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Keywords = micromachined electrostatically suspended gyroscope

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19 pages, 5683 KiB  
Article
Analysis and Compensation of Bias Drift for a Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension
by Shunyue Wang and Fengtian Han
Sensors 2020, 20(6), 1799; https://doi.org/10.3390/s20061799 - 24 Mar 2020
Cited by 3 | Viewed by 4439
Abstract
Bias stability is one of primary characteristics of precise gyroscopes for inertial navigation. Analysis of various sources of the bias drift in a micromachined electrostatically suspended gyroscope (MESG) indicates that the bias stability is dominated by the temperature-induced drift. The analytical results of [...] Read more.
Bias stability is one of primary characteristics of precise gyroscopes for inertial navigation. Analysis of various sources of the bias drift in a micromachined electrostatically suspended gyroscope (MESG) indicates that the bias stability is dominated by the temperature-induced drift. The analytical results of temperature drift resulting from the rotor structure and capacitive position sensing electronics are modeled and analyzed to characterize the drift mechanism of the MESG. The experimental results indicate that the bias drift is mainly composed of two components, i.e., rapidly changing temperature drift and slowly changing time drift. Both the short-term and long-term bias drift of the MESG are tested and discussed to achieve online bias compensation. Finally, a neural network based-bias compensation scheme is presented and verified experimentally with improved bias stability of the MESG. Full article
(This article belongs to the Section Electronic Sensors)
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12 pages, 3029 KiB  
Article
Spin Rate Effects in a Micromachined Electrostatically Suspended Gyroscope
by Boqian Sun, Shunyue Wang, Yidong Tan, Yunfeng Liu and Fengtian Han
Sensors 2018, 18(11), 3901; https://doi.org/10.3390/s18113901 - 12 Nov 2018
Cited by 1 | Viewed by 3932
Abstract
Spin rate of a high-speed spinning-rotor gyroscope will make a significant impact on angular rate sensor performances such as the scale factor, resolution, measurement range, and bias stability. This paper presents the spin rate effects on performance indicators of a microelectromechanical systems (MEMS) [...] Read more.
Spin rate of a high-speed spinning-rotor gyroscope will make a significant impact on angular rate sensor performances such as the scale factor, resolution, measurement range, and bias stability. This paper presents the spin rate effects on performance indicators of a microelectromechanical systems (MEMS) gyroscope where a free-spinning rotor is electrostatically suspended in an evacuated vacuum cavity and functions as a dual-axis angular rate sensor. Theoretical models of the scale factor and measurement range of such a spinning-rotor gyroscope are derived. The experimental results indicate that the measured scale factors at different settings of the spin rate match well with the theoretical predication. In order to separate the disturbance component of the rotation control loop on the gyroscope output, a testing strategy is proposed by operating the gyroscope at different spin rates. Experimental results on a prototype gyroscope show that the squared drive voltage generated by the rotation control loop is approximately proportional to the noise of the gyroscope output. It was further investigated that an improved performance of such spinning-rotor gyroscopes can be achieved by operating the gyroscope rotor at an optimal spin rate. Full article
(This article belongs to the Special Issue Gyroscopes and Accelerometers)
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14 pages, 3291 KiB  
Article
Decoupling Control of Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension
by Boqian Sun, Shunyue Wang, Haixia Li and Xiaoxia He
Sensors 2016, 16(10), 1747; https://doi.org/10.3390/s16101747 - 20 Oct 2016
Cited by 11 | Viewed by 6829
Abstract
A micromachined gyroscope in which a high-speed spinning rotor is suspended electrostatically in a vacuum cavity usually functions as a dual-axis angular rate sensor. An inherent coupling error between the two sensing axes exists owing to the angular motion of the spinning rotor [...] Read more.
A micromachined gyroscope in which a high-speed spinning rotor is suspended electrostatically in a vacuum cavity usually functions as a dual-axis angular rate sensor. An inherent coupling error between the two sensing axes exists owing to the angular motion of the spinning rotor being controlled by a torque-rebalance loop. In this paper, a decoupling compensation method is proposed and investigated experimentally based on an electrostatically suspended micromachined gyroscope. In order to eliminate the negative spring effect inherent in the gyroscope dynamics, a stiffness compensation scheme was utilized in design of the decoupled rebalance loop to ensure loop stability and increase suspension stiffness. The experimental results show an overall stiffness increase of 30.3% after compensation. A decoupling method comprised of inner- and outer-loop decoupling compensators is proposed to minimize the cross-axis coupling error. The inner-loop decoupling compensator aims to attenuate the angular position coupling. The experimental frequency response shows a position coupling attenuation by 14.36 dB at 1 Hz. Moreover, the cross-axis coupling between the two angular rate output signals can be attenuated theoretically from −56.2 dB down to −102 dB by further appending the outer-loop decoupling compensator. The proposed dual-loop decoupling compensation algorithm could be applied to other dual-axis spinning-rotor gyroscopes with various suspension solutions. Full article
(This article belongs to the Section Physical Sensors)
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80 pages, 5842 KiB  
Review
The Development of Micromachined Gyroscope Structure and Circuitry Technology
by Dunzhu Xia, Cheng Yu and Lun Kong
Sensors 2014, 14(1), 1394-1473; https://doi.org/10.3390/s140101394 - 14 Jan 2014
Cited by 202 | Viewed by 29432
Abstract
This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes [...] Read more.
This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs), magnetically suspended gyroscopes (MSGs), micro fiber optic gyroscopes (MFOGs), micro fluid gyroscopes (MFGs), micro atom gyroscopes (MAGs), and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail. Full article
(This article belongs to the Section Physical Sensors)
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