Special Issue "Micro/Nano Fabrication"


A special issue of Micromachines (ISSN 2072-666X).

Deadline for manuscript submissions: closed (31 October 2014)

Special Issue Editor

Guest Editor
Prof. Dr. Cheng Luo
Department of Mechanical & Aerospace Engineering, The University of Texas at Arlington, 500 W First St., Arlington, TX 76019, USA
Website: https://www.uta.edu/mentis/public/#profile/profile/view/id/1927
E-Mail: chengluo@uta.edu
Phone: +1-817-272-7366
Fax: +1-817-272-5010
Interests: MEMS; NEMS; microfluidics; surface wetting; bone implants; energy harvesting; solid mechanics

Special Issue Information

Dear Colleagues,

Lithography originally means the transfer of an image to a surface. Current photolithographic approaches, such as ultra-violet, electron-beam, X-ray and ion-beam, employ light exposure to pattern surfaces. Meanwhile, existing non-photolithographic methods use atomic force microscopes (dip-pen), soft (soft lithography) or hard molds (nanoimprint lithography), for example, to transfer patterns. In addition, non-lithographic approaches (like vapor-solid and vapor-liquid-solid), which do not involve the use of pre-existing images, may also be applied to generate tiny structures, such as nanorods, nanowires and nanotubes. Furthermore, the combination of various methods may create 3-D or hybrid micro/nano structures. This special issue seeks reviews, regular research papers and short communications on: (i) new approaches to fabricate micro/nano structures, and (ii) innovative use of existing techniques to generate new micro/nano structures.

Prof. Dr. Cheng Luo
Guest Editor


Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. Papers will be published continuously (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are refereed through a peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed Open Access quarterly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 500 CHF (Swiss Francs). English correction and/or formatting fees of 250 CHF (Swiss Francs) will be charged in certain cases for those articles accepted for publication that require extensive additional formatting and/or English corrections.


  • micro/nano structures
  • fabrication techniques and methods

Published Papers (4 papers)

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Displaying article 1-4
p. 722-737
by  and
Micromachines 2014, 5(3), 722-737; doi:10.3390/mi5030722
Received: 12 June 2014; in revised form: 18 August 2014 / Accepted: 5 September 2014 / Published: 18 September 2014
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(This article belongs to the Special Issue Micro/Nano Fabrication)
p. 396-407
by , , , ,  and
Micromachines 2014, 5(2), 396-407; doi:10.3390/mi5020396
Received: 5 April 2014; in revised form: 12 June 2014 / Accepted: 13 June 2014 / Published: 24 June 2014
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(This article belongs to the Special Issue Micro/Nano Fabrication)
p. 385-395
by , , ,  and
Micromachines 2014, 5(2), 385-395; doi:10.3390/mi5020385
Received: 31 March 2014; in revised form: 5 June 2014 / Accepted: 6 June 2014 / Published: 20 June 2014
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(This article belongs to the Special Issue Micro/Nano Fabrication)
p. 228-238
by , , , , ,  and
Micromachines 2014, 5(2), 228-238; doi:10.3390/mi5020228
Received: 6 January 2014; in revised form: 15 April 2014 / Accepted: 21 April 2014 / Published: 29 April 2014
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Planned Papers

The below list represents only planned manuscripts. Some of these manuscripts have not been received by the Editorial Office yet. Papers submitted to MDPI journals are subject to peer-review.

Type of Paper: Review
Title: Fabrication of Micro/Nano Structures by Femtosecond Laser Micromachining
Authors: K. M. Tanvir Ahmmed, Colin Grambow and Anne Kietzig
Affiliation: Department of Chemical Engineering, McGill University, 3610 University Street, Montreal, Quebec H3A 0C5, Canada
Abstract: Femtosecond laser micromachining has emerged as a new technique for micro/nano structure fabrication in recent years. It has some profound advantages over other micro/nano fabrication processes. This technique is applicable to nearly all kind of materials in an easy one-step process which is scalable. Much research on femtosecond laser micromachining is carried out to understand the complex ablation mechanism. Recent works are delved into the fabrication of surface structures. From a fabrication point of view, the optimization procedure of surface structuring is difficult due to the high number of processing parameters involved in the machining. Micro/nano structures on materials can take different forms depending on the processing conditions. We reviewed the state-of-the-art knowledge on micro/nano structure fabrication with direct femtosecond laser micromachining. We also included our experimental work on regular pattern fabrication to give a complete picture of micromachining processes. Applications of these surface structures in different fields are also briefly reviewed.

Last update: 21 August 2014

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