and dual-view compatible InIm 3D display system. The crosstalk pixel areas within the conventional elemental images (EIs) that result in image crosstalk were effectively utilized either for viewing angle enhancement or for dual-view 3D display. In the viewing-angle-enhanced 3D display mode, a composite elemental image (CEI) that consisted of a normal EI and two view-enhanced EIs was imaged by a dual pinhole array and formed an extended 3D viewing area. A precisely designed mask array was introduced to block the overlapped rays between adjacent viewing areas to eliminate image crosstalk. While in the dual-view 3D display mode, a CEI was composed of image information of two different 3D scenes. With the help of the dual pinhole array and mask array, two different 3D images were reconstructed for the left and right perspectives. Experiments demonstrated that both the left and right sides were increased by 6 degrees from the conventional 3D viewing angle, and also, a dual-view 3D display effect that retains the same viewing angle as the conventional system was achieved. The proposed system has a compact structure and can be freely switched between two display modes.
]]>Micromachines doi: 10.3390/mi15030380
Authors: Sheng Qu Libin Gao Jiamei Wang Hongwei Chen Jihua Zhang
The global demand for radio frequency (RF) modules and components has grown exponentially in recent decades. RF switches are the essential unit in RF front-end and reconfigurable systems leading to the rapid development of novel and advanced switch technology. Germanium telluride (GeTe), as one of the Chalcogenide phase-change materials, has been applied as an RF switch due to its low insertion loss, high isolation, fast switching speed, and low power consumption in recent years. In this review, an in-depth exploration of GeTe film characterization is presented, followed by a comparison of the device structure of directly heated and indirectly heated RF phase-change switches (RFPCSs). Focusing on the prototypical structure of indirectly heated RFPCSs as the reference, the intrinsic properties of each material layer and the rationale behind the material selection is analyzed. Furthermore, the design size of each material layer of the device and its subsequent RF performance are summarized. Finally, we cast our gaze toward the promising future prospects of RFPCS technology.
]]>Micromachines doi: 10.3390/mi15030379
Authors: Morgane Zimmer Stéphane Trombotto Emmanuelle Laurenceau Anne-Laure Deman
Given the growing importance of lab-on-a-chip in a number of fields, such as medical diagnosis or environmental analysis, the fact that the current fabrication process relies mainly on oil-based polymers raises an ecological concern. As an eco-responsible alternative, we presented, in this article, a manufacturing process for microfluidic devices from chitosan, a bio-sourced, biodegradable, and biocompatible polysaccharide. From chitosan powder, we produced thick and rigid films. To prevent their dissolution and reduce their swelling when in contact with aqueous solutions, we investigated a film neutralization step and characterized the mechanical and physical properties of the resulting films. On these neutralized chitosan films, we compared two micropatterning methods, i.e., hot embossing and mechanical micro-drilling, based on the resolution of microchannels from 100 µm to 1000 µm wide. Then, chitosan films with micro-drilled channels were bonded using a biocompatible dry photoresist on a glass slide or another neutralized chitosan film. Thanks to this protocol, the first functional chitosan microfluidic devices were prepared. While some steps of the fabrication process remain to be improved, these preliminary results pave the way toward a sustainable fabrication of lab-on-a-chip.
]]>Micromachines doi: 10.3390/mi15030378
Authors: Rajamanickam Sivakumar Jae Yoon Byun Nae Yoon Lee
β-cyclodextrin (β-CD) is a water-soluble, non-toxic, biocompatible, and cage compound that contains six, seven, or eight α-(1–4)-attached D-glucopyranose residues. The hydroxyl group in the β-CD is responsible for the reduction of metal ions as well as stabilizing the nanoparticles. In this study, we developed a colorimetric assay for identifying contagious pathogens such as SARS-CoV-2 and Enterococcus faecium (E. faecium) via in situ development of β-CD-stabilized silver nanoparticles (AgNPs). In the process, the LAMP amplicons produced a complex with silver nitrate (LAMP amplicon–Ag+) which was reduced when heated at 65 °C for 5 min in the presence of β-CD and developed a brown color. The limit of detection was determined to be approximately 101 CFU mL−1 and 10 fg µL−1 for E. faecium and SARS-CoV-2, respectively. Significantly, the colorimetric examination of contagious diseases was completed in less than 50 min, including the LAMP assay and detection process. Owing to the high sensitivity and rapid readout mechanism of the β-CD-stabilized AgNP-based colorimetric assay, it is anticipated that the introduced method can be efficiently utilized as a versatile point-of-care testing (POCT) platform for molecular diagnostics in resource-limited areas.
]]>Micromachines doi: 10.3390/mi15030377
Authors: Guido Di Patrizio Stanchieri Andrea De Marcellis Marco Faccio Elia Palange Michele Gabrio Antonelli Pierluigi Beomonte Zobel
This paper reports on the design, implementation, and characterization of a current-mode analog-front-end circuit for capacitance-to-voltage conversion that can be used in connection with a large variety of sensors and actuators in industrial and rehabilitation medicine applications. The circuit is composed by: (i) an oscillator generating a square wave signal whose frequency and pulse width is a function of the value of input capacitance; (ii) a passive low-pass filter that extracts the DC average component of the square wave signal; (iii) a DC-DC amplifier with variable gain ranging from 1 to 1000. The circuit has been designed in the current-mode approach by employing the second-generation current conveyor circuit, and has been implemented by using commercial discrete components as the basic blocks. The circuit allows for gain and sensitivity tunability, offset compensation and regulation, and the capability to manage various ranges of variations of the input capacitance. For a circuit gain of 1000, the measured circuit sensitivity is equal to 167.34 mV/pF with a resolution in terms of capacitance of 5 fF. The implemented circuit has been employed to measure the variations of the capacitance of a McKibben pneumatic muscle associated with the variations of its length that linearly depend on the circuit output voltage. Under step-to-step conditions of movement of the pneumatic muscle, the overall system sensitivity is equal to 70 mV/mm with a standard deviation error of the muscle length variation of 0.008 mm.
]]>Micromachines doi: 10.3390/mi15030376
Authors: Wenchao Tian Xuyang Chen Guoguang Zhang Yuanming Chen Jijun Luo
With the continuous development of advanced packaging technology in heterogeneous semiconductor integration, the delamination failure problem in a dynamic service environment has gradually become a key factor limiting the reliability of packaging devices. In this paper, the delamination failure mechanism of polymer-based packaging devices is clarified by summarizing the relevant literature and the latest research solutions are proposed. The results show that, at the microscopic scale, thermal stress and moisture damage are still the two main mechanisms of two-phase interface failure of encapsulation devices. Additionally, the application of emerging technologies such as RDL structure modification and self-healing polymers can significantly improve the thermal stress state of encapsulation devices and enhance their moisture resistance, which can improve the anti-delamination reliability of polymer-based encapsulation devices. In addition, this paper provides theoretical support for subsequent research and optimization of polymer-based packages by summarizing the microscopic failure mechanism of delamination at the two-phase interface and introducing the latest solutions.
]]>Micromachines doi: 10.3390/mi15030375
Authors: Lei Han Pingmei Ming Shen Niu Guangbin Yang Dongdong Li Kuaile Cheng
Amorphous alloy (AA) is a high-performance metal material generally with significantly excellent mechanical and corrosion resistance properties and thus is considered as a desirable material selection for micro-scale articles. However, the microfabrication of AA still faces a variety of technical challenges mainly because the materials are too hard to process and easily lose their original properties, although at moderately high temperatures. In this study, jet-electrolyte electrochemical machining (Jet-ECM) was proposed to microfabricate the Zr-based AA because it is a low-temperature material-removal process based on the anode dissolution mechanism. The electrochemical dissolution characteristics and material removal mechanism of AA were investigated, and then the optimal process parameters were achieved based on the evaluation of the surface morphologies, surface roughness, geometrical profile, and machining accuracy of the machined micro-dimples. Finally, the feasibility was further studied by using Jet-ECM to fabricate arrayed micro-dimples using the optimized parameters. It was found that Jet-ECM can successfully microfabricate mirror-like surface AA arrayed precision micro-dimples with significantly high dimensional accuracy and geometrical consistency. Jet-ECM is a promisingly advantageous microfabrication process for the hard-to-machine AA.
]]>Micromachines doi: 10.3390/mi15030374
Authors: Jun Liu Chunbo Li Huan Yang Jiani Liu Jiayan Wang Leimin Deng Licun Fang Can Yang
The process of forming metal components through selective laser melting (SLM) results in inherent spherical effects, powder adhesion, and step effects, which collectively lead to surface roughness in stainless steel, limiting its potential for high-end applications. This study utilizes a laser-electrochemical hybrid process to polish SLM-formed 316L stainless steel (SS) and examines the influence of process parameters such as laser power and scanning speed on surface roughness and micro-morphology. A comparative analysis of the surface roughness, microstructure, and wear resistance of SLM-formed 316L SS polished using laser, electrochemical, and laser-electrochemical hybrid processes is presented. The findings demonstrate that, compared to laser and electrochemical polishing alone, the laser-electrochemical hybrid polishing exhibits the most significant improvement in surface roughness and the highest material wear resistance. Additionally, the hybrid process results in a surface free of cracks and only a small number of tiny corrosion holes, making it more suitable for polishing the surface of 316L SS parts manufactured via SLM.
]]>Micromachines doi: 10.3390/mi15030373
Authors: Hitalo J. B. Silva Claudete F. Pereira Goreti Pereira Giovannia A. L. Pereira
Quantum dots (QDs) have captured the attention of the scientific community due to their unique optical and electronic properties, leading to extensive research for different applications. They have also been employed as sensors for ionic species owing to their sensing properties. Detecting anionic species in an aqueous medium is a challenge because the polar nature of water weakens the interactions between sensors and ions. The anions bicarbonate (HCO3−), carbonate (CO32−), sulfate (SO42−), and bisulfate (HSO4−) play a crucial role in various physiological, environmental, and industrial processes, influencing the regulation of biological fluids, ocean acidification, and corrosion processes. Therefore, it is necessary to develop approaches capable of detecting these anions with high sensitivity. This study utilized CdTe QDs stabilized with cysteamine (CdTe-CYA) as a fluorescent sensor for these anions. The QDs exhibited favorable optical properties and high photostability. The results revealed a gradual increase in the QDs’ emission intensity with successive anion additions, indicating the sensitivity of CdTe-CYA to the anions. The sensor also exhibited selectivity toward the target ions, with good limits of detection (LODs) and quantification (LOQs). Thus, CdTe-CYA QDs show potential as fluorescent sensors for monitoring the target anions in water sources.
]]>Micromachines doi: 10.3390/mi15030372
Authors: Ľuboslav Straka Ivan Čorný
When machining high-speed steels (HSS) with micro-wire electrical discharge machining (micro-WEDM), high surface quality is achieved as standard. The value of the roughness parameter Ra is less than 0.2 μm. However, the problem is the performance of the electroerosion process (MRR), which is low. This problem is related to the mechanical and physical properties of the HSS in combination with the setting of the main technological parameters (MTP). The proposed solution to eliminate this problem relies on the selection of proper procedures for the determination of optimization criteria in relation to Ra and MTP, with the inclusion of properties of the machined material. The solution consisted in the identification of four significant physical (ρ, κ) and mechanical (Rm, HRC) indicators of HSS properties, on the basis of which a suitable combination of the process output parameters Ra and MRR can be determined through established mathematical regression models using simulation and optimization. In the next step, the proper values of the MTP output process parameter settings, which correspond to the optimized output parameters Ra and MRR during machining of HSS by micro-WEDM technology, were then obtained by the same approach.
]]>Micromachines doi: 10.3390/mi15030371
Authors: Guangping Gong Maoyi Zhang Dongqi An Rui Li Yewang Su
In recent years, global attention towards new energy has surged due to increasing energy demand and environmental concerns. Researchers have intensified their focus on new energy, leading to advancements in technologies like triboelectrification, which harnesses energy from the environment. The invention of the triboelectric nanogenerator (TENG) has led to new possibilities, with the rotary sliding TENG standing out for its superior performance. However, understanding its mechanical behavior remains a challenge, potentially leading to structural issues. This paper introduces a novel analytical mechanics model to analyze the mechanical performance of the stator of the rotary sliding TENG, offering a new analytical solution. The solution also presents an innovative approach to solving axisymmetric problems in elasticity theory since it challenges a traditional assumption that the stress function depends solely on the radial coordinate, proposing a new stress function to derive a more general solution, supplementing the classical approach in the theory of elasticity. Through the obtained solutions, the mechanical characteristics of the rotary sliding TENG during operation are analyzed. A clearer relationship between mechanical characteristics and electrical output is expected to provide a theoretical basis for the design of the rotary sliding TENG.
]]>Micromachines doi: 10.3390/mi15030370
Authors: Arnis Strods Karīna Narbute Valērija Movčana Kévin Gillois Roberts Rimša Patrik Hollos Fēlikss Rūmnieks Arnita Spule Gatis Mozoļevskis Arturs Abols
Organ-on-a-chip (OOC) is an innovative microfluidic device mimicking the structure and functionality of real tissue. OOCs typically involve cell culture with microfluidics to emulate the biological forces of different organ tissues and disease states, providing a next-generation experimental platform. When combined with simulated microgravity conditions, such as those produced by random positioning machines, they offer unique insights into disease processes. Microgravity has been shown to affect cellular behaviors, like proliferation and viability, though its influence on cell physiology is not fully explored. The primary objective of this study was to develop an OOC model with continuous flow under simulated microgravity. Cells cultured in static (non-continuous-flow) conditions exhibited clear growth reduction under microgravity conditions, showing more pronounced difference compared to continuous-flow conditions using an OOC setup. Although our results show that A549 cell viability under continuous flow decreased in microgravity compared to normogravity, this study demonstrates the successful development of a system capable of providing continuous flow in organ-on-a-chip (OOC) models within a random positioning machine.
]]>Micromachines doi: 10.3390/mi15030369
Authors: Adrian Lomeli-Martin Zakia Azad Julie A. Thomas Blanca H. Lapizco-Encinas
Bacteriophage therapy presents a promising avenue for combating antibiotic-resistant bacterial infections. Yet, challenges exist, particularly, the lack of a straightforward purification pipeline suitable for widespread application to many phage types, as some phages are known to undergo significant titer loss when purified via current techniques. Electrokinetic methods offer a potential solution to this hurdle, with nonlinear electrophoresis emerging as a particularly appealing approach due to its ability to discern both the size and shape of the target phage particles. Presented herein is the electrokinetic characterization of the mobility of nonlinear electrophoresis for two phages (SPN3US and ϕKZ) and three types of polystyrene nanoparticles. The latter served as controls and were selected based on their sizes and surface charge magnitude. Particle tracking velocimetry experiments were conducted to characterize the mobility of all five particles included in this study. The results indicated that the selected nanoparticles effectively replicate the migration behavior of the two phages under electric fields. Further, it was found that there is a significant difference in the nonlinear electrophoretic response of phages and that of host cells, as first characterized in a previous report, illustrating that electrokinetic-based separations are feasible. The findings from this work are the first characterization of the behavior of phages under nonlinear electrophoresis effects and illustrate the potential for the development of electrokinetic-based phage purification techniques that could aid the advancement of bacteriophage therapy.
]]>Micromachines doi: 10.3390/mi15030368
Authors: Ding Ding Jiaxin You Xiangqian Cui Yutong Xue Xu Tan Guofu Zhai
The magnetic properties of soft magnetic materials, including their saturation magnetic induction strength and permeability, significantly affect the dynamic characteristics of electromagnetic relays. However, the soft materials most commonly used for relays in the magnetic conductive components of electromagnetic systems, such as electrical pure iron, limit further relay design improvement and optimization to a certain extent. Thus, this paper proposes the use of amorphous and nanocrystalline soft magnetic materials with good high-frequency magnetic properties in magnetic circuits. A wavelet analysis was conducted on the high-frequency components of the coil current while the relay operated, and the corresponding magnetic materials were selected. Considering the challenges in processing amorphous and nanocrystalline materials and collecting test data for the accuracy verification of simulation methods, we prepared a scaled-up prototype for use in dynamic characteristic tests. The simulation method was improved, yielding more accurate simulation results regarding the relay’s dynamic characteristics. On this basis, six replacement schemes using amorphous and nanocrystalline materials were considered. The test results proved that this application could improve the relay’s dynamic characteristics. Finally, a full-size sample with an iron core consisting of nanocrystalline alloy 1K107B was prepared, and the conclusions were verified in tests.
]]>Micromachines doi: 10.3390/mi15030367
Authors: Xiao-Yu Zhang Zhi-Ji Wang Jian Chen Eun-Seong Kim Nam-Young Kim Jong-Chul Lee
This work proposes a microwave resonator built from gallium arsenide using integrated passive device (IPD) technology. It consists of a three-layered interlaced spiral structure with airbridges and inner interdigital structures. For integrated systems, IPD technology demonstrated outstanding performance, robustness, and a tiny size at a low cost. The airbridges were made more compact, with overall dimensions of 1590 × 800 µm2 (0.038 × 0.019 λg2). The designed microwave resonator operated at 1.99 GHz with a return loss of 39 dB, an insertion loss of 0.07 dB, and a quality factor of 1.15. Additionally, an experiment was conducted on the properties of the airbridge and how they affected resistance, inductance, and S-parameters in the construction of the resonator. To investigate the impact of airbridges on the structure, E- and H-field distributions of the resonator were simulated. Furthermore, its use in sensing applications was explored. Various concentrations of glucose solutions were used in the experiment. The proposed device featured a minimum detectable concentration of 0.2 mg/mL; high sensitivity, namely, 14.58 MHz/mg·mL−1, with a linear response; and a short response time. Thus, this work proposes a structure that exhibits potential in integrated systems and real-time sensing systems with high sensitivity.
]]>Micromachines doi: 10.3390/mi15030366
Authors: Zhengping Xu Yongtong Feng Yi Liu Fengxin Shi Yang Ge Han Liu Wei Cao Hong Zhou Shuang Geng Wenqi Lin
To measure the micro-displacement reliably with high precision, a single-ended eddy current sensor based on temperature compensation was studied in detail. At first, the principle of the eddy current sensor was introduced, and the manufacturing method of the probe was given. The overall design plan for the processing circuit was induced by analyzing the characteristics of the probe output signal. The variation in the probe output signal was converted to pulses with different widths, and then it was introduced to the digital phase discriminator along with a reference signal. The output from the digital phase discriminator was processed by a low-pass filter to obtain the DC component. At last, the signal was amplified and compensated to reduce the influence of temperature. The selection criteria of the frequency of the exciting signal and the design of the signal conditioning circuit were described in detail, as well as the design of the temperature-compensating circuit based on the digital potentiometer with an embedded temperature sensor. Finally, an experimental setup was constructed to test the sensor, and the results were given. The results show that nonlinearity exists in the single-ended eddy current sensor with a large range. When the range is 500 μm, the resolution can reach 46 nm, and the repeatability error is ±0.70% FR. Within the temperature range from +2 °C to +58 °C, the voltage fluctuation in the sensor is reduced to 44 mV after temperature compensation compared to the value of 586 mV before compensation. The proposed plan is verified to be feasible, and the measuring range, precision, and target material should be considered in real-world applications.
]]>Micromachines doi: 10.3390/mi15030365
Authors: Hayriye Kirkoyun Uysal Meltem Eryildiz Mehmet Demirci
New rapid, reliable, and cost-effective alternative systems are needed for the rapid diagnosis of Streptococcus pyogenes. The aim of this study was to fabricate a microfluidic test device to detect Streptococcus pyogenes by combining the Loop-mediated isothermal amplification method via a 3D printer. Microfluidic test devices were designed in CATIA V5 Release 16 software, and data were directly transferred to a 3D printer and produced using the FDM method with biocompatible PLA filament. The S. pyogenes ATCC 19615 and different ATCC strains was used. Following identification by classical culture methods, a 0.5 McFarland suspension was prepared from the colonies, and DNA isolation was performed from this liquid by a boiling method. S. pyogenes specific speB gene was used to desing LAMP primer sets in PrimerExplorer V5 software and tested on a microfluidic device. LAMP reactions were performed on microfluidic device and on a microcentrifuge tube separately. Both results were analyzed using the culture method as the standard method to diagnostic values. Melting curve analysis of the amplicons of the LAMP reactions performed on a LightCycler 480 system to detect amplification. Among the 50 positive and 100 negative samples, only four samples were found to be false negative by LAMP reaction in a microcentrifuge tube, while eight samples were found to be false negative by LAMP reaction on a microfluidic device. Six samples were found to be false positive by the LAMP reaction in the microcentrifuge tube, while ten samples were found to be false positive by the LAMP reaction on a microfluidic chip. The sensitivity, specificity, positive predictive value, and negative predictive value of the LAMP reactions performed in the microcentrifuge tube and on the microfluidic device were 92–84%, 94–90%, 88.46–80.77%, and 95.92–91.84%, respectively. The limit of detection (LOD) was found to be the same as 1.5 × 102 CFU/mL and the limit of quantification (LOQ) values of the LAMP reactions were performed on the microcentrifuge tube and on the microfluidic device were 2.46 × 102–7.4 × 102 CFU/mL, respectively. Cohen’s kappa (κ) values of the LAMP reactions were performed on the microcentrifuge tube and on the microfluidic device were 0.620–0.705, respectively. In conclusion, our data showed that the LAMP method can be combined with microfluidic test device to detect S. pyogenes, this microfluidic device can be manufactured using 3D printers and results are close to gold standard methods. These devices can be combined with LAMP reactions to detect different pathogens where resources are limited and rapid results are required.
]]>Micromachines doi: 10.3390/mi15030364
Authors: Pengfei Zhao Xin Li Zhengjie Luo Qihang Zhai Ye Tian Kaisheng Zhang Hao Guo
Efforts to enhance the speed and reduce the energy consumption of underwater vehicles have led to the proposal of a novel mucus release structure inspired by the secretion of mucus cells on fish skin. This structure features interconnected microgrooves with excellent flexibility for adjusting to different states, effectively reducing drag through mucus release. Numerical analysis of the drag reduction performance of the mucous-releasing micro-pore structure was conducted using ANSYS Fluent 19.2 software. This structure is capable of reducing the velocity gradient near the wall and, owing to the presence of micro-pore structures, decreasing the overall compressed area, thereby achieving drag reduction effects. The experimental results revealed a drag reduction effect of 20.56% when the structure was bent at an angle of 120°. The drag reduction varied under different attitudes such as tension and compression. This mucus release structure achieves reusability through a direct mucous injection process. This research provides valuable insights for the drag reduction study of underwater vehicles, such as ships and submarines, laying a foundation for advancing the development and applications of this field in the future.
]]>Micromachines doi: 10.3390/mi15030363
Authors: Danlin Xiao Junfeng Zhai Zhongkai Shen Qiang Wang Shengnan Wei Yang Li Chao Bian
An electrochemical sensor based on a thin-layer flow cell and a boron-doped diamond (BDD) working electrode was fabricated for heavy metal ions determination using anodic stripping voltammetry. Furthermore, a fluidic automatic detection system was developed. With the wide potential window of the BDD electrode, Zn2+ with high negative stripping potential was detected by this system. Due to the thin-layer and fluidic structure of the sensor system, the electrodepositon efficiency for heavy metal ions were improved without using conventional stirring devices. With a short deposition time of 60 s, the system consumed only 0.75 mL reagent per test. A linear relationship for Zn2+ determination was displayed ranging from 10 μg/L to 150 μg/L with a sensitivity of 0.1218 μA·L·μg−1 and a detection limit of 2.1 μg/L. A high repeatability was indicated from the relative standard deviation of 1.60% for 30 repeated current responses of zinc solution. The system was applied to determine Zn2+ in real water samples by using the standard addition method with the recoveries ranging from 92% to 118%. The system was also used for the simultaneous detection of Zn2+, Cd2+, and Pb2+. The detection results indicate its potential application in on-site monitoring for mutiple heavy metal ions.
]]>Micromachines doi: 10.3390/mi15030362
Authors: Chong Yue Xiuting Zhao Lei Tao Chuntao Zheng Yueqing Ding Yongcai Guo
For the purpose of detecting waterborne bacteria, a high-phase-sensitivity SPR sensor with an Ag–TiO2–Franckeite–WS2 hybrid structure is designed using an improved seeker optimization algorithm (ISOA). By optimizing each layer of sensor construction simultaneously, the ISOA guarantees a minimum reflectance of less than 0.01 by Ag (20.36 nm)–TiO2 (6.08 nm)–Franckeite (monolayer)–WS2 (bilayer) after 30 iterations for E. coli. And the optimal phase sensitivity is 2.378 × 106 deg/RIU. Sensor performance and computing efficiency have been greatly enhanced using the ISOA in comparison to the traditional layer-by-layer technique and the SOA method. This will enable sensors to detect a wider range of bacteria with more efficacy. As a result, the ISOA-based design idea could provide SPR biosensors with new applications in environmental monitoring.
]]>Micromachines doi: 10.3390/mi15030361
Authors: Leilei Xiang Enming Zhang Wenyu Kang Wei Lin Junyong Kang
GaN heterostructure is a promising material for next-generation optoelectronic devices, and Indium gallium nitride (InGaN) has been widely used in ultraviolet and blue light emission. However, its applied potential for longer wavelengths still requires exploration. In this work, the ultra-thin InN/GaN superlattices (SL) were designed for long-wavelength light emission and investigated by first-principles simulations. The crystallographic and electronic properties of SL were comprehensively studied, especially the strain state of InN well layers in SL. Different strain states of InN layers were applied to modulate the bandgap of the SL, and the designed InN/GaN heterostructure could theoretically achieve photon emission of at least 650 nm. Additionally, we found the SL had different quantum confinement effects on electrons and holes, but an efficient capture of electron-hole pairs could be realized. Meanwhile, external forces were also considered. The orbital compositions of the valence band maximum (VBM) were changed with the increase in tensile stress. The transverse electric (TE) mode was found to play a leading role in light emission in normal working conditions, and it was advantageous for light extraction. The capacity of ultra-thin InN/GaN SL on long-wavelength light emission was theoretically investigated.
]]>Micromachines doi: 10.3390/mi15030360
Authors: Shuaipeng Wang Haichao Huang Ying Yang Yanning Chen Zhen Fu Zhenhu Jin Zhenyu Shi Xingyin Xiong Xudong Zou Jiamin Chen
To mitigate the impact of low-frequency noise from the tunnel magnetoresistance (TMR) current sensor and ambient stray magnetic fields on weak current detection accuracy, we propose a high-resolution modulation-demodulation test method. This method modulates and demodulates the measurement signal, shifting low-frequency noise to the high-frequency band for effective filtering, thereby isolating the target signal from the noise. In this study, we developed a Simulink model for the TMR current sensor modulation-demodulation test method. Practical time-domain and frequency-domain tests of the developed high-resolution modulation-demodulation method revealed that the TMR current sensor exhibits a nonlinearity as low as 0.045%, an enhanced signal-to-noise ratio (SNR) of 77 dB, and a heightened resolution of 100 nA. The findings indicate that this modulation-demodulation test method effectively reduces the impact of low-frequency noise on TMR current sensors and can be extended to other types of resistive devices.
]]>Micromachines doi: 10.3390/mi15030359
Authors: Giulia Deiana Stewart Smith
Sample preparation is a critical requirement for many clinical tests and diagnostic procedures, but it is difficult to perform on a lab-on-a-chip platform. The analytical side of microfluidic technologies has been gradually catching up with laboratory methods in terms of sensitivity, selectivity, and reliability. There is a growing need for the development of sample preparation modules that can either be connected or embedded into such devices and extract blood plasma in a fast, safe, and automated way. Achieving this functionality is an important step towards creating commercially viable products that can one day become part of everyday life. In this study, a range of simple, yet effective, 3D printed sample preparation devices was developed. The devices rely on snap-fit mechanisms and “resin-bonding” methods to fasten two layers and integrate a plasma separation membrane in between. The devices have excellent usability, with only one step required for their operation without any waiting time for the user, and could extract an average of 56.88% of the total available plasma from 50 μL capillary blood samples in 87 s without inducing any haemolysis. The manufacturing process is quick and straightforward, requiring only low-cost equipment and minimal training. The devices can either be used as a stand-alone device or integrated into an existing lab-on-a-chip system to provide blood filtration capabilities.
]]>Micromachines doi: 10.3390/mi15030358
Authors: Hao Liu Bing Xue Jun Xu
In this paper, a novel broadband balanced-to-balanced (BTB) filtering power divider (FPD) utilizing the half-mode substrate-integrated waveguide and spoof surface plasmon polariton (HMSIW-SSPP) hybrid transmission line is introduced. Initially, a new HMSIW-SSPP unit cell is proposed, demonstrating a lower upper cut-off frequency compared to the classical HMSIW-SSPP unit cell. Building upon this unit cell, a bandpass BTB FPD is devised employing dual-layer stacked substrates, enabling independent control over the passband’s lower and upper cut-off frequencies through specific physical dimensions. Additionally, the incorporation of isolation resistors and defected ground structures in the BTB FPD enhances differential-mode isolation and common-mode (CM) suppression between output ports. A manufactured and tested BTB FPD prototype validates this design method, showcasing a broad fractional bandwidth of 52.31% (6.72–11.48 GHz), output port isolation surpassing 14.25 dB, and transmitted CM suppression exceeding 34.05 dB.
]]>Micromachines doi: 10.3390/mi15030357
Authors: Chenlong Liang Cancan Yan Shoupei Zhai Yuhang Wang Anyu Hu Wen Wang Yong Pan
In this work, the major methods for implementing flexible sensing technology—flexible surface acoustic wave (SAW) sensors—are summarized; the working principles and device characteristics of the flexible SAW sensors are introduced; and the latest achievements of the flexible SAW sensors in the selection of the substrate materials, the development of the piezoelectric thin films, and the structural design of the interdigital transducers are discussed. This paper focuses on analyzing the research status of physical flexible SAW sensors such as temperature, humidity, and ultraviolet radiation, including the sensing mechanism, bending strain performance, device performance parameters, advantages and disadvantages, etc. It also looks forward to the development of future chemical flexible SAW sensors for gases, the optimization of the direction of the overall device design, and systematic research on acoustic sensing theory under strain. This will enable the manufacturing of multifunctional and diverse sensors that better meet human needs.
]]>Micromachines doi: 10.3390/mi15030356
Authors: Yahao Gao Simin Peng Xiangming Liu Yufei Liu Wei Zhang Chunrong Peng Shanhong Xia
In order to enhance the sensitivity of wafer-level vacuum-packaged electric field sensors, this paper proposed a vertical-resonant MEMS electric field sensor based on TGV (Through Glass Via) technology. The microsensor is composed of the electric field sensing cover, the drive cover, and the SOI-based microstructures between them. TGV technology is innovatively used to fabricate the electric field sensing cover and the vertically-driven cover. The external electric field is concentrated and transmitted to the area below the silicon plate in the center of the electric field sensing cover through a metal plate and a metal pillar, reducing the coupling capacitance between the silicon plate and the packaging structure, thereby achieving the enhanced transmission of the electric field. The sensitivity-enhanced mechanism of the sensor is analyzed, and the key parameters of the sensor are optimized through finite element simulation. The fabrication process is designed and realized. A prototype is tested to characterize its performance. The experimental results indicate that the sensitivity of the sensor is 0.82 mV/(kV/m) within the electrostatic electric field ranging from 0–50 kV/m. The linearity of the sensor is 0.65%.
]]>Micromachines doi: 10.3390/mi15030353
Authors: Yao-Tsung Lin Ming-Yi Tsai Shih-Yu Yen Guan-Hua Lung Jin-Ting Yei Kuo-Jen Hsu Kai-Jung Chen
Three-dimensional printing is a non-conventional additive manufacturing process. It is different from the conventional subtractive manufacturing process. It offers exceptional rapid prototyping capabilities and results that conventional subtractive manufacturing methods cannot attain, especially in applications involving curved or intricately shaped components. Despite its advantages, metal 3D printing will face porosity, warpage, and surface roughness issues. These issues will affect the future practical application of the parts indirectly, for example, by affecting the structural strength and the parts’ assembly capability. Therefore, this study compares the qualities of the warpage, weight, and surface roughness after milling and grinding processes for the same material (316L stainless steel) between rolled steel and 3D-printed steel. The experimental results show that 3D-printed parts are approximately 13% to 14% lighter than rolled steel. The surface roughness performance of 3D-printed steel is better than that of rolled steel for the same material after milling or grinding processing. The hardness of the 3D-printed steel is better than that of the rolled steel. This research verifies that 3D additive manufacturing can use surface processing to optimize surface performance and achieve the functions of lightness and hardness.
]]>Micromachines doi: 10.3390/mi15030355
Authors: Yajun Wu Wenqing Liu Xinhui Sun Jinxin Chen Gang Cheng Xi Chen Yibin Fu Pan Liu Tianshu Zhang
A quasi-continuous-wave (QCW) laser diode (LD) driver is commonly used to drive diode bars and stacks designed specifically for QCW operations in solid-state lasers. Such drivers are optimized to deliver peak current and voltage pulses to LDs while maintaining low average power levels. As a result, they are widely used in laser processing devices and laser instruments. Traditional high-energy QCW LD drivers primarily use capacitors as energy storage components and pulsed constant-current sources with op-amps and power metal-oxide-semiconductor field-effect transistors (MOSFETs) as their core circuits for generating repeated constant-current pulses. The drawback of this type of driver is that the driver’s output voltage needs to be manually adjusted according to the operating voltage of the load before use to maximize driver efficiency while providing a sufficient current. Another drawback is its inability to automatically adjust the output voltage to maintain high efficiency when the load changes during the driver operation. Drastic changes in the load can cause the driver to fail to function properly in extreme cases. Based on the above traditional circuit structure, this study designed a stability compensation circuit and realized a QCW LD driver for driving a GS20 diode stack with a maximum repetition rate of 100 Hz, a constant current of approximately 300 A, a load voltage of approximately 10 V, and a pulse width of approximately 300 μs. In particular, a high-efficiency, load-adaptive driving method was used with the MOSFETs in the critical saturation region (i.e., between the linear and saturated regions), controlling its power loss effectively while achieving maximum output current of the driver. The experiments demonstrated that the driver efficiency could be maintained at more than 80% when the load current varied from 50 to 300 A.
]]>Micromachines doi: 10.3390/mi15030354
Authors: Jun Ren Aojie Lan
In order to expand the range of motion performance of the 3-PSS-compliant parallel micro-motion platform, a variable inclination angle of the mechanism’s guide rails was introduced to construct a category of generalized 3-PSS compliant parallel micro-motion platforms with distinct configurations (exhibiting different motion performances) but identical motion patterns (three translational degrees of freedom). The compliance and kinetostatics of such micro-motion platform are modeled and analyzed. Firstly, the compliance model is established based on the coordinate transformation method. Then, simplifying the micro-motion platform into a spring system, the kinetostatic model in terms of input force–output displacement is established based on the compliance model using the compliance matrix method. For practical application considerations, the kinetostatic model in terms of input displacement–output displacement is further derived based on the input force–output displacement model. Then, the correctness of the established compliance model and kinetostatic model is successively verified through finite element simulation. Finally, using two specified motion trajectories (spatial spiral trajectory and planar circular trajectory) as examples, an analysis is conducted on the influence of guide rail inclination angle variations on the kinetostatic performance of the micro-motion platform. This analysis serves as guidance for the rational design of such micro-motion platforms.
]]>Micromachines doi: 10.3390/mi15030352
Authors: Zhuoyue Zheng Chen Wang Linlin Wang Zeyu Ji Xiaoxiao Song Pui-In Mak Huafeng Liu Yuan Wang
The MEMS microphone is a representative device among the MEMS family, which has attracted substantial research interest, and those tailored for human voice have earned distinct success in commercialization. Although sustained development persists, challenges such as residual stress, environmental noise, and structural innovation are posed. To collect and summarize the recent advances in this subject, this paper presents a concise review concerning the transduction mechanism, diverse mechanical structure topologies, and effective methods of noise reduction for high-performance MEMS microphones with a dynamic range akin to the audible spectrum, aiming to provide a comprehensive and adequate analysis of this scope.
]]>Micromachines doi: 10.3390/mi15030351
Authors: Mingbo Zhang Qinghua Liu Maoqi Zhu Jian Chen Deyong Chen Junbo Wang Yulan Lu
This paper presents a MEMS electrochemical angular accelerometer with a silicon-based four-electrode structure, which was made of thousands of interconnected microchannels for electrolyte flow, anodes uniformly coated on structure surfaces and cathodes located on the sidewalls of flow holes. From the perspective of device fabrication, in this study, the previously reported multi-piece assembly was simplified into single-piece integrative manufacturing, effectively addressing the problems of complex assembly and manual alignment. From the perspective of the sensitive structure, in this study, the silicon-based four-electrode structure featuring with complete insulation layers between anodes and cathodes can enable fast electrochemical reactions with improved sensitivities. Numerical simulations were conducted to optimize the geometrical parameters of the silicon-based four-electrode structure, where increases in fluid resistance and cathode area were found to expand working bandwidths and improve device sensitivity, respectively. Then, the silicon-based four-electrode structure was fabricated by conventional MEMS processes, mainly composed of wafer-level bonding and wafer-level etching. As to device characterization, the MEMS electrochemical angular accelerometer with the silicon-based four-electrode structure exhibited a maximum sensitivity of 1458 V/(rad/s2) at 0.01 Hz and a minimum noise level of −164 dB at 1 Hz. Compared with previously reported electrochemical angular accelerometers, the angular accelerometer developed in this study offered higher sensitivities and lower noise levels, indicating strong potential for applications in the field of rotational seismology.
]]>Micromachines doi: 10.3390/mi15030350
Authors: Alexey A. Kovalev Anton G. Nalimov Victor V. Kotlyar
Two linked gear wheels in a micromachine can be simultaneously rotated in opposite directions by using a laser beam that has in its section areas the spin angular momentum (SAM) of the opposite sign. However, for instance, a cylindrical vector beam has zero SAM in the focus. We alter a cylindrical vector beam so as to generate areas in its focus where the SAM is of opposite signs. The first alteration is adding to the cylindrical vector beam a linearly polarized beam. Thus, we study superposition of two rotationally symmetric beams: those with cylindrical and linear polarization. We obtain an expression for the SAM and prove two of its properties. The first property is that changing superposition coefficients does not change the shape of the SAM density distribution, whereas the intensity changes. The second property is that maximal SAM density is achieved when both beams in the superposition have the same energy. The second perturbation is adding a spatial carrier frequency. We study the SAM density of a cylindrical vector beam with a spatial carrier frequency. Due to periodic modulation, upon propagation in space, such a beam is split into two beams, having left and right elliptic polarization. Thus, in the beam transverse section, areas with the spin of different signs are separated in space, which is a manifestation of the spin Hall effect. We demonstrate that such light beams can be generated by metasurfaces, with the transmittance depending periodically on one coordinate.
]]>Micromachines doi: 10.3390/mi15030349
Authors: Join Uddin Raksha Dubey Vinaayak Sivam Balasubramaniam Jeff Kabel Vedika Khare Zohreh Salimi Sambhawana Sharma Dongyan Zhang Yoke Khin Yap
In this review, we examine recent progress using boron nitride (BN) and molybdenum disulfide (MoS2) nanostructures for electronic, energy, biomedical, and environmental applications. The scope of coverage includes zero-, one-, and two-dimensional nanostructures such as BN nanosheets, BN nanotubes, BN quantum dots, MoS2 nanosheets, and MoS2 quantum dots. These materials have sizable bandgaps, differentiating them from other metallic nanostructures or small-bandgap materials. We observed two interesting trends: (1) an increase in applications that use heterogeneous materials by combining BN and MoS2 nanostructures with other nanomaterials, and (2) strong research interest in environmental applications. Last, we encourage researchers to study how to remove nanomaterials from air, soil, and water contaminated with nanomaterials. As nanotechnology proceeds into various applications, environmental contamination is inevitable and must be addressed. Otherwise, nanomaterials will go into our food chain much like microplastics.
]]>Micromachines doi: 10.3390/mi15030348
Authors: Shamoon Al Islam Liang Hao Zunaira Javaid Wei Xiong Yan Li Yasir Jamil Qiaoyu Chen Guangchao Han
A challenge remains in achieving adequate surface roughness of SLM fabricated interior channels, which is crucial for fuel delivery in the space industry. This study investigated the surface roughness of interior fine flow channels (1 mm diameter) embedded in SLM fabricated TC4 alloy space components. A machine learning approach identified layer thickness as a significant factor affecting interior channel surface roughness, with an importance score of 1.184, followed by scan speed and laser power with scores of 0.758 and 0.512, respectively. The roughness resulted from thin layer thickness of 20 µm, predominantly formed through powder adherence, while from thicker layer of 50 µm, the roughness was mainly due to the stair step effect. Slow scan speeds increased melt pools solidification time at roof overhangs, causing molten metal to sag under gravity. Higher laser power increased melt pools temperature and led to dross formation at roof overhangs. Smaller hatch spaces increased roughness due to overlapping of melt tracks, while larger hatch spaces reduced surface roughness but led to decreased part density. The surface roughness was recorded at 34 µm for roof areas and 26.15 µm for floor areas. These findings contribute to potential adoption of TC4 alloy components in the space industry.
]]>Micromachines doi: 10.3390/mi15030347
Authors: Nishant Singh Jamwal Amirkianoosh Kiani
Gallium oxide (Ga2O3) is a promising material for high-power semiconductor applications due to its wide band gap and high breakdown voltage. However, the current methods for fabricating Ga2O3 nanostructures have several disadvantages, including their complex manufacturing processes and high costs. In this study, we report a novel approach for synthesizing β-Ga2O3 nanostructures on gallium phosphide (GaP) using ultra-short laser pulses for in situ nanostructure generation (ULPING). We varied the process parameters to optimize the nanostructure formation, finding that the ULPING method produces high-quality β-Ga2O3 nanostructures with a simpler and more cost-effective process when compared with existing methods. Scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy (EDX) were used to characterize the samples, which indicated the presence of phosphorous. X-ray photoelectron spectroscopy (XPS) confirmed the formation of gallium oxide, along with a minor amount of phosphorus-containing compounds. Structural analysis using X-ray diffraction (XRD) revealed the formation of a monoclinic β-polymorph of Ga2O3. We also measured the band gap of the materials using reflection electron energy loss spectroscopy (REELS), and found that the band gap increased with higher nanostructure formation, reaching 6.2 eV for the optimized sample. Furthermore, we observed a change in the heterojunction alignment, which we attribute to the change in the oxidation of the samples. Our results demonstrate the potential of ULPING as a novel, simple, and cost-effective method for fabricating Ga2O3 nanostructures with tunable optical properties. The ULPING method offers a green alternative to existing fabrication methods, making it a promising technology for future research in the field of Ga2O3 nanostructure fabrication.
]]>Micromachines doi: 10.3390/mi15030346
Authors: Xiong Jiang Tao Liu Jie Duan Maosheng Hou
A gyroscope-free strapdown inertial navigation system (GFSINS) solves the carrier attitude through the reasonable spatial combination of accelerometers, with a particular focus on the precision of angular velocity calculation. This paper conducts an analysis of a twelve-accelerometer configuration scheme and proposes an angular velocity fusion algorithm based on the Kalman filter. To address the sign misjudgment issue that may arise when calculating angular velocity using the extraction algorithm, a sliding window correction method is introduced to enhance the accuracy of angular velocity calculation. Additionally, the data from the integral algorithm and the data from the improved extraction algorithm are fused using Kalman filtering to obtain the optimal estimation of angular velocity. Simulation results demonstrate that this algorithm significantly reduces the maximum value and standard deviation of angular velocity error by one order of magnitude compared to existing algorithms. Experimental results indicate that the algorithm’s calculated angle exhibits an average difference of less than 0.5° compared to the angle measured by the laser tracker. This level of accuracy meets the requirements for attitude measurement in the laser scanning projection system.
]]>Micromachines doi: 10.3390/mi15030345
Authors: Hao Jiang Yalin Li Fei Du Zhaoguang Nie Gang Wei Yan Wang Xiaomin Liu
High-efficient separation of (bio)microparticles has important applications in chemical analysis, environmental monitoring, drug screening, and disease diagnosis and treatment. As a label-free and high-precision separation scheme, dielectrophoresis (DEP) has become a research hotspot in microparticle separation, especially for biological cells. When processing cells with DEP, relatively high electric conductivities of suspending media are sometimes required to maintain the biological activities of the biosample, which results in high temperature rises within the system caused by Joule heating. The induced temperature gradient generates a localized alternating current electrothermal (ACET) flow disturbance, which seriously impacts the DEP manipulation of cells. Based on this, we propose a novel design of the (bio)microparticle separator by combining DEP with ACET flow to intensify the separation process. A coupling model that incorporates electric, fluid flow, and temperature fields as well as particle tracking is established to predict (bio)microparticle trajectories within the separator. Numerical simulations reveal that both ACET flow and DEP motion act in the same plane but in different directions to achieve high-precision separation between particles. This work provides new design ideas for solving the very tricky Joule heating interference in the DEP separation process, which paves the way for further improving the throughput of the DEP-based (bio)microparticle separation system.
]]>Micromachines doi: 10.3390/mi15030343
Authors: Nedasadat Taheri Sepehr Tabrizchi Arman Roohi
This paper conducts a comprehensive study on intermittent computing within IoT environments, emphasizing the interplay between different dataflows—row, weight, and output—and a variety of non-volatile memory technologies. We then delve into the architectural optimization of these systems using a spatial architecture, namely IDEA, with their processing elements efficiently arranged in a rhythmic pattern, providing enhanced performance in the presence of power failures. This exploration aims to highlight the diverse advantages and potential applications of each combination, offering a comparative perspective. In our findings, using IDEA for the row stationary dataflow with AlexNet on the CIFAR10 dataset, we observe a power efficiency gain of 2.7% and an average reduction of 21% in the required cycles. This study elucidates the potential of different architectural choices in enhancing energy efficiency and performance in IoT systems.
]]>Micromachines doi: 10.3390/mi15030344
Authors: Wenchang Huang Jiaqi Li Shuai Wu Yan He Xiangxin Li Zhitian Shen Yaoyao Cui
Dual-frequency ultrasounds have demonstrated significant potential in augmenting thermal ablation efficiency for tumor treatment. Ensuring proper impedance matching between the dual-frequency transducer and the power amplifier system is imperative for equipment safety. This paper introduces a novel dual-frequency impedance matching network utilizing L-shaped topology and employing a genetic algorithm to compute component values. Implementation involved an adjustable capacitor and inductor network to achieve dual-frequency matching. Subsequently, the acoustic parameters of the dual-frequency HIFU transducer were evaluated before and after matching, and the effects of ultrasound thermal ablation with and without matching were compared. The proposed dual-frequency impedance matching system effectively reduced the standing wave ratio at the two resonance points while enhancing transmission efficiency. Thermal ablation experiments with matching circuits showed improved temperature rise efficiencies at both frequencies, resulting in an expanded ablation zone. The dual-frequency impedance matching method significantly enhances the transmission efficiency of the dual-frequency ultrasound system at two operational frequencies, thereby ensuring equipment safety. It holds promising prospects for application in dual-frequency ultrasound treatment.
]]>Micromachines doi: 10.3390/mi15030342
Authors: Devin Keck Suma Ravi Shivam Yadav Rodrigo Martinez-Duarte
The manipulation of single particles remains a topic of interest with many applications. Here we characterize the impact of selected parameters on the motion of single particles thanks to dielectrophoresis (DEP) induced by visible light, in a technique called Light-induced Dielectrophoresis, or LiDEP, also known as optoelectronic tweezers, optically induced DEP, and image-based DEP. Baker’s yeast and Candida cells are exposed to an electric field gradient enabled by shining a photoconductive material with a specific pattern of visible light, and their response is measured in terms of the average cell velocity towards the gradient. The impact on cell velocity when varying the shape and color of the light pattern, as well as the distance from the cell to the pattern, is presented. The experimental setup featured a commercial light projector featuring digital light processing (DLP) technology but mechanically modified to accommodate a 40× microscope objective lens. The minimal resolution achieved on the light pattern was 8 µm. Experimental results show the capability for single cell manipulation and the possibility of using different shapes, colors, and distances to determine the average cell velocity.
]]>Micromachines doi: 10.3390/mi15030341
Authors: Songyuan Yan Zarya Rajestari Timothy Clifford Morse Harbour Li Lawrence Kulinsky
The presented study demonstrates the capability of the template-based electrokinetic assembly (TEA) and guidance to manipulate and capture individual biological cells within a microfluidic platform. Specifically, dielectrophoretic (DEP) focusing of K-562 cells towards lithographically-defined “wells” on the microelectrodes and positioning singles cells withing these “wells” was demonstrated. K-562 lymphoblast cells, are widely used in immunology research. The DEP guidance, particularly involving positive DEP (pDEP), enables the controlled guidance and positioning of conductive and dielectric particles, including biological cells, opening new directions for the accurate and efficient microassembly of biological entities, which is crucial for single cell analysis and other applications in biotechnology. The investigation explores the use of glassy carbon and gold as electrode materials. It was established previously that undiluted physiological buffer is unsuitable for inducing positive DEP (pDEP); therefore, the change of media into a lower ionic concentration is necessary. After pDEP was observed, the cells are resubmerged in the Iscove’s modified Dulbecco’s medium (IMEM), a cell culturing media, and incubated. A dead/alive staining assay was performed on the cells to determine their survival in the diluted buffer for the period required to capture them. The staining assay confirmed the cells’ survival after being immersed in the diluted biological buffer necessary for electrokinetic handling. The results indicate the promise of the proposed electrokinetic bio-sorting technology for applications in tissue engineering, lab-on-a-chip devices, and organ-on-a-chip models, as well as contributing to the advancement of single cell analysis.
]]>Micromachines doi: 10.3390/mi15030340
Authors: Yanhu Huang Jiajun Liang Zhao Wu Qian Chen
A 2.45 GHz high-efficiency rectifying circuit for a wireless radiofrequency (RF) energy collection system is proposed. The RF energy collection system is composed of a transmitting antenna, a receiving antenna, a rectifying circuit and a load. The designed receiving antenna is a kind of dual-polarised cross-dipole antenna; its bandwidth is 2.3–2.5 GHz and gain is 7.97 dBi. The proposed rectifying circuit adopts the technology of an output matching network, which can suppress the high-harmonic components. When the input power at 2.45 GHz is 13 dBm and the load is 2 kΩ, the highest conversion efficiency of RF-DC is 74.8%, and the corresponding maximum DC output voltage is 4.92 V. The experiment results are in good agreement with the simulation results, which shows a good application prospect.
]]>Micromachines doi: 10.3390/mi15030339
Authors: Filippo Azzini Beatrice Pulvirenti Massimiliano Rossi Gian Luca Morini
Motivated by the increasing need of optimised micro-devices for droplet production in medical and biological applications, this paper introduces an integrated approach for the study of the liquid–liquid droplet creation in flow-focusing micro cross-junctions. The micro-junction considered is characterised by a restriction of the channels cross-sections in the junction, which has the function of focusing the flow in the region of the droplet formation. The problem is studied numerically in the OpenFOAM environment and validated by a comparison with experimental results obtained by high-speed camera images and micro-PIV measurements. The analysis of the forces acting on the dispersed phase during the droplet formation and the diameter of the droplets obtained numerically are considered for the development of a model of the droplet breakup under the squeezing regime. On the basis of energy balancing during the breakup, a relation between interfacial tension, the size of the cross-sections in the junction, and the time interval needed for droplet creation is obtained, which yields a novel correlation between the dimensionless length of the droplet and the dimensionless flow rate. This research expands our knowledge of the phenomenon of drop creation in micro-junctions with restrictions providing new aid for the optimal design of micro-drop generators.
]]>Micromachines doi: 10.3390/mi15030338
Authors: Hao Dong Pengbo Liu Shuaishuai Lu Peng Yan Qiyuan Sun
Technological advancements across various sectors are driving a growing demand for large-scale three-degree-of-freedom micro–nano positioning platforms, with substantial pressure to reduce footprints while enhancing motion range and accuracy. This study proposes a three-prismatic-revolute-revolute (3-PRR) parallel mechanism based on biomimetic variable-diameter helical flexible hinges. The resulting platform achieves high-precision planar motion along the X- and Y-axes, a centimeter-level translation range, and a rotational range of 35° around the Z-axis by integrating six variable-diameter flexible helical hinges that serve as rotational joints when actuated by three miniature linear servo drives. The drives are directly connected to the moving platform, thereby enhancing the compactness of the system. A kinematic model of the motion platform was established, and the accuracy and effectiveness of the forward and inverse kinematic solutions were validated using finite element analysis. Finally, a prototype of the 3-PRR parallel platform was fabricated, and its kinematic performance was experimentally verified visually for improved endpoint displacement detection. The assessment results revealed a maximum displacement error of 9.5% and confirmed that, judging by its favorable workspace-to-footprint ratio, the final system is significantly more compact than those reported in the literature.
]]>Micromachines doi: 10.3390/mi15030337
Authors: Jin-Kun Guo W.D.N. Sandaruwan Jinwei Li Jinzhong Ling Ying Yuan Xin Liu Qiang Li Xiaorui Wang
The development of optical and photonic applications using soft-matter droplets holds great scientific and application importance. The machining of droplet structures is expected to drive breakthroughs in advancing frontier applications. This review highlights recent advancements in micro–nanofabrication techniques for soft-matter droplets, encompassing microfluidics, laser injection, and microfluidic 3D printing. The principles, advantages, and weaknesses of these technologies are thoroughly discussed. The review introduces the utilization of a phase separation strategy in microfluidics to assemble complex emulsion droplets and control droplet geometries by adjusting interfacial tension. Additionally, laser injection can take full advantage of the self-assembly properties of soft matter to control the spontaneous organization of internal substructures within droplets, thus providing the possibility of high-precision customized assembly of droplets. Microfluidic 3D printing demonstrates a 3D printing-based method for machining droplet structures. Its programmable nature holds promise for developing device-level applications utilizing droplet arrays. Finally, the review presents novel applications of soft-matter droplets in optics and photonics. The integration of processing concepts from microfluidics, laser micro–nano-machining, and 3D printing into droplet processing, combined with the self-assembly properties of soft materials, may offer novel opportunities for processing and application development.
]]>Micromachines doi: 10.3390/mi15030336
Authors: Shuo Huang Junyong Zeng Wenqi Wang Zhenyu Zhao
Laser-based additive manufacturing has garnered significant attention in recent years as a promising 3D-printing method for fabricating metallic components. However, the surface roughness of additive manufactured components has been considered a challenge to achieving high performance. At present, the average surface roughness (Sa) of AM parts can reach high levels, greater than 50 μm, and a maximum distance between the high peaks and the low valleys of more than 300 μm, which requires post machining. Therefore, laser polishing is increasingly being utilized as a method of surface treatment for metal alloys, wherein the rapid remelting and resolidification during the process significantly alter both the surface quality and subsurface material properties. In this paper, the surface roughness, microstructures, microhardness, and wear resistance of the as-received, continuous wave laser polishing (CWLP), and pulsed laser polishing (PLP) processed samples were investigated systematically. The results revealed that the surface roughness (Sa) of the as-received sample was 6.29 μm, which was reduced to 0.94 μm and 0.84 μm by CWLP and PLP processing, respectively. It was also found that a hardened layer, about 200 μm, was produced on the Ti6Al4V alloy surface after laser polishing, which can improve the mechanical properties of the component. The microhardness of the laser-polished samples was increased to about 482 HV with an improvement of about 25.2% compared with the as-received Ti6Al4V alloy. Moreover, the coefficient of friction (COF) was slightly reduced by both CWLP and LPL processing, and the wear rate of the surface layer was improved to 0.790 mm3/(N∙m) and 0.714 mm3/(N∙m), respectively, under dry fraction conditions.
]]>Micromachines doi: 10.3390/mi15030335
Authors: Jian Wang Junping Duan Xinxin Shen Yongsheng Wang Binzhen Zhang
This paper presents a waveguide Lens antenna at the W-band adopting dual-focusing Lens to improve the performance. The Lens antenna consisted of a waveguide slotted structure and lenses processed using NOA73 meet the demands of miniaturization for current communication systems. The antenna radome fabricated using NOA73 not only protects the antenna structure but also improves the gain of the antenna by about 9.5 dBi via electromagnetic wave dual-focusing. A prototype is fabricated using novel UV-LIGA technology. Measured results are compared with simulated values. Measured results confirmed the fabricated antenna operated in the W-band with a 10 dB fractional bandwidth (FBW) of 6.5% from 97.5 to 104 GHz and a peak gain of 22 dBi at 100 GHz in the direction perpendicular to the plane of the feed waveguide. A good agreement between simulation and measurement is obtained, demonstrating efficient radiations in the operating band.
]]>Micromachines doi: 10.3390/mi15030334
Authors: Hyojung Kim Bong Kyun Kang Cheon Woo Moon
One of the remarkable choices for active smart window technology is adopting a metal active layer via reversible metal electrodeposition (RME). As the metal layer efficiently blocks the solar energy gain, even a hundred-nanometer-thick scale, RME-based smart window has great attention. Recent developments are mainly focused on the various cases of electrolyte components and composition meeting technological standards. As metal nanostructures formed through the RME process involve plasmonic phenomena, advanced analysis, including plasmonic optics, which is beyond Beer–Lambert’s law, should be considered. However, as there is a lack of debates on the plasmonic optics applied to RME smart window technology, as research is mainly conducted through an exhaustive process. In this paper, in order to provide insight into the RME-based smart window development and alleviate the unclear part of plasmonic optics applied to the field, finite-difference time-domain electromagnetic simulations are conducted. In total, two extremely low-quality (Cr) and high-quality (Mg) plasmonic materials based on a nanoparticle array are considered as a metal medium. In addition, optical effects caused by the metal active layer, electrolyte, and nanoparticle embedment are investigated in detail. Overall simulations suggest that the effective refractive index is a decisive factor in the performance of RME-based smart windows.
]]>Micromachines doi: 10.3390/mi15030333
Authors: Jiaxin Jiang Xi Chen Zexing Mei Huatan Chen Junyu Chen Xiang Wang Shufan Li Runyang Zhang Gaofeng Zheng Wenwang Li
Flexible devices have extensive applications in areas including wearable sensors, healthcare, smart packaging, energy, automotive and aerospace sectors, and other related fields. Droplet printing technology can be utilized to print flexible electronic components with micro/nanostructures on various scales, exhibiting good compatibility and wide material applicability for device production. This paper provides a comprehensive review of the current research status of droplet printing technologies and their applications across various domains, aiming to offer a valuable reference for researchers in related areas.
]]>Micromachines doi: 10.3390/mi15030332
Authors: Ding He Zhentao Yu Jie Chen Kaiyuan Du Zhiqiang Zhu Pu Cheng Cheng Tan
Generalized broadband operation facilitates multifunction or multiband highly integrated applications, such as modern transceiver systems, where ultra-wideband bidirectional passive mixers are favored to avoid a complex up/down-conversion scheme. In this paper, a modified Ruthroff-type transmission line transformer (TLT) balun is presented to enhance the isolation of the mixer from the local oscillator (LO) to the radio frequency (RF). Compared to the conventional methods, the proposed Ruthroff-type architecture adopts a combination of shunt capacitors and parallel coupled lines to improve the return loss at the LO port, thus effectively avoiding the area consumption for the diode-to-balun impedance transformation while simultaneously providing a suitable point for IF extraction. In addition, a parallel compensation technique consisting of an inductor and resistor is applied to the RF balun to significantly improve the amplitude/phase balance performance over a wide bandwidth. Benefiting from the aforementioned operations, an isolation-enhanced 8–30 GHz passive double-balanced mixer is designed as a proof-of-principle demonstration via 0.15-micrometer GaAs p-HEMT technology. It exhibits ultra-broadband performance with 7 dB average conversion loss and 50 dB LO-to-RF isolation under 15 dBm LO power. The monolithic microwave integrated circuit area is 0.96 × 1.68 mm2 including all pads.
]]>Micromachines doi: 10.3390/mi15030331
Authors: Xinxin Xing Zhezhe Wang Yude Wang
Detecting environmental contaminants is crucial for protecting ecosystems and human health. While traditional carbon dot (CD) fluorescent probes are versatile, they may suffer from limitations like fluctuations in signal intensity, leading to detection inaccuracies. In contrast, ratiometric fluorescent probes, designed with internal self-calibration mechanisms, offer enhanced sensitivity and reliability. This review focuses on the design and applications of ratiometric fluorescent probes based on CDs for environmental monitoring. Our discussion covers construction strategies, ratiometric fluorescence principles, and applications in detecting various environmental contaminants, including organic pollutants, heavy metal ions, and other substances. We also explore associated advantages and challenges and provide insights into potential solutions and future research directions.
]]>Micromachines doi: 10.3390/mi15030330
Authors: Chenbi Li Xinghuan Chen Zeheng Wang
Due to its excellent material performance, the AlGaN/GaN high-electron-mobility transistor (HEMT) provides a wide platform for biosensing. The high density and mobility of two-dimensional electron gas (2DEG) at the AlGaN/GaN interface induced by the polarization effect and the short distance between the 2DEG channel and the surface can improve the sensitivity of the biosensors. The high thermal and chemical stability can also benefit HEMT-based biosensors’ operation under, for example, high temperatures and chemically harsh environments. This makes creating biosensors with excellent sensitivity, selectivity, reliability, and repeatability achievable using commercialized semiconductor materials. To synthesize the recent developments and advantages in this research field, we review the various AlGaN/GaN HEMT-based biosensors’ structures, operations mechanisms, and applications. This review will help new researchers to learn the basic information about the topic and aid in the development of next-generation of AlGaN/GaN HEMT-based biosensors.
]]>Micromachines doi: 10.3390/mi15030329
Authors: Tianchen Chen Faze Chen
Chemical instability of liquid-repellent surfaces is one of the nontrivial hurdles that hinders their real-world applications. Although much effort has been made to prepare chemically durable liquid-repellent surfaces, little attention has been paid to exploit the instability for versatile use. Herein, we propose to create hydrophilic patterns on a superhydrophobic surface by taking advantage of its chemical instability induced by acid solution treatment. A superhydrophobic Cu(OH)2 nanoneedle-covered Cu plate that shows poor stability towards HCl solution (1.0 M) is taken as an example. The results show that 2.5 min of HCl solution exposure leads to the etching of Cu(OH)2 nanoneedles and the partial removal of the self-assembled fluoroalkyl silane molecular layer, resulting in the wettability transition from superhydrophobocity to hydrophilicity, and the water contact angle decreases from ~160° to ~30°. Hydrophilic dimples with different diameters are then created on the superhydrophobic surfaces by depositing HCl droplets with different volumes. Afterwards, the hydrophilic dimple-patterned superhydrophobic surfaces are used for water droplet manipulations, including controlled transfer, merging, and nanoliter droplet deposition. The results thereby verify the feasibility of creating wettability patterns on superhydrophobic surfaces by using their chemical instability towards corrosive solutions, which broadens the fabrication methods and applications of functional liquid-repellent surfaces.
]]>Micromachines doi: 10.3390/mi15030328
Authors: Seonghyeon Park Byeongwoo Kang Seungwon Lee Jian Cheng Bi Jaewon Park Young Hyun Hwang Jun-Young Park Ha Hwang Young Wook Park Byeong-Kwon Ju
Luminous efficiency is a pivotal factor for assessing the performance of optoelectronic devices, wherein light loss caused by diverse factors is harvested and converted into the radiative mode. In this study, we demonstrate a nanoscale vacuum photonic crystal layer (nVPCL) for light extraction enhancement. A corrugated semi-transparent electrode incorporating a periodic hollow-structure array was designed through a simulation that utilizes finite-difference time-domain computational analysis. The corrugated profile, stemming from the periodic hollow structure, was fabricated using laser interference lithography, which allows the precise engineering of various geometrical parameters by controlling the process conditions. The semi-transparent electrode consisted of a 15 nm thick Ag film, which acted as the exit mirror and induced microcavity resonance. When applied to a conventional green organic light-emitting diode (OLED) structure, the optimized nVPCL-integrated device demonstrated a 21.5% enhancement in external quantum efficiency compared to the reference device. Further, the full width at half maximum exhibited a 27.5% reduction compared to that of the reference device, demonstrating improved color purity. This study presents a novel approach by applying a hybrid thin film electrode design to optoelectronic devices to enhance optical efficiency and color purity.
]]>Micromachines doi: 10.3390/mi15030326
Authors: Donghe Tu Zezheng Li Yuxiang Yin Huan Guan Zhiguo Yu Lifei Tian Lei Jiang Yuntao Li Zhiyong Li Zhongchao Fan
We propose and demonstrate a novel on-chip optical sampling pulse interleaver based on time mode interleaving. The designed pulse interleaver was fabricated on a 220 nm silicon-on-insulator (SOI) platform, utilizing only one S-shaped delay waveguide. Interleaving is achieved by the relative time delay between different optical modes in the waveguide, eliminating the need for any active tuning. The total length of the delay waveguide is 5620.5 µm, which is reduced by a factor of 46.3% compared with previously reported time-wavelength interleaver schemes. The experimental results indicate that the device can convert an optical pulse into a 40 GHz pulse sequence composed of four pulses with a root mean square (RMS) timing error of 0.9 ps, making it well suited for generating high-frequency sampling pulses for optical analog-to-digital converters.
]]>Micromachines doi: 10.3390/mi15030327
Authors: Zhiming Chen
Complementary Metal Oxide Semiconductor (CMOS) and Micro-Electro-Mechanical System (MEMS) devices play significant roles in emerging research fields such as artificial intelligence (AI) [...]
]]>Micromachines doi: 10.3390/mi15030325
Authors: Geun-Soo Lee Jung-Soo Kim Seung-Hyun Kim San Kwak Bumjoo Kim In-Su Kim Sahn Nahm
(K0.5Na0.5)NbO3 (KNN)-based ceramics have been extensively investigated as replacements for Pb(Zr, Ti)O3-based ceramics. KNN-based ceramics exhibit an orthorhombic structure at room temperature and a rhombohedral–orthorhombic (R–O) phase transition temperature (TR–O), orthorhombic–tetragonal (O–T) phase transition temperature (TO–T), and Curie temperature of −110, 190, and 420 °C, respectively. Forming KNN-based ceramics with a multistructure that can assist in domain rotation is one technique for enhancing their piezoelectric properties. This review investigates and introduces KNN-based ceramics with various multistructures. A reactive-templated grain growth method that aligns the grains of piezoceramics in a specific orientation is another approach for improving the piezoelectric properties of KNN-modified ceramics. The piezoelectric properties of the [001]-textured KNN-based ceramics are improved because their microstructures are similar to those of the [001]-oriented single crystals. The improvement in the piezoelectric properties after [001] texturing is largely influenced by the crystal structure of the textured ceramics. In this review, [001]-textured KNN-based ceramics with different crystal structures are investigated and systematically summarized.
]]>Micromachines doi: 10.3390/mi15030324
Authors: Bing Qi Jianhua Cheng Zili Wang Chao Jiang Chun Jia
Because the conventional Temperature Drift Error (TDE) estimation model for Capacitive MEMS Gyros (CMGs) has inadequate Temperature Correlated Quantities (TCQs) and inaccurate parameter identification to improve their bias stability, its novel model based on thermal stress deformation analysis is presented. Firstly, the TDE of the CMG is traced precisely by analyzing its structural deformation under thermal stress, and more key decisive TCQs are explored, including ambient temperature variation ∆T and its square ∆T2, as well its square root ∆T1/2; then, a novel TDE estimation model is established. Secondly, a Radial Basis Function Neural Network (RBFNN) is applied to identify its parameter accurately, which eliminates local optimums of the conventional model based on a Back-Propagation Neural Network (BPNN) to improve bias stability. By analyzing heat conduction between CMGs and the thermal chamber with heat flux analysis, proper temperature control intervals and reasonable temperature control periods are obtained to form a TDE precise test method to avoid time-consuming and expensive experiments. The novel model is implemented with an adequate TCQ and RBFNN, and the Mean Square Deviation (MSD) is introduced to evaluate its performance. Finally, the conventional model and novel model are compared with bias stability. Compared with the conventional model, the novel one improves CMG’s bias stability by 15% evenly. It estimates TDE more precisely to decouple Si-based materials’ temperature dependence effectively, and CMG’s environmental adaptability is enhanced to widen its application under complex conditions.
]]>Micromachines doi: 10.3390/mi15030323
Authors: Fengjie Guo Kui Ma Jingyang Ran Fashun Yang
A novel heat dissipation structure composed of square frustums thermal through silicon via array and embedded in P-type (100) silicon substrate is proposed to improve the heat dissipation capacity of power chips while reducing process difficulty. Based on theoretical analysis, the heat transfer model and thermo-electric coupling reliability model of a power chip with the proposed heat dissipation structure are established. A comparative study of simulation indicates that the proposed heat dissipation structure, which can avoid problems such as softness, poor rigidity, fragility and easy fracture caused by thinning chips has better heat dissipation capability than thinning the substrate of power chips.
]]>Micromachines doi: 10.3390/mi15030322
Authors: Jinyu Wang Ruogu Song Xinyu Li Wencheng Yue Yan Cai Shuxiao Wang Mingbin Yu
Light detection and ranging (LiDAR) is widely used in scenarios such as autonomous driving, imaging, remote sensing surveying, and space communication due to its advantages of high ranging accuracy and large scanning angle. Optical phased array (OPA) has been studied as an important solution for achieving all-solid-state scanning. In this work, the recent research progress in improving the beam steering performance of the OPA based on silicon photonic integrated chips was reviewed. An optimization scheme for aperiodic OPA is proposed.
]]>Micromachines doi: 10.3390/mi15030321
Authors: Pengfei Dai Shaowei Wang Hongliang Lu
With the development of high-voltage and high-frequency switching circuits, GaN high-electron-mobility transistor (HEMT) devices with high bandwidth, high electron mobility, and high breakdown voltage have become an important research topic in this field. It has been found that GaN HEMT devices have a drift in threshold voltage under the conditions of temperature and gate stress changes. Under high-temperature conditions, the difference in gate contact also causes the threshold voltage to shift. The variation in the threshold voltage affects the stability of the device as well as the overall circuit performance. Therefore, in this paper, a review of previous work is presented. Temperature variation, gate stress variation, and gate contact variation are investigated to analyze the physical mechanisms that generate the threshold voltage (VTH) drift phenomenon in GaN HEMT devices. Finally, improvement methods suitable for GaN HEMT devices under high-temperature and high-voltage conditions are summarized.
]]>Micromachines doi: 10.3390/mi15030320
Authors: Jonghyeok Kim Byungjoo Kim Jiyeon Choi Sanghoon Ahn
This research focuses on the manufacturing of a glass interposer that has gone through glass via (TGV) connection holes. Glass has unique properties that make it suitable for 3D integrated circuit (IC) interposers, which include low permittivity, high transparency, and adjustable thermal expansion coefficient. To date, various studies have suggested numerous techniques to generate holes in glass. In this study, we adopt the selective laser etching (SLE) technique. SLE consists of two processes: local modification via an ultrashort pulsed laser and chemical etching. In our previous study, we found that the process speed can be enhanced by changing the local modification method. For further enhancement in the process speed, in this study, we focus on the chemical etching process. In particular, we try to find a proper etchant for TGV formation. Here, four different etchants (HF, KOH, NaOH, and NH4F) are compared in order to improve the etching speed. For a quantitative comparison, we adopt the concept of selectivity. The results show that NH4F has the highest selectivity; therefore, we can tentatively claim that it is a promising candidate etchant for generating TGV. In addition, we also observe a taper angle variation according to the etchant used. The results show that the taper angle of the hole is dependent on the concentration of the etchant as well as the etchant itself. These results may be applicable to various industrial fields that aim to adjust the taper angle of holes.
]]>Micromachines doi: 10.3390/mi15030319
Authors: Junyu Li Jinzhao Li Fei Yi
Infrared polarization imaging holds significant promise for enhancing target recognition in both civil and defense applications. The Division of Focal Plane (DoFP) scheme has emerged as a leading technology in the field of infrared polarization imaging due to its compact design and absence of moving parts. However, traditional DoFP solutions primarily rely on micro-polarizer arrays, necessitating precise alignment with the focal plane array and leading to challenges in alignment and the introduction of optical crosstalk. Recent research has sought to augment the performance of infrared detectors and enable polarization and spectral selection by integrating metamaterial absorbers with the pixels of the detector. Nevertheless, the results reported so far exhibit shortcomings, including low polarization absorption rates and inadequate polarization extinction ratios. Furthermore, there is a need for a comprehensive figure of merit to systematically assess the performance of polarization-selective thermal detectors. In this study, we employ the particle swarm optimization algorithm to present a multilayer, multi-sized metamaterial absorber capable of achieving a remarkable polarization-selective absorption rate of up to 87.2% across the 8–14 μm spectral range. Moreover, we attain a polarization extinction ratio of 38.51. To elucidate and predict the resonant wavelengths of the structure, we propose a modified equivalent circuit model. Our analysis employs optical impedance matching to unveil the underlying mechanisms responsible for the high absorption. We also introduce a comprehensive figure of merit to assess the efficacy of infrared polarization detection through the integration of metamaterials with microbolometers. Finally, drawing on the proposed figure of merit, we suggest future directions for improving integrated metamaterial absorber designs, with the potential to advance practical mid-infrared polarization imaging technologies.
]]>Micromachines doi: 10.3390/mi15030318
Authors: Seong Jae Kang Jun Hyung Jeong Jin Hyun Ma Min Ho Park Hyoun Ji Ha Jung Min Yun Yu Bin Kim Seong Jun Kang
Visible light photodetectors are extensively researched with transparent metal oxide holes/electron layers for various applications. Among the metal oxide transporting layers, nickel oxide (NiO) and zinc oxide (ZnO) are commonly adopted due to their wide band gap and high transparency. The objective of this study was to improve the visible light detection of NiO/ZnO photodiodes by introducing an additional quantum dot (QD) layer between the NiO and ZnO layers. Utilizing the unique property of QDs, we could select different sizes of QDs and responsive light wavelength ranges. The resulting red QDs utilized device that could detect light starting at 635 nm to UV (Ultra-violet) light wavelength and exhibited a photoresponsivity and external quantum efficiency (EQE) of 14.99 mA/W and 2.92% under 635 nm wavelength light illumination, respectively. Additionally, the green QDs, which utilized a device that could detect light starting at 520 nm, demonstrated photoresponsivity values of 8.34 mA/W and an EQE of 1.99% under 520 nm wavelength light illumination, respectively. In addition, we used X-ray photoelectron spectroscopy (XPS) and ultraviolet photoelectron spectroscopy (UPS) to investigate the origin of the photocurrents and the enhancement of the device’s performance. This study suggests that incorporating QDs with metal oxide semiconductors is an effective approach for detecting visible light wavelengths in transparent optoelectronic devices.
]]>Micromachines doi: 10.3390/mi15030317
Authors: Eun-Jeong Kwon Yunyeong Choi Shin Young Kim Seokwoo Park Giae Yun Sei Hong Min Sejoong Kim
We developed a 3D glomeruli tissue chip for glomerulonephritis (GN) testing, featuring a gravity-driven glomerular filtration barrier (GFB) with human podocytes and endothelial cells with a bidirectional flow in the bottom channel. Using puromycin-induced GN, we observed decreased cell viability, increased albumin permeability, and reduced WT1 and nephrin compared to the normal GFB. Tacrolimus restored cell viability, reduced albumin permeability, and increased WT1 expression. Using serum from five membranous nephropathy (MN) patients, we created MN models using a GFB-mimicking chip. A notable decline in cell viability was observed in the serum-induced MN1 and MN2 models. However, tacrolimus restored it. Albumin permeability was reduced in the MN1, MN2, and MN5 models by tacrolimus treatment. MN1 displayed the best clinical response to tacrolimus, exhibiting increased expression of WT1 in chip-based evaluations after tacrolimus treatment. We successfully evaluated the efficacy of tacrolimus using puromycin-induced and serum-induced GN models on a chip that mimicked the structure and function of the GFB. The GFB-mimicking chip holds promise as a personalized platform for assessing drug efficacy using patient serum samples.
]]>Micromachines doi: 10.3390/mi15030316
Authors: Hakin Kim Doohyeok Lim
In this study, we propose doping-less feedback field-effect transistors (DLFBFETs). Our DLFBFETs are 5 nm thick intrinsic semiconductor bodies with dual gates. Usually, DLFBFETs are virtually doped through charge plasma phenomena caused by the source, the drain, and the dual-gate electrodes as well as the gate biases. Our DLFBFETs can be fabricated through a simple process of creating contact between a metal and a silicon body without any doping processes. The voltages applied to both gates determine whether the DLFBFETs operate in diode or feedback field-effect transistor (FBFET) modes. In the FBFET mode, our DLFBFETs show good characteristics such as an on/off current ratio of ~104 and steep switching characteristics (~1 mV/decade of current) that result from positive feedback phenomena without dopants.
]]>Micromachines doi: 10.3390/mi15030315
Authors: Wael Mateur Victor Songmene Jules Kouam
Granite edge finishing through grinding is a common process in the granite processing industry, crucial for achieving the final desired shape and edge quality of products. This study focuses on the granite industry, specifically delving into the significance of grinding and polishing for improving aesthetics and extending material longevity. The experimental design entails a comprehensive factorial experiment plan involving two workpiece materials (white and black granite samples) and two cutting tool edge shapes (chamfer and concave), each with two grit sizes: G150 and G600. The cutting conditions varied and consisted of variations in spindle speeds (1500, 2500, 3500 rpm), feed rates (500, 1000, 1500 mm/min), and lubrication modes (wet/dry). The results uncover intricate relationships among these parameters and part quality, underscoring the pivotal role of tool geometry in achieving superior surface finishes and in controlling the cutting forces. These findings contribute to a nuanced understanding of the dynamic interplay between tool characteristics, material properties, and machining conditions within the granite industry.
]]>Micromachines doi: 10.3390/mi15030314
Authors: Zhen Pan Weijian Wu Jiangtao Zhou Yili Hu Jianping Li Yingting Wang Jijie Ma Jianming Wen
Triboelectric nanogenerators (TENGs) can effectively collect low-frequency, disordered mechanical energy and are therefore widely studied in the field of ocean energy collection. Most of the rotary TENGs studied so far tend to have insufficient rotation, resulting in slow charge transfer rates in low-frequency ocean environments. For this reason, in this paper, we propose a wind-wave synergistic triboelectric nanogenerator (WWS-TENG). It is different from the traditional rotary TENGs based on free-standing mode in that its power generation unit has two types of rotors, and the two rotors rotate in opposite directions under the action of wind energy and wave energy, respectively. This type of exercise can more effectively collect energy. The WWS-TENG has demonstrated excellent performance in sea wind and wave energy harvesting. In the simulated ocean environment, the peak power can reach 13.5 mW under simulated wind-wave superposition excitation; the output of the WWS-TENG increased by 49% compared to single-wave power generation. The WWS-TENG proposal provides a novel means of developing marine renewable energy, and it also demonstrates broad application potential in the field of the self-powered marine Internet of Things (IoT).
]]>Micromachines doi: 10.3390/mi15030313
Authors: Honghong Wang Yi Mao Jingli Du
This article explores the challenges of continuum and magnetic soft robotics for medical applications, extending from model development to an interdisciplinary perspective. First, we established a unified model framework based on algebra and geometry. The research progress and challenges in principle models, data-driven, and hybrid modeling were then analyzed in depth. Simultaneously, a numerical analysis framework for the principle model was constructed. Furthermore, we expanded the model framework to encompass interdisciplinary research and conducted a comprehensive analysis, including an in-depth case study. Current challenges and the need to address meta-problems were identified through discussion. Overall, this review provides a novel perspective on understanding the challenges and complexities of continuum and magnetic soft robotics in medical applications, paving the way for interdisciplinary researchers to assimilate knowledge in this domain rapidly.
]]>Micromachines doi: 10.3390/mi15030312
Authors: Shariq Suleman Nigar Anzar Shikha Patil Shadan Suhel Parvez Manika Khanuja Roberto Pilloton Jagriti Narang
Ketamine is one of the most commonly abused drugs globally, posing a severe risk to social stability and human health, not only it is being used for recreational purposes, but this tasteless, odourless, and colourless drug also facilitates sexual assaults when it is mixed with drinks. Ketamine abuse is a threat for safety, and this misuse is one of the main uses of the drug. The crucial role of ketamine detection is evident in its contributions to forensic investigations, law enforcement, drug control, workplace integrity, and public health. Electrochemical sensors have gained considerable interest among researchers due to their various advantages, such as low cost and specificity, and particularly screen-printed paper-based electrode (SPBE) biosensors have gained attention. Here, we reported an ePAD (electrochemical paper-based analytical device) for detecting the recreational drug ketamine. The advantages of using a paper-based electrode are that it reduces the electrode’s production costs and is disposable and environmentally friendly. At the same time, nanographite sheets (NGSs) assisted in amplifying the signals generated in the cyclic voltammetry system when ketamine was present. This ePAD was developed by immobilizing a ketamine aptamer on NGS electrodes. The characterization of proper synthesized NGSs was performed by Scanning Electron Microscopy (SEM), XRD (X-ray Diffraction), Fourier-transform infrared spectroscopy (FTIR), and UV-Vis spectroscopy. Electrochemical techniques, including cyclic voltammetry (CV) and linear sweep voltammetry (LSV), were employed to validate the results and confirm each attachment. Furthermore, the versatility of the proposed sensor was explored in both alcoholic and non-alcoholic beverages. The developed sensor showed a low LOD of about 0.01 μg/mL, and the linear range was between 0.01 and 5 μg/mL. This approach offers a valid diagnostic technique for onsite service with minimal resources. This cost effective and portable platform offers desirable characteristics like sensitivity and selectivity and can also be used for POC (point of care) testing to help in the quick identification of suspicious samples and for testing at trafficking sites, amusement parks, and by the side of the road.
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