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Micromachines 2014, 5(3), 420-431; doi:10.3390/mi5030420

Design and Performance Analysis of Capacitive Micromachined Ultrasonic Transducer Linear Array

1
State Key Laboratory of Precision Measuring Technology and Instruments, MOEMS Education Ministry Key Laboratory, Tianjin University, Tianjin 300072, China
2
National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, North University of China, Taiyuan 030051, China
*
Author to whom correspondence should be addressed.
Received: 2 May 2014 / Revised: 18 June 2014 / Accepted: 26 June 2014 / Published: 3 July 2014
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Abstract

An ultrasonic transducer is a key component to achieve ultrasonic imaging. This paper designs a new type of Microelectromechanical Systems (MEMS) based capacitive ultrasonic transducer and a linear array based on the transducer. Through directivity analysis, it can be found that its directivity is weak due to the small size of the designed transducer, but the directivity of the designed linear array is very strong. In order to further suppress the sidelobe interference and improve the resolution of the imaging system and imaging quality, the Dolph-Chebyshev weighting method and the Taylor weighting method are used to process −40dB sidelobe suppression, and satisfactory results are obtained, which can meet actual requirements. View Full-Text
Keywords: capacitive ultrasonic transducer; linear array; beam directivity; sidelobe suppression capacitive ultrasonic transducer; linear array; beam directivity; sidelobe suppression
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Wang, H.; Wang, X.; He, C.; Xue, C. Design and Performance Analysis of Capacitive Micromachined Ultrasonic Transducer Linear Array. Micromachines 2014, 5, 420-431.

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