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Open AccessArticle

Proportional Microvalve Using a Unimorph Piezoelectric Microactuator

Department of Precision and Microsystems Engineering, Delft University of Technology, 2628 CD Delft, The Netherlands
Author to whom correspondence should be addressed.
Micromachines 2020, 11(2), 130; (registering DOI)
Received: 8 December 2019 / Revised: 17 January 2020 / Accepted: 20 January 2020 / Published: 24 January 2020
(This article belongs to the Special Issue MFHS 2019)
Microvalves are important flow-control devices in many standalone and integrated microfluidic applications. Polydimethylsiloxane (PDMS)-based pneumatic microvalves are commonly used but they generally require large peripheral connections that decrease portability. There are many alternatives found in the literature that use Si-based microvalves, but variants that can throttle even moderate pressures (1) tend to be bulky (cm-range) or consume high power. This paper details the development of a low-power, normally-open piezoelectric microvalve to control flows with a maximum driving pressure of 1, but also retain a small effective form-factor of 5x5x1.8. A novel combination of rapid prototyping methods like stereolithography and laser-cutting have been used to realize this device. The maximum displacement of the fabricated piezoelectric microactuator was measured to be 8.5 at 150. The fabricated microvalve has a flow range of 0–90 at 1 inlet pressure. When fully closed, a leakage of 0.8 open-flow was observed with a power-consumption of 37.5. A flow resolution of 0.2— De-ionized (DI) water was measured at 0.5 pressure.
Keywords: microvalve, microactuator, piezoelectric, unimorph, stereolithography, 3D-printing microvalve, microactuator, piezoelectric, unimorph, stereolithography, 3D-printing
MDPI and ACS Style

Gunda, A.; Özkayar, G.; Tichem, M.; Ghatkesar, A.M.K. Proportional Microvalve Using a Unimorph Piezoelectric Microactuator. Micromachines 2020, 11, 130.

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