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Search Results (4)

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Keywords = tri-electrode topology

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15 pages, 5121 KiB  
Article
Impact of Solid Materials in the Gap Space between Driving Electrodes in a MEMS Tri-Electrode Electrostatic Actuator
by Mehdi Allameh, Byoungyoul Park and Cyrus Shafai
Sensors 2024, 24(9), 2743; https://doi.org/10.3390/s24092743 - 25 Apr 2024
Cited by 1 | Viewed by 2807
Abstract
MEMS electrostatic actuators can suffer from a high control voltage and a limited displacement range, which are made more prevalent by the pull-in effect. This study explores a tri-electrode topology to enable a reduction in the control voltage and explores the effect of [...] Read more.
MEMS electrostatic actuators can suffer from a high control voltage and a limited displacement range, which are made more prevalent by the pull-in effect. This study explores a tri-electrode topology to enable a reduction in the control voltage and explores the effect of various solid materials forming the space between the two underlying stationary electrodes. Employing solid dielectric material simplifies fabrication and can reduce the bottom primary electrode’s fixed voltage. Through numerical analysis, different materials were examined to assess their impact. The results indicate that the primary electrode’s fixed voltage can be reduced with an increase in the dielectric constant, however, with the consequence of reduced benefit to control voltage reduction. Additionally, charge analysis was conducted to compare the actuator’s performance using air as the gap-spacing material versus solid materials, from the perspective of energy conservation. It was found that solid materials result in a higher accumulated charge, reducing the need for a high fixed voltage. Full article
(This article belongs to the Section Sensor Materials)
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3 pages, 889 KiB  
Abstract
Low-Voltage Tri-Electrode Electrostatic Actuator Using Solid Gap-Spacing Materials
by Mehdi Allameh, Byoungyoul Park and Cyrus Shafai
Proceedings 2024, 97(1), 72; https://doi.org/10.3390/proceedings2024097072 - 21 Mar 2024
Viewed by 973
Abstract
Employing a tri-electrode electrostatic actuator revealed a significant improvement in reducing the controlling voltage. However, the primary electrode fixed voltage can be a few times higher than the conventional topology. In this work, materials with relative permittivity of εr = 4.2, 6.2 [...] Read more.
Employing a tri-electrode electrostatic actuator revealed a significant improvement in reducing the controlling voltage. However, the primary electrode fixed voltage can be a few times higher than the conventional topology. In this work, materials with relative permittivity of εr = 4.2, 6.2 and 10 were explored as the spacing material to reduce the primary voltage, and the results are compared with using air. Simulations showed that the controlling voltage can be reduced more than two times (at εr = 4.2) compared to the conventional topology while the primary electrode voltage required is lower than for air spacing and not more than two times larger than the conventional. Full article
(This article belongs to the Proceedings of XXXV EUROSENSORS Conference)
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5 pages, 959 KiB  
Proceeding Paper
Study of Electrostatic Actuator Voltage Reduction with a Tri-Electrode Actuator with Varying Pull-Down Voltage
by Yu Zhou, Cyrus Shafai, Lot Shafai and Greg Burley
Proceedings 2018, 2(13), 928; https://doi.org/10.3390/proceedings2130928 - 29 Nov 2018
Cited by 1 | Viewed by 1860
Abstract
Employing a tri-electrode topology for electrostatic actuators can significantly reduce needed control voltages. The tri-electrode topology employs a perforated intermediate electrode between the MEMS structure and pull-down electrode, and provides a low voltage control for the MEMS structure. Simulations of a spring supported [...] Read more.
Employing a tri-electrode topology for electrostatic actuators can significantly reduce needed control voltages. The tri-electrode topology employs a perforated intermediate electrode between the MEMS structure and pull-down electrode, and provides a low voltage control for the MEMS structure. Simulations of a spring supported MEMS in a conventional electrostatic actuator offering ~4.5 µm displacement with 20 V on the pull-down electrode, were compared to the tri-electrode actuator. This study showed that the intermediate electrode can act to provide similar controlled displacement with only 1/3 and 1/4 the voltage for the cases with the pull-down electrode held fixed at 20 V and 40 V respectively. A fabricated prototype experimentally showed that the intermediate electrode can provide similar displacement control with only 1/6 the normal control voltage of an electrostatic actuator. Full article
(This article belongs to the Proceedings of EUROSENSORS 2018)
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4 pages, 1029 KiB  
Proceeding Paper
Reduction of Electrostatic Control Voltage with a Tri-Electrode Actuator
by Yu Zhou and Cyrus Shafai
Proceedings 2017, 1(4), 282; https://doi.org/10.3390/proceedings1040282 - 11 Aug 2017
Cited by 3 | Viewed by 2074
Abstract
We present a new tri-electrode topology for reducing the control voltage for electrostatic actuators. Conventional parallel plate actuators are dual-electrode systems, formed by the MEMS structure and the drive electrode. By placing a perforated intermediate electrode between these elements, a tri-electrode configuration is [...] Read more.
We present a new tri-electrode topology for reducing the control voltage for electrostatic actuators. Conventional parallel plate actuators are dual-electrode systems, formed by the MEMS structure and the drive electrode. By placing a perforated intermediate electrode between these elements, a tri-electrode configuration is formed. This topology enables a low voltage on the intermediate electrode to modulate the electrostatic force on the MEMS device, while the higher voltage on the drive electrode remains fixed. Results presented show that in comparison to conventional parallel plate electrostatic actuators, the intermediate electrode’s modulating voltage can be as low as 20% of normal, while still providing the full actuation stroke. Full article
(This article belongs to the Proceedings of Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017)
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