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Keywords = gas-assisted electron and ion-induced deposition

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20 pages, 5573 KiB  
Article
New Gold(I) Complexes as Potential Precursors for Gas-Assisted Methods: Structure, Volatility, Thermal Stability, and Electron Sensitivity
by Aleksandra Butrymowicz-Kubiak, Tadeusz M. Muzioł, Piotr Madajski and Iwona B. Szymańska
Molecules 2025, 30(1), 146; https://doi.org/10.3390/molecules30010146 - 2 Jan 2025
Cited by 1 | Viewed by 897
Abstract
We report the synthesis and characterization of new, user-friendly gold(I) [Au4(μ-(NH)2CC2F5)4]n coordination polymer and [Au2Cl2(NH2(NH=)CC2F5)2]n complex. These compounds were [...] Read more.
We report the synthesis and characterization of new, user-friendly gold(I) [Au4(μ-(NH)2CC2F5)4]n coordination polymer and [Au2Cl2(NH2(NH=)CC2F5)2]n complex. These compounds were investigated for potential application as precursors in chemical vapor deposition (CVD) and focused electron/ion beam-induced deposition (FEBID/FIBID), which are additive methods to produce nanomaterials. Single-crystal X-ray diffraction, elemental analysis, and infrared spectroscopy were used to determine the complexes’ composition and structure. We studied their thermal stability and volatility using thermal analysis and variable-temperature infrared spectroscopy (VT IR) and by conducting sublimation experiments. The gold(I) amidinate [Au2(μ-(NH)2CC2F5)2]n sublimates at 413 K under 10−2 mbar pressure. The electron-induced decomposition of the complexes’ molecules in the gas phase and of their thin layers on silicon substrates was analyzed using electron impact mass spectrometry (EI MS) and microscopy studies (SEM/EDX), respectively, to provide insights for FEBID and FIBID precursor design. The [Au2Cl2(NH2(NH=)CC2F5)2]n hydrogen chloride molecules evolved during heating, with the formation of gold(I) amidinate. The obtained results revealed that the new gold(I) amidinate may be a promising source of metal for nanomaterial fabrication by gas-assisted methods. Full article
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47 pages, 14363 KiB  
Review
Mechanical Properties of 3D Nanostructures Obtained by Focused Electron/Ion Beam-Induced Deposition: A Review
by Ivo Utke, Johann Michler, Robert Winkler and Harald Plank
Micromachines 2020, 11(4), 397; https://doi.org/10.3390/mi11040397 - 10 Apr 2020
Cited by 58 | Viewed by 6984
Abstract
This article reviews the state-of-the -art of mechanical material properties and measurement methods of nanostructures obtained by two nanoscale additive manufacturing methods: gas-assisted focused electron and focused ion beam-induced deposition using volatile organic and organometallic precursors. Gas-assisted focused electron and ion beam-induced deposition-based [...] Read more.
This article reviews the state-of-the -art of mechanical material properties and measurement methods of nanostructures obtained by two nanoscale additive manufacturing methods: gas-assisted focused electron and focused ion beam-induced deposition using volatile organic and organometallic precursors. Gas-assisted focused electron and ion beam-induced deposition-based additive manufacturing technologies enable the direct-write fabrication of complex 3D nanostructures with feature dimensions below 50 nm, pore-free and nanometer-smooth high-fidelity surfaces, and an increasing flexibility in choice of materials via novel precursors. We discuss the principles, possibilities, and literature proven examples related to the mechanical properties of such 3D nanoobjects. Most materials fabricated via these approaches reveal a metal matrix composition with metallic nanograins embedded in a carbonaceous matrix. By that, specific material functionalities, such as magnetic, electrical, or optical can be largely independently tuned with respect to mechanical properties governed mostly by the matrix. The carbonaceous matrix can be precisely tuned via electron and/or ion beam irradiation with respect to the carbon network, carbon hybridization, and volatile element content and thus take mechanical properties ranging from polymeric-like over amorphous-like toward diamond-like behavior. Such metal matrix nanostructures open up entirely new applications, which exploit their full potential in combination with the unique 3D additive manufacturing capabilities at the nanoscale. Full article
(This article belongs to the Special Issue Multi-Dimensional Direct-Write Nanofabrication )
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8 pages, 1873 KiB  
Article
The Optical Absorption and Photoluminescence Characteristics of Evaporated and IAD HfO2 Thin Films
by Mingdong Kong, Bincheng Li, Chun Guo, Peng Zeng, Ming Wei and Wenyan He
Coatings 2019, 9(5), 307; https://doi.org/10.3390/coatings9050307 - 8 May 2019
Cited by 18 | Viewed by 4738
Abstract
HfO2 thin films are extensively applied in optical coatings and microelectronic devices. However, film defects, which are vital to the performance of the thin films, are still under intense investigation. In this work, the absorption, photoluminescence, and crystallization characteristics of HfO2 [...] Read more.
HfO2 thin films are extensively applied in optical coatings and microelectronic devices. However, film defects, which are vital to the performance of the thin films, are still under intense investigation. In this work, the absorption, photoluminescence, and crystallization characteristics of HfO2 films prepared by electron-beam evaporation and ion-assisted deposition are investigated in detail. Experimental results showed that high-temperature thermal annealing in air resulted in a reduced absorption coefficient, an increased bandgap width, and an increased degree of crystallization. After thermal annealing, an absorption shoulder near 5.8 eV was caused by excitons in the films, which were independent of oxygen vacancy defects and crystallization. Under 6.4 eV (193 nm) laser excitation, the photoluminescence spectrum showed five emission peaks for HfO2 films both with and without thermal annealing. The emission peak near 4.4 eV was generated by the self-trapped exciton, and the peak near 4.0 eV was related to the OH group in the film. The oxygen vacancy defect-induced absorption of HfO2 films in a broad spectral range significantly increased when HfO2 film was re-annealed in Ar gas after first being annealed in air, while the photoluminescence spectrum showed no significant change, indicating that the emission peaks at 2.3, 2.8, and 3.4 eV were not related to oxygen vacancy defects. Full article
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13 pages, 6593 KiB  
Article
Ion Beam Assisted Deposition of Thin Epitaxial GaN Films
by Bernd Rauschenbach, Andriy Lotnyk, Lena Neumann, David Poppitz and Jürgen W. Gerlach
Materials 2017, 10(7), 690; https://doi.org/10.3390/ma10070690 - 23 Jun 2017
Cited by 9 | Viewed by 6933
Abstract
The assistance of thin film deposition with low-energy ion bombardment influences their final properties significantly. Especially, the application of so-called hyperthermal ions (energy <100 eV) is capable to modify the characteristics of the growing film without generating a large number of irradiation induced [...] Read more.
The assistance of thin film deposition with low-energy ion bombardment influences their final properties significantly. Especially, the application of so-called hyperthermal ions (energy <100 eV) is capable to modify the characteristics of the growing film without generating a large number of irradiation induced defects. The nitrogen ion beam assisted molecular beam epitaxy (ion energy <25 eV) is used to deposit GaN thin films on (0001)-oriented 6H-SiC substrates at 700 °C. The films are studied in situ by reflection high energy electron diffraction, ex situ by X-ray diffraction, scanning tunnelling microscopy, and high-resolution transmission electron microscopy. It is demonstrated that the film growth mode can be controlled by varying the ion to atom ratio, where 2D films are characterized by a smooth topography, a high crystalline quality, low biaxial stress, and low defect density. Typical structural defects in the GaN thin films were identified as basal plane stacking faults, low-angle grain boundaries forming between w-GaN and z-GaN and twin boundaries. The misfit strain between the GaN thin films and substrates is relieved by the generation of edge dislocations in the first and second monolayers of GaN thin films and of misfit interfacial dislocations. It can be demonstrated that the low-energy nitrogen ion assisted molecular beam epitaxy is a technique to produce thin GaN films of high crystalline quality. Full article
(This article belongs to the Special Issue Ion Beam Analysis, Modification, and Irradiation of Materials)
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