Next Article in Journal
Stress-Free Bonding Technology with Pyrex for Highly Integrated 3D Fluidic Microsystems
Next Article in Special Issue
Innovative SU-8 Lithography Techniques and Their Applications
Previous Article in Journal
Multifunctional Material Structures Based on Laser-Etched Carbon Nanotube Arrays
Previous Article in Special Issue
Optimized SU-8 Processing for Low-Cost Microstructures Fabrication without Cleanroom Facilities
Article Menu

Export Article

Open AccessArticle
Micromachines 2014, 5(3), 766-782; https://doi.org/10.3390/mi5030766

SU-8 Photolithography as a Toolbox for Carbon MEMS

Mechanical Engineering Department, Clemson University, 250 Fluor Daniel, Clemson, SC 29634, USA
Received: 26 June 2014 / Revised: 4 September 2014 / Accepted: 9 September 2014 / Published: 22 September 2014
(This article belongs to the Special Issue 15 Years of SU8 as MEMS Material)
View Full-Text   |   Download PDF [2053 KB, uploaded 23 September 2014]   |  

Abstract

The use of SU-8 as precursor for glass-like carbon, or glassy carbon, is presented here. SU-8 carbonizes when subject to high temperature under inert atmosphere. Although epoxy-based precursors can be patterned in a variety of ways, photolithography is chosen due to its resolution and reproducibility. Here, a number of improvements to traditional photolithography are introduced to increase the versatility of the process. The shrinkage of SU-8 during carbonization is then detailed as one of the guidelines necessary to design carbon patterns. A couple of applications—(1) carbon-electrode dielectrophoresis for bioparticle manipulation; and (2) the use of carbon structures as micro-molds are also presented. View Full-Text
Keywords: dielectrophoresis; micromolding; pyrolysis; epoxy; shrinkage; tapered; polymer substrate; grayscale; high aspect ratio; microfluidics dielectrophoresis; micromolding; pyrolysis; epoxy; shrinkage; tapered; polymer substrate; grayscale; high aspect ratio; microfluidics
Figures

Graphical abstract

This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

Supplementary material

SciFeed

Share & Cite This Article

MDPI and ACS Style

Martinez-Duarte, R. SU-8 Photolithography as a Toolbox for Carbon MEMS. Micromachines 2014, 5, 766-782.

Show more citation formats Show less citations formats

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Micromachines EISSN 2072-666X Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top