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Micromachines 2014, 5(3), 408-419; doi:10.3390/mi5030408

Sequential Atmospheric Pressure Plasma-Assisted Laser Ablation of Photovoltaic Cover Glass for Improved Contour Accuracy

1
Laboratory of Laser and Plasma Technologies, University of Applied Sciences and Arts, Von-Ossietzky-Straße 99, 37085 Göttingen, Germany
2
Application Center for Plasma and Photonics, Fraunhofer Institute for Surface Engineering and Thin Films, Von-Ossietzky-Straße 100, 37085 Göttingen, Germany
*
Author to whom correspondence should be addressed.
Received: 28 May 2014 / Revised: 24 June 2014 / Accepted: 26 June 2014 / Published: 2 July 2014
(This article belongs to the Special Issue Laser Micro- and Nano- Processing)
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Abstract

In this paper, we present sequential atmospheric pressure plasma-assisted laser ablation of photovoltaic cover glass. First, glass samples were plasma pre-treated using a hydrogenous plasma process gas in order to accomplish a modification of the near-surface glass network by a chemical reduction and the implantation of hydrogen. As a result, the transmission at a wavelength of 355 nm was reduced by approximately 2% after plasma treatment duration of 60 min. Further, the surface polarity was increased by approximately 78%, indicating an increase of the near-surface index of refraction. Subsequently to the plasma pre-treatment, the samples were laser ablated applying the above-mentioned laser wavelength of a Nd:YAG nanosecond laser. Compared to untreated samples, a significant decrease of the form error by 45% without any mentionable change in the ablation rate was obtained in the case of pre-treated samples. For comparison, the results and findings are discussed with respect to previous work, where the presented plasma-assisted ablation procedure was applied to optical glasses. View Full-Text
Keywords: atmospheric pressure plasma; laser ablation; hybrid ablation; photovoltaic glass; contour accuracy atmospheric pressure plasma; laser ablation; hybrid ablation; photovoltaic glass; contour accuracy
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Gerhard, C.; Dammann, M.; Wieneke, S.; Viöl, W. Sequential Atmospheric Pressure Plasma-Assisted Laser Ablation of Photovoltaic Cover Glass for Improved Contour Accuracy. Micromachines 2014, 5, 408-419.

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