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Keywords = micro gyroscope

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23 pages, 1475 KiB  
Article
Learning Online MEMS Calibration with Time-Varying and Memory-Efficient Gaussian Neural Topologies
by Danilo Pietro Pau, Simone Tognocchi and Marco Marcon
Sensors 2025, 25(12), 3679; https://doi.org/10.3390/s25123679 - 12 Jun 2025
Viewed by 2894
Abstract
This work devised an on-device learning approach to self-calibrate Micro-Electro-Mechanical Systems-based Inertial Measurement Units (MEMS-IMUs), integrating a digital signal processor (DSP), an accelerometer, and a gyroscope in the same package. The accelerometer and gyroscope stream their data in real time to the DSP, [...] Read more.
This work devised an on-device learning approach to self-calibrate Micro-Electro-Mechanical Systems-based Inertial Measurement Units (MEMS-IMUs), integrating a digital signal processor (DSP), an accelerometer, and a gyroscope in the same package. The accelerometer and gyroscope stream their data in real time to the DSP, which runs artificial intelligence (AI) workloads. The real-time sensor data are subject to errors, such as time-varying bias and thermal stress. To compensate for these drifts, the traditional calibration method based on a linear model is applicable, and unfortunately, it does not work with nonlinear errors. The algorithm devised by this study to reduce such errors adopts Radial Basis Function Neural Networks (RBF-NNs). This method does not rely on the classical adoption of the backpropagation algorithm. Due to its low complexity, it is deployable using kibyte memory and in software runs on the DSP, thus performing interleaved in-sensor learning and inference by itself. This avoids using any off-package computing processor. The learning process is performed periodically to achieve consistent sensor recalibration over time. The devised solution was implemented in both 32-bit floating-point data representation and 16-bit quantized integer version. Both of these were deployed into the Intelligent Sensor Processing Unit (ISPU), integrated into the LSM6DSO16IS Inertial Measurement Unit (IMU), which is a programmable 5–10 MHz DSP on which the programmer can compile and execute AI models. It integrates 32 KiB of program RAM and 8 KiB of data RAM. No permanent memory is integrated into the package. The two (fp32 and int16) RBF-NN models occupied less than 21 KiB out of the 40 available, working in real-time and independently in the sensor package. The models, respectively, compensated between 46% and 95% of the accelerometer measurement error and between 32% and 88% of the gyroscope measurement error. Finally, it has also been used for attitude estimation of a micro aerial vehicle (MAV), achieving an error of only 2.84°. Full article
(This article belongs to the Special Issue Sensors and IoT Technologies for the Smart Industry)
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24 pages, 10171 KiB  
Article
Analysis of Skidding Characteristics of Solid-Lubricated Angular Contact Ball Bearings During Acceleration
by Shijie Zhang, Yuhao Zhao, Jing Wei and Yanyang Zi
Lubricants 2025, 13(5), 218; https://doi.org/10.3390/lubricants13050218 - 14 May 2025
Viewed by 483
Abstract
Solid-lubricated rolling bearings are widely used in the aerospace field and are key components to support spacecraft rotors. During the start-up of the engine, the sharp acceleration may cause bearing skidding, resulting in damage of the solid lubricating film and a reduction in [...] Read more.
Solid-lubricated rolling bearings are widely used in the aerospace field and are key components to support spacecraft rotors. During the start-up of the engine, the sharp acceleration may cause bearing skidding, resulting in damage of the solid lubricating film and a reduction in the remaining useful life of the bearing. However, the existing research on the tribo-dynamic responses of solid-lubricated ball bearings mostly relies on semi-empirical tribological models, which are limited in their ability to reveal the micro–macro sliding mechanisms of the ball–raceway contact interface. In this paper, a novel tribo-dynamic model for solid-lubricated angular contact ball bearings is developed by applying Kalker’s rolling contact theory to the Gupta dynamic model. The interpolation method is adopted to calculate contact parameters to improve the model’s efficiency. Using the proposed model, the dynamic response of the bearing in the acceleration process is studied, and the mechanism and influence characteristics of skidding, over-skidding, and creepage of the rolling element are analyzed. The results show that the main reason for skidding is that the traction force is not enough to overcome the resistance, and the gyroscopic effect is the main cause of over-skidding, which follows the principle of conservation of the angular momentum of the ball. Full article
(This article belongs to the Special Issue Tribological Characteristics of Bearing System, 3rd Edition)
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19 pages, 11821 KiB  
Article
Bias Estimation for Low-Cost IMU Including X- and Y-Axis Accelerometers in INS/GPS/Gyrocompass
by Gen Fukuda and Nobuaki Kubo
Sensors 2025, 25(5), 1315; https://doi.org/10.3390/s25051315 - 21 Feb 2025
Viewed by 1990
Abstract
Inertial navigation systems (INSs) provide autonomous position estimation capabilities independent of global navigation satellite systems (GNSSs). However, the high cost of traditional sensors, such as fiber-optic gyroscopes (FOGs), limits their widespread adoption. In contrast, micro-electromechanical system (MEMS)-based inertial measurement units (IMUs) offer a [...] Read more.
Inertial navigation systems (INSs) provide autonomous position estimation capabilities independent of global navigation satellite systems (GNSSs). However, the high cost of traditional sensors, such as fiber-optic gyroscopes (FOGs), limits their widespread adoption. In contrast, micro-electromechanical system (MEMS)-based inertial measurement units (IMUs) offer a low-cost alternative; however, their lower accuracy and sensor bias issues, particularly in maritime environments, remain considerable obstacles. This study proposes an improved method for bias estimation by comparing the estimated values from a trajectory generator (TG)-based acceleration and angular-velocity estimation system with actual measurements. Additionally, for X- and Y-axis accelerations, we introduce a method that leverages the correlation between altitude differences derived from an INS/GNSS/gyrocompass (IGG) and those obtained during the TG estimation process to estimate the bias. Simulation datasets from experimental voyages validate the proposed method by evaluating the mean, median, normalized cross-correlation, least squares, and fast Fourier transform (FFT). The Butterworth filter achieved the smallest angular-velocity bias estimation error. For X- and Y-axis acceleration bias, altitude-based estimation achieved differences of 1.2 × 10−2 m/s2 and 1.0 × 10−4 m/s2, respectively, by comparing the input bias using 30 min data. These methods enhance the positioning and attitude estimation accuracy of low-cost IMUs, providing a cost-effective maritime navigation solution. Full article
(This article belongs to the Special Issue INS/GNSS Integrated Navigation Systems)
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18 pages, 4880 KiB  
Article
Design, Analysis, and Simulation of a MEMS Tuning Fork Gyroscope with a Mechanical Amplification Structure
by Haotian Hu, Benedetta Calusi, Alvise Bagolini and Maria F. Pantano
Micromachines 2025, 16(2), 195; https://doi.org/10.3390/mi16020195 - 8 Feb 2025
Viewed by 3424
Abstract
This paper describes a novel micro-electro-mechanical system (MEMS) tuning fork gyroscope (TFG) design that employs a chevron-shaped displacement mechanism to amplify the displacement generated by the Coriolis force, thereby increasing the TFG’s mechanical sensitivity. This approach was evaluated using both theoretical modeling and [...] Read more.
This paper describes a novel micro-electro-mechanical system (MEMS) tuning fork gyroscope (TFG) design that employs a chevron-shaped displacement mechanism to amplify the displacement generated by the Coriolis force, thereby increasing the TFG’s mechanical sensitivity. This approach was evaluated using both theoretical modeling and finite element analysis (FEA), and the results showed a high degree of agreement between the two methods. A conventional TFG having a comparable area was also designed and analyzed for comparison purposes. By introducing the displacement amplification mechanism, the proposed MEMS TFG design provides an output displacement about 2.5 times higher than the conventional design, according to the computation, without increasing the device footprint. Theoretical analysis and FEA on the TFG with amplification and a conventional TFG confirmed that the amplified displacement significantly improves the mechanical sensitivity of the gyroscope compared to conventional TFG designs. Full article
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20 pages, 18281 KiB  
Article
IMU Sensor-Based Worker Behavior Recognition and Construction of a Cyber–Physical System Environment
by Sehwan Park, Minkyo Youm and Junkyeong Kim
Sensors 2025, 25(2), 442; https://doi.org/10.3390/s25020442 - 13 Jan 2025
Cited by 3 | Viewed by 1796
Abstract
According to South Korea’s Ministry of Employment and Labor, approximately 25,000 construction workers suffered from various injuries between 2015 and 2019. Additionally, about 500 fatalities occur annually, and multiple studies are being conducted to prevent these accidents and quickly identify their occurrence to [...] Read more.
According to South Korea’s Ministry of Employment and Labor, approximately 25,000 construction workers suffered from various injuries between 2015 and 2019. Additionally, about 500 fatalities occur annually, and multiple studies are being conducted to prevent these accidents and quickly identify their occurrence to secure the golden time for the injured. Recently, AI-based video analysis systems for detecting safety accidents have been introduced. However, these systems are limited to areas where CCTV is installed, and in locations like construction sites, numerous blind spots exist due to the limitations of CCTV coverage. To address this issue, there is active research on the use of MEMS (micro-electromechanical systems) sensors to detect abnormal conditions in workers. In particular, methods such as using accelerometers and gyroscopes within MEMS sensors to acquire data based on workers’ angles, utilizing three-axis accelerometers and barometric pressure sensors to improve the accuracy of fall detection systems, and measuring the wearer’s gait using the x-, y-, and z-axis data from accelerometers and gyroscopes are being studied. However, most methods involve use of MEMS sensors embedded in smartphones, typically attaching the sensors to one or two specific body parts. Therefore, in this study, we developed a novel miniaturized IMU (inertial measurement unit) sensor that can be simultaneously attached to multiple body parts of construction workers (head, body, hands, and legs). The sensor integrates accelerometers, gyroscopes, and barometric pressure sensors to measure various worker movements in real time (e.g., walking, jumping, standing, and working at heights). Additionally, incorporating PPG (photoplethysmography), body temperature, and acoustic sensors, enables the comprehensive observation of both physiological signals and environmental changes. The collected sensor data are preprocessed using Kalman and extended Kalman filters, among others, and an algorithm was proposed to evaluate workers’ safety status and update health-related data in real time. Experimental results demonstrated that the proposed IMU sensor can classify work activities with over 90% accuracy even at a low sampling rate of 15 Hz. Furthermore, by integrating internal filtering, communication modules, and server connectivity within an application, we established a cyber–physical system (CPS), enabling real-time monitoring and immediate alert transmission to safety managers. Through this approach, we verified improved performance in terms of miniaturization, measurement accuracy, and server integration compared to existing commercial sensors. Full article
(This article belongs to the Special Issue Sensor-Based Human Activity Recognition)
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15 pages, 14093 KiB  
Article
Integrating Multiple Hierarchical Parameters to Achieve the Self-Compensation of Scale Factor in a Micro-Electromechanical System Gyroscope
by Rui Zhou, Rang Cui, Daren An, Chong Shen, Yu Bai and Huiliang Cao
Micromachines 2024, 15(11), 1385; https://doi.org/10.3390/mi15111385 - 16 Nov 2024
Cited by 1 | Viewed by 2354
Abstract
The scale factor of thermal sensitivity serves as a crucial performance metric for micro-electromechanical system (MEMS) gyroscopes, and is commonly employed to assess the temperature stability of inertial sensors. To improve the temperature stability of the scale factor of MEMS gyroscopes, a self-compensation [...] Read more.
The scale factor of thermal sensitivity serves as a crucial performance metric for micro-electromechanical system (MEMS) gyroscopes, and is commonly employed to assess the temperature stability of inertial sensors. To improve the temperature stability of the scale factor of MEMS gyroscopes, a self-compensation method is proposed. This is achieved by integrating the primary and secondary relevant parameters of the scale factor using the partial least squares regression (PLSR) algorithm. In this paper, a scale factor prediction model is presented. The model indicates that the resonant frequency and demodulation phase angle are the primary correlation terms of the scale factor, while the drive control voltage and quadrature feedback voltage are the secondary correlation terms of the scale factor. By employing a weighted fusion of correlated terms through PLSR, the scale factor for temperature sensitivity is markedly enhanced by leveraging the predicted results to compensate for the output. The results indicate that the maximum error of the predicted scale factor is 0.124% within the temperature range of −40 °C to 60 °C, and the temperature sensitivity of the scale factor decreases from 6180 ppm/°C to 9.39 ppm/°C. Full article
(This article belongs to the Special Issue MEMS Sensors and Actuators: Design, Fabrication and Applications)
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22 pages, 5925 KiB  
Article
Research on Energy Dissipation Mechanism of Cobweb-like Disk Resonator Gyroscope
by Huang Yi, Bo Fan, Feng Bu, Fang Chen and Xiao-Qing Luo
Micromachines 2024, 15(11), 1380; https://doi.org/10.3390/mi15111380 - 15 Nov 2024
Cited by 1 | Viewed by 2108
Abstract
The micro disk resonator gyroscope is a micro-mechanical device with potential for navigation-grade applications, where the performance is significantly influenced by the quality factor, which is determined by various energy dissipation mechanisms within the micro resonant structure. To enhance the quality factor, these [...] Read more.
The micro disk resonator gyroscope is a micro-mechanical device with potential for navigation-grade applications, where the performance is significantly influenced by the quality factor, which is determined by various energy dissipation mechanisms within the micro resonant structure. To enhance the quality factor, these gyroscopes are typically enclosed in high-vacuum packaging. This paper investigates a wafer-level high-vacuum-packaged (<0.1 Pa) cobweb-like disk resonator gyroscope, presenting a systematic and comprehensive theoretical analysis of the energy dissipation mechanisms, including air damping, thermoelastic damping, anchor loss, and other factors. Air damping is analyzed using both a continuous fluid model and an energy transfer model. The analysis results are validated through quality factor testing on batch samples and temperature characteristic testing on individual samples. The theoretical results obtained using the energy transfer model closely match the experimental measurements, with a maximum error in the temperature coefficient of less than 2%. The findings indicate that air damping and thermoelastic damping are the predominant energy dissipation mechanisms in the cobweb-like disk resonant gyroscope under high-vacuum conditions. Consequently, optimizing the resonator to minimize thermoelastic and air damping is crucial for designing high-performance gyroscopes. Full article
(This article belongs to the Special Issue Advances in MEMS Inertial Sensors)
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19 pages, 19612 KiB  
Article
Research on the Configuration Optimization of All-Metal Micro Resonant Hemisphere
by Xibing Gu, Zhong Su, Xiangxian Yao and Sirui Chu
Sensors 2024, 24(22), 7132; https://doi.org/10.3390/s24227132 - 6 Nov 2024
Cited by 1 | Viewed by 1032
Abstract
As the core component of the all-metal micro resonant gyroscope, the structural parameters and form and position errors of the resonator significantly influence its vibration characteristics, and consequently, the accuracy of the gyroscope. By establishing the finite element model of an ideal hemispherical [...] Read more.
As the core component of the all-metal micro resonant gyroscope, the structural parameters and form and position errors of the resonator significantly influence its vibration characteristics, and consequently, the accuracy of the gyroscope. By establishing the finite element model of an ideal hemispherical resonator and optimizing the meshing method, we refined the frequency difference to 0.1 Hz, enhancing the accuracy of the simulation model. Through finite element simulation, we examined the impact of various structural parameters and processing errors on the natural frequencies of each mode. We analyzed how form and position errors, including shell thickness error, central axis error, equatorial plane error, and edge rectangular tooth position error, affect the frequency splitting of the resonator. We provided optimization suggestions for the structural parameters, ensuring frequency splitting variations of less than 1 Hz. Theoretical modeling and simulation analysis indicated that the primary factors influencing the vibration modes and frequency splitting are the rectangular tooth structure and shell thickness. Following the optimized parameters, the frequency splitting of the All-Metal Micro Resonant Hemisphere was reduced by an order of magnitude to 14 Hz, demonstrating that these optimized conditions can significantly enhance the resonator’s performance. Full article
(This article belongs to the Section Physical Sensors)
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26 pages, 1397 KiB  
Article
Inertial Measurement Unit Self-Calibration by Quantization-Aware and Memory-Parsimonious Neural Networks
by Matteo Cardoni, Danilo Pietro Pau, Kiarash Rezaei and Camilla Mura
Electronics 2024, 13(21), 4278; https://doi.org/10.3390/electronics13214278 - 31 Oct 2024
Cited by 2 | Viewed by 3386
Abstract
This paper introduces a methodology to compensate inertial Micro-Electro-Mechanical System (IMU-MEMS) time-varying calibration loss, induced by stress and aging. The approach relies on a periodic assessment of the sensor through specific stimuli, producing outputs which are compared with the response of a high-precision [...] Read more.
This paper introduces a methodology to compensate inertial Micro-Electro-Mechanical System (IMU-MEMS) time-varying calibration loss, induced by stress and aging. The approach relies on a periodic assessment of the sensor through specific stimuli, producing outputs which are compared with the response of a high-precision sensor, used as ground truth. At any re-calibration iteration, differences with respect to the ground truth are approximated by quantization-aware trained tiny neural networks, allowing calibration-loss compensations. Due to the unavailability of aging IMU-MEMS datasets, a synthetic dataset has been produced, taking into account aging effects with both linear and nonlinear calibration loss. Also, field-collected data in conditions of thermal stress have been used. A model relying on Dense and 1D Convolution layers was devised and compensated for an average of 1.97 g and a variance of 1.07 g2, with only 903 represented with 16 bit parameters. The proposed model can be executed on an intelligent signal processing inertial sensor in 126.4 ms. This work represents a step forward toward in-sensor machine learning computing through integrating the computing capabilities into the sensor package that hosts the accelerometer and gyroscope sensing elements. Full article
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16 pages, 13038 KiB  
Article
Underwater Gyros Denoising Net (UGDN): A Learning-Based Gyros Denoising Method for Underwater Navigation
by Chun Cao, Can Wang, Shaoping Zhao, Tingfeng Tan, Liang Zhao and Feihu Zhang
J. Mar. Sci. Eng. 2024, 12(10), 1874; https://doi.org/10.3390/jmse12101874 - 18 Oct 2024
Cited by 2 | Viewed by 1536
Abstract
Autonomous Underwater Vehicles (AUVs) are widely used for hydrological monitoring, underwater exploration, and geological surveys. However, AUVs face limitations in underwater navigation due to the high costs associated with Strapdown Inertial Navigation System (SINS) and Doppler Velocity Log (DVL), hindering the development of [...] Read more.
Autonomous Underwater Vehicles (AUVs) are widely used for hydrological monitoring, underwater exploration, and geological surveys. However, AUVs face limitations in underwater navigation due to the high costs associated with Strapdown Inertial Navigation System (SINS) and Doppler Velocity Log (DVL), hindering the development of low-cost vehicles. Micro Electro Mechanical System Inertial Measurement Units (MEMS IMUs) are widely used in industry due to their low cost and can output acceleration and angular velocity, making them suitable as an Attitude Heading Reference System (AHRS) for low-cost vehicles. However, poorly calibrated MEMS IMUs provide an inaccurate angular velocity, leading to rapid drift in orientation. In underwater environments where AUVs cannot use GPS for position correction, this drift can have severe consequences. To address this issue, this paper proposes Underwater Gyros Denoising Net (UGDN), a method based on dilated convolutions and LSTM that learns and extracts the spatiotemporal features of IMU sequences to dynamically compensate for the gyroscope’s angular velocity measurements, reducing attitude and heading errors. In the experimental section of this paper, we deployed this method on a dataset collected from field trials and achieved significant results. The experimental results show that the accuracy of MEMS IMU data denoised by UGDN approaches that of fiber-optic SINS, and when integrated with DVL, it can serve as a low-cost underwater navigation solution. Full article
(This article belongs to the Special Issue Autonomous Marine Vehicle Operations—2nd Edition)
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15 pages, 3465 KiB  
Article
Low-Damage Trimming of Micro Hemispherical Resonators by Chemical Etching
by Zhongzhe Zhou, Kun Lu, Yan Shi, Xiang Xi, Jiangkun Sun, Dingbang Xiao and Xuezhong Wu
Micromachines 2024, 15(9), 1094; https://doi.org/10.3390/mi15091094 - 29 Aug 2024
Cited by 2 | Viewed by 1298
Abstract
To enhance the performance of micro-hemispherical gyroscopes, achieving low-damage and high-surface-quality trimming is essential. This enables greater stability and reliability for the gyroscopes. Current methods for reducing frequency split often come with drawbacks such as high cost, adverse effects on the Q-factor, or [...] Read more.
To enhance the performance of micro-hemispherical gyroscopes, achieving low-damage and high-surface-quality trimming is essential. This enables greater stability and reliability for the gyroscopes. Current methods for reducing frequency split often come with drawbacks such as high cost, adverse effects on the Q-factor, or surface damage. In this paper, a chemical etching trimming method is proposed to reduce frequency split in micro-hemispherical resonators. This method allows for trimming with minimal damage, while also being cost-effective and easy to implement. The theoretical basis of this method was analyzed, followed by a simulation to determine the optimal trimming range and location on the resonator. The simulated Q-factor analysis before and after trimming preliminarily validated the method’s low-damage characteristics. Ultimately, the frequency split of the resonator was reduced to below 1 Hz. Additionally, test results of the Q-factor and surface quality before and after trimming further confirmed that chemical etching offers effective low-damage trimming capabilities. The proposed method holds significant potential for improving the performance of micro-hemispherical resonator gyroscopes. Full article
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15 pages, 10166 KiB  
Article
Dual-Model Derailment Detection Algorithm Based on Variational Bayesian Kalman Filtering
by Shiwei Fan, Xu Gao, Ya Zhang, Huhe Chen, Guoxing Yi and Qiang Hao
Micromachines 2024, 15(8), 939; https://doi.org/10.3390/mi15080939 - 23 Jul 2024
Viewed by 2641
Abstract
A derailment detection algorithm for railway freight cars based on micro inertial measurement units was designed to address the complex issue of the disassembly and assembly of derailment braking devices. Firstly, a horizontal attitude measurement model for freight cars was established, and attitude [...] Read more.
A derailment detection algorithm for railway freight cars based on micro inertial measurement units was designed to address the complex issue of the disassembly and assembly of derailment braking devices. Firstly, a horizontal attitude measurement model for freight cars was established, and attitude measurement algorithms based on gyroscopes and accelerometers were introduced. Subsequently, a high-precision attitude measurement algorithm based on variational Bayesian Kalman filtering was proposed, which used acceleration information as the observation data to correct attitude errors. In order to improve the accuracy of derailment detection, a dual-model instantaneous attitude difference measurement technique was further proposed. In order to verify the effectiveness of the algorithm, offline data from simulation experiments and in-vehicle experiments were used to validate the proposed algorithm. The results showed that the proposed algorithm can effectively improve the measurement accuracy of horizontal attitude changes, reducing the error by 89% compared to pure inertial attitude calculation, laying a technical foundation for improving the accuracy of derailment detection. Full article
(This article belongs to the Special Issue MEMS Sensors and Actuators: Design, Fabrication and Applications)
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16 pages, 6017 KiB  
Article
Redundant Configuration Method of MEMS Sensors for Bottom Hole Assembly Attitude Measurement
by Yu Zheng, Lu Wang, Fan Zhang, Zulei Yang and Yuanbiao Hu
Micromachines 2024, 15(6), 804; https://doi.org/10.3390/mi15060804 - 19 Jun 2024
Cited by 2 | Viewed by 4041
Abstract
Micro-electro-mechanical systems inertial measurement units (MEMS-IMUs) are increasingly being employed for measuring the attitude of bottom hole assemblies (BHAs). However, the reliability and measurement precision of a single MEMS-IMU may not meet drilling’s stringent needs. Redundant MEMS-IMU systems can effectively enhance the reliability [...] Read more.
Micro-electro-mechanical systems inertial measurement units (MEMS-IMUs) are increasingly being employed for measuring the attitude of bottom hole assemblies (BHAs). However, the reliability and measurement precision of a single MEMS-IMU may not meet drilling’s stringent needs. Redundant MEMS-IMU systems can effectively enhance the reliability and precision. This paper proposes a redundant configuration method for MEMS sensors tailored to BHA attitude measurement. Firstly, based on reliability theory and a cost-benefit analysis, considering factors such as cost, size, and reliability, the optimal number of sensors in the redundant system was determined to be six. Considering the structural characteristics of the BHA, a hollow hexagonal prism-shaped redundant configuration scheme was proposed, ensuring the circulation of drilling fluid within the drill pipe. Next, by employing Kalman filtering to integrate the output data from the six sensors, a virtual IMU (VIMU) was formed. Finally, experimental verification was carried out. The results confirmed that, after redundancy implementation, the velocity random walk of the accelerometer decreased by an average of 58% compared to a single MEMS-IMU, and bias instability was reduced by an average of 54%. The angular random walk of the gyroscope decreased by an average of 58%, and bias instability was reduced by an average of 37%. This research provides a theoretical foundation for enhancing the precision and reliability of BHA attitude measurements. Full article
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12 pages, 1859 KiB  
Article
Modeling and Reliability Analysis of MEMS Gyroscope Rotor Parameters under Vibrational Stress
by Lei Wang, Yuehong Pan, Kai Li, Lilong He, Qingyi Wang and Weidong Wang
Micromachines 2024, 15(5), 648; https://doi.org/10.3390/mi15050648 - 14 May 2024
Cited by 4 | Viewed by 4316
Abstract
Vibrational environments can cause drift or changes in Micro-Electro-Mechanical System (MEMS) gyroscope rotor parameters, potentially impacting their performance. To improve the effective use of MEMS gyroscopes, this study introduced a method for evaluating the reliability of parameter degradation under vibration. We analyzed the [...] Read more.
Vibrational environments can cause drift or changes in Micro-Electro-Mechanical System (MEMS) gyroscope rotor parameters, potentially impacting their performance. To improve the effective use of MEMS gyroscopes, this study introduced a method for evaluating the reliability of parameter degradation under vibration. We analyzed the working principle of MEMS gyroscope rotors and investigated how vibration affects their parameters. Focusing on zero bias and scale factor as key performance indicators, we developed an accelerated degradation model using the distributional assumption method. We then collected degradation data for these parameters under various vibration conditions. Using the Copula function, we established a reliability assessment approach to evaluate the degradation of the MEMS gyroscope rotor’s zero bias and scale factor under vibration, enabling the determination of reliability for these parameters. Experimental findings confirmed that increasing stress levels lead to reduced failure times and increased failure rates for MEMS gyroscope rotors, with significant changes observed in the zero bias parameter. Our evaluation method effectively characterizes changes in the reliability of the MEMS gyroscope rotor’s scale factor and zero bias over time, providing valuable information for practical applications of MEMS gyroscopes. Full article
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34 pages, 5929 KiB  
Article
Robust Orientation Estimation from MEMS Magnetic, Angular Rate, and Gravity (MARG) Modules for Human–Computer Interaction
by Pontakorn Sonchan, Neeranut Ratchatanantakit, Nonnarit O-Larnnithipong, Malek Adjouadi and Armando Barreto
Micromachines 2024, 15(4), 553; https://doi.org/10.3390/mi15040553 - 21 Apr 2024
Cited by 4 | Viewed by 4579
Abstract
While the availability of low-cost micro electro-mechanical systems (MEMS) accelerometers, gyroscopes, and magnetometers initially seemed to promise the possibility of using them to easily track the position and orientation of virtually any object that they could be attached to, this promise has not [...] Read more.
While the availability of low-cost micro electro-mechanical systems (MEMS) accelerometers, gyroscopes, and magnetometers initially seemed to promise the possibility of using them to easily track the position and orientation of virtually any object that they could be attached to, this promise has not yet been fulfilled. Navigation-grade accelerometers and gyroscopes have long been the basis for tracking ships and aircraft, but the signals from low-cost MEMS accelerometers and gyroscopes are still orders of magnitude poorer in quality (e.g., bias stability). Therefore, the applications of MEMS inertial measurement units (IMUs), containing tri-axial accelerometers and gyroscopes, are currently not as extensive as they were expected to be. Even the addition of MEMS tri-axial magnetometers, to conform magnetic, angular rate, and gravity (MARG) sensor modules, has not fully overcome the challenges involved in using these modules for long-term orientation estimation, which would be of great benefit for the tracking of human–computer hand-held controllers or tracking of Internet-Of-Things (IoT) devices. Here, we present an algorithm, GMVDμK (or simply GMVDK), that aims at taking full advantage of all the signals available from a MARG module to robustly estimate its orientation, while preventing damaging overcorrections, within the context of a human–computer interaction application. Through experimental comparison, we show that GMVDK is more robust to magnetic disturbances than three other MARG orientation estimation algorithms in representative trials. Full article
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