Search for Articles:
Title / Keyword
Author / Affiliation / Email
Journal
Article Type
 
 
Advanced Search
 
Section
Special Issue
Volume
Issue
Number
Page
 

Saved Queries

Sign in to use this feature.

Search Filter Reset All

Years

Between: -

Subjects

remove_circle_outline
remove_circle_outline
remove_circle_outline
remove_circle_outline
Add Subjects Reset
Select Subjects

Journals

remove_circle_outline
remove_circle_outline
remove_circle_outline
Add Journals Reset
Select Journals

Article Types

remove_circle_outline
remove_circle_outline
Add Article Types Reset
Select Article Types

Countries / Regions

remove_circle_outline
remove_circle_outline
Add Countries / Regions Reset
Select Countries / Regions
Update Search
share announcement

Search Results (6)

Search Parameters:
Keywords = optical fiber MEMS F-P pressure sensor

Order results
Result details
Results per page
Show export options expand_more Show export options expand_less
Select all
Export citation of selected articles as:
18 pages, 6196 KiB  
Article
Optical Fiber Pressure Sensor with Self-Temperature Compensation Structure Based on MEMS for High Temperature and High Pressure Environment
by Ke Li, Yongjie Wang, Gaochao Li, Zhen Xu, Yuanyuan Liu, Ancun Shi, Xiaoyan Yu and Fang Li
Photonics 2025, 12(3), 258; https://doi.org/10.3390/photonics12030258 - 13 Mar 2025
Viewed by 774
Abstract
To meet the pressure measurement requirements of deep earth exploration, we propose an OFPS (optical fiber pressure sensor) with self-temperature compensation based on MEMS technology. A spectral extraction and filtering algorithm, based on FFT (fast Fourier transform), was designed to independently demodulate the [...] Read more.
To meet the pressure measurement requirements of deep earth exploration, we propose an OFPS (optical fiber pressure sensor) with self-temperature compensation based on MEMS technology. A spectral extraction and filtering algorithm, based on FFT (fast Fourier transform), was designed to independently demodulate the composite spectra of multiple FP (Fabry–Pérot) cavities, enabling the simultaneous measurement of pressure and temperature parameters. The sensor was fabricated by etching on an SOI (silicon on insulator) and bonding with glass to form pressure-sensitive FP cavities, with the glass itself serving as the temperature-sensitive component as well as providing temperature compensation for pressure sensing. Experimental results showed that within the pressure range of 0–100 MPa, the sensor exhibited a sensitivity of 0.566 nm/MPa, with a full-scale error of 0.34%, and a linear fitting coefficient (R2) greater than 0.9999. Within the temperature range of 0–160 °C, the temperature sensitivity of the glass cavity is 0.0139 nm/°C and R2 greater than 0.999. Full article
(This article belongs to the Special Issue Emerging Trends in Spectral Analysis with Optical Sensors: Modern Approaches and Applications)
►▼ Show Figures

Figure 1

13 pages, 7051 KiB  
Article
A Five-Hole Pressure Probe Based on Integrated MEMS Fiber-Optic Fabry-Perot Sensors
by Yumiao Song, Shuanghui Ma, Jichun Zhao, Jia Liu, Jingyi Wang and Yongjun Cui
Micromachines 2024, 15(4), 554; https://doi.org/10.3390/mi15040554 - 22 Apr 2024
Cited by 2 | Viewed by 3504
Abstract
The five-hole pressure probe based on Micro-Electro-Mechanical Systems (MEMS) technology is designed to meet the needs of engine inlet pressure measurement. The probe, including a pressure-sensitive detection unit and a five-hole probe encapsulation structure, combines the advantages of a five-hole probe with fiber [...] Read more.
The five-hole pressure probe based on Micro-Electro-Mechanical Systems (MEMS) technology is designed to meet the needs of engine inlet pressure measurement. The probe, including a pressure-sensitive detection unit and a five-hole probe encapsulation structure, combines the advantages of a five-hole probe with fiber optic sensing. The pressure-sensitive detection unit utilizes silicon-glass anodic bonding to achieve the integrated and batch-producible manufacturing of five pressure-sensitive Fabry–Perot (FP) cavities. The probe structure and parameters of the sensitive unit were optimized based on fluid and mechanical simulations. The non-scanning correlation demodulation technology was applied to extract specific cavity lengths from multiple interference surfaces. The sealing platform was established to analyze the sealing performance of the five-hole probe and the pressure-sensitive detection unit. The testing platform was established to test the pressure response characteristics of the probe. Experimental results indicate that the probe has good sealing performance between different air passages, making it suitable for detecting pressure from multiple directions. The pressure responses are linear within the range of 0–250 kPa, with the average pressure sensitivity of the five sensors ranging from 11.061 to 11.546 nm/kPa. The maximum non-linear error is ≤1.083%. Full article
(This article belongs to the Special Issue Micro/Nano Sensors: Fabrication and Applications)
►▼ Show Figures

Figure 1

18 pages, 10794 KiB  
Review
Recent Progress in MEMS Fiber-Optic Fabry–Perot Pressure Sensors
by Ye Chen, Dongqin Lu, Huan Xing, Haotian Ding, Junxian Luo, Hanwen Liu, Xiangxu Kong and Fei Xu
Sensors 2024, 24(4), 1079; https://doi.org/10.3390/s24041079 - 7 Feb 2024
Cited by 18 | Viewed by 5197
Abstract
Pressure sensing plays an important role in many industrial fields; conventional electronic pressure sensors struggle to survive in the harsh environment. Recently microelectromechanical systems (MEMS) fiber-optic Fabry–Perot (FP) pressure sensors have attracted great interest. Here we review the basic principles of MEMS fiber-optic [...] Read more.
Pressure sensing plays an important role in many industrial fields; conventional electronic pressure sensors struggle to survive in the harsh environment. Recently microelectromechanical systems (MEMS) fiber-optic Fabry–Perot (FP) pressure sensors have attracted great interest. Here we review the basic principles of MEMS fiber-optic FP pressure sensors and then discuss the sensors based on different materials and their industrial applications. We also introduce recent progress, such as two-photon polymerization-based 3D printing technology, and the state-of-the-art in this field, e.g., sapphire-based sensors that work up to 1200 °C. Finally, we discuss the limitations and opportunities for future development. Full article
(This article belongs to the Special Issue Advanced Optical Sensors Based on Machine Learning)
►▼ Show Figures

Figure 1

14 pages, 26542 KiB  
Article
Research on Temperature Compensation of Optical Fiber MEMS Pressure Sensor Based on Conversion Method
by Guozhen Yao, Yongqian Li, Qiufeng Shang and Hanbai Fan
Photonics 2023, 10(1), 22; https://doi.org/10.3390/photonics10010022 - 25 Dec 2022
Cited by 4 | Viewed by 2395
Abstract
The characteristics of optical fiber MEMS pressure sensors are easily affected by temperature, so effective temperature compensation can improve the accuracy of the sensor. In this paper, the temperature characteristics of optical fiber MEMS pressure sensors are studied, and a temperature compensation method [...] Read more.
The characteristics of optical fiber MEMS pressure sensors are easily affected by temperature, so effective temperature compensation can improve the accuracy of the sensor. In this paper, the temperature characteristics of optical fiber MEMS pressure sensors are studied, and a temperature compensation method by converting the wavelength is proposed. The influence of target temperature and data point selection on the compensation effect is studied, and the effectiveness of the method is verified by the temperature compensation of sensors before and after aging. When the converted target temperature is 25 °C, the pressure measurement accuracy of the sensor is improved from 1.98% F.S. to 0.38% F.S. within the range of 5–45 and 0–4 MPa. The method proposed in this paper can not only improve the accuracy but also make the regular calibration more operable. Full article
(This article belongs to the Special Issue Fiber Optics and Its Applications)
►▼ Show Figures

Figure 1

14 pages, 3166 KiB  
Article
A Compact Optical MEMS Pressure Sensor Based on Fabry–Pérot Interference
by Yonghong Qi, Minghui Zhao, Bo Li, Ziming Ren, Bing Li and Xueyong Wei
Sensors 2022, 22(5), 1973; https://doi.org/10.3390/s22051973 - 3 Mar 2022
Cited by 11 | Viewed by 4587
Abstract
Pressure sensors have important prospects in wind pressure monitoring of transmission line towers. Optical pressure sensors are more suitable for transmission line towers due to its anti-electromagnetic interference. However, the fiber pressure sensor is not a suitable choice due to expensive and bulky. [...] Read more.
Pressure sensors have important prospects in wind pressure monitoring of transmission line towers. Optical pressure sensors are more suitable for transmission line towers due to its anti-electromagnetic interference. However, the fiber pressure sensor is not a suitable choice due to expensive and bulky. In this paper, a compact optical Fabry–Pérot (FP) pressure sensor for wind pressure measurement was developed by MEMS technology. The pressure sensor consists of a MEMS sensing chip, a vertical-cavity surface-emitting laser (Vcsel), and a photodiode (PD). The sensing chip is combined with an FP cavity and a pressure sensing diaphragm which adopts the square film and is fabricated by Silicon on Insulator (SOI) wafer. To calibrate the pressure sensor, the experimental platform which consists of a digital pressure gauge, a pressure loading machine, a digital multimeter, and a laser driver was set up. The experimental results show that the sensitivity of the diaphragm is 117.5 nm/kPa. The measurement range and sensitivity of the pressure sensor are 0–700 Pa and 115 nA/kPa, respectively. The nonlinearity, repeatability, and hysteresis of the pressure sensor are 1.48%FS, 2.23%FS, and 1.59%FS, respectively, which lead to the pressure accuracy of 3.12%FS. Full article
(This article belongs to the Section Optical Sensors)
►▼ Show Figures

Figure 1

10 pages, 5426 KiB  
Article
Low-Cost, High-Performance Fiber Optic Fabry–Perot Sensor for Ultrasonic Wave Detection
by Haoyong Li, Delin Li, Chaoyu Xiong, Wenrong Si, Chenzhao Fu, Peng Yuan and Yiting Yu
Sensors 2019, 19(2), 406; https://doi.org/10.3390/s19020406 - 19 Jan 2019
Cited by 33 | Viewed by 5792
Abstract
This study describes a novel fiber optic extrinsic Fabry–Perot interferometric (EFPI) ultrasonic sensor comprising a low-cost and high-performance silicon diaphragm. A vibrating diaphragm, 5 μm thick, was fabricated by using the Microelectromechanical Systems (MEMS) processing technology on a silicon-on-insulator (SOI) wafer. The Fabry–Perot [...] Read more.
This study describes a novel fiber optic extrinsic Fabry–Perot interferometric (EFPI) ultrasonic sensor comprising a low-cost and high-performance silicon diaphragm. A vibrating diaphragm, 5 μm thick, was fabricated by using the Microelectromechanical Systems (MEMS) processing technology on a silicon-on-insulator (SOI) wafer. The Fabry–Perot (FP) cavity length was solely determined during the manufacturing process of the diaphragm by defining a specific stepped hole on the handling layer of the SOI wafer, which made the assembly of the sensor easier. In addition, the use of cheap and commercially available components and MEMS processing technology in the development of the sensing system, limited the cost of the sensor. The experimental tests showed that the minimum detectable ultrasonic pressure was 1.5 mPa/sqrt(Hz) −0.625 mPa/sqrt(Hz) between 20 kHz and 40 kHz. As a result, this sensor has the potential to successfully detect weak ultrasonic signals. Full article
(This article belongs to the Section Physical Sensors)
►▼ Show Figures

Figure 1

Show export options expand_more Show export options expand_less
Select all
Export citation of selected articles as:
 
Displaying article 1-50 on page 1 of 1.
Back to TopTop