Search Results (7)

This study presents a pneumatic proportional pressure valve employing a silicon microfluidic chip (SMC) integrated with a V-shaped electrothermal microactuator, aiming to address the limitations of traditional solenoid-based valves in miniaturization and high-precision control. The SMC, fabricated via MEMS technology, leverages the thermal expansion of microactuator ribs to regulate pressure through adjustable orifices. A first-order transfer function between input voltage and displacement of the microactuator was derived through theoretical modeling and validated via COMSOL Multiphysics 5.2a simulations. Key geometric parameters of the actuator ribs—cross-section, number, inclination angle, width, span length and thickness—were analyzed for their influence on lever mechanism displacement, actuator displacement, static gain and time constant. AMESim 16.0-based simulations of single- and dual-chip valve structures revealed that increasing ζ shortens step-response rise time, while reducing τ improves hysteresis. Experimental validation confirmed the valve’s static and dynamic performance, achieving a step-response rise time of <40 ms, linearity within the 30–60% input voltage range, and effective tracking of sinusoidal control signals up to 8 Hz with a maximum pressure deviation of 0.015 MPa. The work underscores the potential of MEMS-based actuators in advancing compact pneumatic systems, offering a viable alternative to conventional solenoids. Key innovations include geometry-driven actuator optimization and dual-chip integration, providing insights into high-precision, low-cost pneumatic control solutions. Full article

This paper presents results of the first phase of “Dielectric Elastomer Cooperative Microactuator Systems” (DECMAS), a project within the German Research Foundation Priority Program 2206, “Cooperative Multistable Multistage Microactuator Systems” (KOMMMA). The goal is the development of a soft cooperative microactuator system combining high flexibility with large-stroke/high-frequency actuation and self-sensing capabilities. The softness is due to a completely polymer-based approach using dielectric elastomer membrane structures and a specific silicone bias system designed to achieve large strokes. The approach thus avoids fluidic or pneumatic compo-nents, enabling, e.g., future smart textile applications with cooperative sensing, haptics, and even acoustic features. The paper introduces design concepts and a first soft, single-actuator demonstrator along with experimental characterization, before expanding it to a 3 × 1 system. This system is used to experimentally study coupling effects, supported by finite element and lumped parameter simulations, which represent the basis for future cooperative control methods. Finally, the paper also introduces a new methodology to fabricate metal-based electrodes of sub-micrometer thickness with high membrane-straining capability and extremely low resistance. These electrodes will enable further miniaturization towards future microscale applications. Full article

Pneumatic actuators are of great interest for device miniaturization, microactuators, soft robots, biomedical engineering, and complex control systems. Recently, multi-material actuators have become of high interest to researchers due to their comprehensive range of suitable applications. Three-dimensional (3D) printing of multi-material pneumatic actuators would be the ideal way to fabricate customized actuators, but so far, this is mostly limited to deposition-based methodologies, such as fused deposition modeling (FDM) or Polyjetting. Vat-based stereolithography is one of the most relevant high-resolution 3D printing methods but is only rarely utilized in the multi-material 3D printing of materials. This study demonstrated multi-material stereolithography using combinations of materials with different Young’s moduli, i.e., 0.5 MPa and 1.1 GPa, for manufacturing pneumatic actuators and microactuators with a resolution as small as 200 μm. These multi-material actuators have advantages over single-material actuators in terms of their deformation controllability and ease of assembly. Full article

The compact, simple, and fast-reaction pneumatic microactuator is significant for the integration and high efficiency of pneumatic systems. In this work, the structure, working principle, and multiphysical model of an on-chip pneumatic microactuator are presented. The on-chip pneumatic microactuator is mainly composed of two parts: a polydimethylsiloxane (PDMS) thin membrane and an actuated chamber. The air pressure in the actuated chamber drives the thin elastic membrane to deformation. Dynamic response mathematical models of the actuated chamber for charging and exhaust with variable volume are established, and the deformation characteristics of the polydimethylsiloxane (PDMS) actuated membrane, the capacity of the actuated chamber, and the valve opening of the on-off membrane microvalve are simulated and analyzed to explore the response characteristics of the proposed pneumatic microactuator. Samples valving analysis of the on-chip membrane microvalve and mixing performance of the micromixer integrated with the pneumatic microactuator are tested to evaluate the driving capability of the pneumatic microactuator, and the results show that the response performance of the actuated time fully satisfies the needs of a pneumatic microfluidic chip for most applications. Full article

Electrothermal micromirrors have become an important type of micromirrors due to their large angular scanning range and large linear motion. Typically, electrothermal micromirrors do not have a torsional bar, so they can easily generate linear motion. In this paper, electrothermal micromirrors based on different thermal actuators are reviewed, and also the mechanisms of those actuators are analyzed, including U-shape, chevron, thermo-pneumatic, thermo-capillary and thermal bimorph-based actuation. Special attention is given to bimorph based-electrothermal micromirrors due to their versatility in tip-tilt-piston motion. The exemplified applications of each type of electrothermal micromirrors are also presented. Moreover, electrothermal micromirrors integrated with electromagnetic or electrostatic actuators are introduced. Full article

Microvalves are important flow-control devices in many standalone and integrated microfluidic applications. Polydimethylsiloxane (PDMS)-based pneumatic microvalves are commonly used but they generally require large peripheral connections that decrease portability. There are many alternatives found in the literature that use Si-based microvalves, but variants that can throttle even moderate pressures (1 bar) tend to be bulky (cm-range) or consume high power. This paper details the development of a low-power, normally-open piezoelectric microvalve to control flows with a maximum driving pressure of 1 bar, but also retain a small effective form-factor of 5 mm × 5 mm × 1.8 mm. A novel combination of rapid prototyping methods like stereolithography and laser-cutting have been used to realize this device. The maximum displacement of the fabricated piezoelectric microactuator was measured to be 8.5 μm at 150 V. The fabricated microvalve has a flow range of 0–90 μL min⁻¹ at 1 bar inlet pressure. When fully closed, a leakage of 0.8% open-flow was observed with a power-consumption of 37.5 μW. A flow resolution of 0.2 μL min⁻¹—De-ionized (DI) water was measured at 0.5 bar pressure. Full article

This topical review discusses recent development and trends on scanning micromirrors for biomedical applications. This also includes a biomedical micro robot for precise manipulations in a limited volume. The characteristics of medical scanning micromirror are explained in general with the fundamental of microelectromechanical systems (MEMS) for fabrication processes. Along with the explanations of mechanism and design, the principle of actuation are provided for general readers. In this review, several testing methodology and examples are described based on many types of actuators, such as, electrothermal actuators, electrostatic actuators, electromagnetic actuators, pneumatic actuators, and shape memory alloy. Moreover, this review provides description of the key fabrication processes and common materials in order to be a basic guideline for selecting micro-actuators. With recent developments on scanning micromirrors, performances of biomedical application are enhanced for higher resolution, high accuracy, and high dexterity. With further developments on integrations and control schemes, MEMS-based scanning micromirrors would be able to achieve a better performance for medical applications due to small size, ease in microfabrication, mass production, high scanning speed, low power consumption, mechanical stable, and integration compatibility. Full article