Sign in to use this feature.

Years

Between: -

Subjects

remove_circle_outline
remove_circle_outline
remove_circle_outline
remove_circle_outline
remove_circle_outline
remove_circle_outline
remove_circle_outline
remove_circle_outline
remove_circle_outline

Journals

Article Types

Countries / Regions

Search Results (93)

Search Parameters:
Keywords = PMUT

Order results
Result details
Results per page
Select all
Export citation of selected articles as:
23 pages, 3835 KiB  
Article
Computational Saturation Mutagenesis Reveals Pathogenic and Structural Impacts of Missense Mutations in Adducin Proteins
by Lennon Meléndez-Aranda, Jazmin Moreno Pereyda and Marina M. J. Romero-Prado
Genes 2025, 16(8), 916; https://doi.org/10.3390/genes16080916 - 30 Jul 2025
Viewed by 186
Abstract
Background and objectives: Adducins are cytoskeletal proteins essential for membrane stability, actin–spectrin network organization, and cell signaling. Mutations in the genes ADD1, ADD2, and ADD3 have been linked to hypertension, neurodevelopmental disorders, and cancer. However, no comprehensive in silico saturation [...] Read more.
Background and objectives: Adducins are cytoskeletal proteins essential for membrane stability, actin–spectrin network organization, and cell signaling. Mutations in the genes ADD1, ADD2, and ADD3 have been linked to hypertension, neurodevelopmental disorders, and cancer. However, no comprehensive in silico saturation mutagenesis study has systematically evaluated the pathogenic potential and structural consequences of all possible missense mutations in adducins. This study aimed to identify high-risk variants and their potential impact on protein stability and function. Methods: We performed computational saturation mutagenesis for all possible single amino acid substitutions across the adducin proteins family. Pathogenicity predictions were conducted using four independent tools: AlphaMissense, Rhapsody, PolyPhen-2, and PMut. Predictions were validated against UniProt-annotated pathogenic variants. Predictive performance was assessed using Cohen’s Kappa, sensitivity, and precision. Mutations with a prediction probability ≥ 0.8 were further analyzed for structural stability using mCSM, DynaMut2, MutPred2, and Missense3D, with particular focus on functionally relevant domains such as phosphorylation and calmodulin-binding sites. Results: PMut identified the highest number of pathogenic mutations, while PolyPhen-2 yielded more conservative predictions. Several high-risk mutations clustered in known regulatory and binding regions. Substitutions involving glycine were consistently among the most destabilizing due to increased backbone flexibility. Validated variants showed strong agreement across multiple tools, supporting the robustness of the analysis. Conclusions: This study highlights the utility of multi-tool bioinformatic strategies for comprehensive mutation profiling. The results provide a prioritized list of high-impact adducin variants for future experimental validation and offer insights into potential therapeutic targets for disorders involving ADD1, ADD2, and ADD3 mutations. Full article
(This article belongs to the Section Bioinformatics)
Show Figures

Graphical abstract

13 pages, 7320 KiB  
Article
Determination of Main Bearing Dynamic Clearance in a Shield Tunneling Machine Through a Broadband PMUT Array with a Decreased Blind Area and High Accuracy
by Guoxi Luo, Haoyu Zhang, Delai Liu, Wenyan Li, Min Li, Zhikang Li, Lin Sun, Ping Yang, Ryutaro Maeda and Libo Zhao
Sensors 2025, 25(13), 4182; https://doi.org/10.3390/s25134182 - 4 Jul 2025
Viewed by 322
Abstract
Traditional PMUT ultrasonic ranging systems usually possess a large measurement blind area under the integrated transmit–receive mode, dramatically limiting its distance measurement in confined spaces, such as when determining the clearance of large bearing components. Here, a broadband PMUT rangefinder was designed by [...] Read more.
Traditional PMUT ultrasonic ranging systems usually possess a large measurement blind area under the integrated transmit–receive mode, dramatically limiting its distance measurement in confined spaces, such as when determining the clearance of large bearing components. Here, a broadband PMUT rangefinder was designed by integrating six types of different cells with adjacent resonant frequencies into an array. Through overlapping and coupling of the bandwidths from the different cells, the proposed PMUTs showed a wide –6 dB fractional bandwidth of 108% in silicon oil. Due to the broadening of bandwidth, the device could obtain the maximum steady state with less excitation (5 cycles versus 14 cycles) and reduce its residual ring-down (ca. 6 μs versus 15 μs) compared with the traditional PMUT array with the same cells, resulting in a small blind area. The pulse–echo ranging experiments demonstrated that the blind area was effectively reduced to 4.4 mm in air or 12.8 mm in silicon oil, and the error was controlled within ±0.3 mm for distance measurements up to 250 mm. In addition, a specific ultrasound signal processing circuit with functions of transmitting, receiving, and processing ultrasonic waves was developed. Combining the processing circuit and PMUT device, the system was applied to determine the axial clearance of the main bearing in a tunneling machine. This work develops broadband PMUTs with a small blind area and high resolution for distance measurement in narrow and confined spaces, opening up a new path for ultrasonic ranging technology. Full article
(This article belongs to the Section Industrial Sensors)
Show Figures

Figure 1

24 pages, 7263 KiB  
Article
Biocompatible and Hermetic Encapsulation of PMUTs: Effects of Parylene F-VT4 and ALD Stacks on Membrane Vibration and Acoustic Performance
by Esmaeil Afshari, Samer Houri, Rik Verplancke, Veronique Rochus, Maarten Cauwe, Pieter Gijsenbergh and Maaike Op de Beeck
Sensors 2025, 25(13), 4074; https://doi.org/10.3390/s25134074 - 30 Jun 2025
Viewed by 446
Abstract
The motivation of this work is to enable the use of piezoelectric micromachined ultrasonic transducer (PMUT)-based implants within the human body for biomedical applications, particularly for power and data transfer for implanted medical devices. To protect surrounding tissue and ensure PMUT functionality over [...] Read more.
The motivation of this work is to enable the use of piezoelectric micromachined ultrasonic transducer (PMUT)-based implants within the human body for biomedical applications, particularly for power and data transfer for implanted medical devices. To protect surrounding tissue and ensure PMUT functionality over time, biocompatible and hermetic encapsulation is essential. This study investigates the impact of Parylene F-VT4 layers of various thicknesses as well as the effect of multilayer stacks of Parylene F-VT4 combined with atomic layer-deposited nanolayers of Al2O3 and HfO2 on the mechanical and acoustic properties of PMUTs. PMUTs with various diameters (40 µm, 60 µm, and 80 µm) are fabricated and tested both as stand-alone devices and as arrays. The mechanical behavior of single stand-alone PMUT devices is characterized in air and in water using laser Doppler vibrometry (LDV), while the acoustic output of arrays is evaluated by pressure measurements in water. Experimental results reveal a non-monotonic change in resonance frequency as a function of increasing encapsulation thickness due to the competing effects of added mass and increased stiffness. The performance of PMUT arrays is clearly influenced by the encapsulation. For certain array designs, the encapsulation significantly improved the arrays’ pressure output, a change that is attributed to the change in the acoustic wavelength and inter-element coupling. These findings highlight the impact of encapsulation in modifying and potentially enhancing PMUT performance. Full article
(This article belongs to the Section Physical Sensors)
Show Figures

Figure 1

19 pages, 3708 KiB  
Article
Multiple Ring Electrode-Based PMUT with Tunable Deflections
by Jan Helmerich, Manfred Wich, Annika Hofmann, Thomas Schaechtle and Stefan Johann Rupitsch
Micromachines 2025, 16(6), 623; https://doi.org/10.3390/mi16060623 - 25 May 2025
Cited by 1 | Viewed by 2437
Abstract
Ultrasonic applications such as non-destructive testing, biomedical imaging or range measurements are currently based on piezoelectric bulk transducers. Yet, these kinds of transducers with their mm to cm dimensions are rather impractical in fields in which both frequencies in the kHz region and [...] Read more.
Ultrasonic applications such as non-destructive testing, biomedical imaging or range measurements are currently based on piezoelectric bulk transducers. Yet, these kinds of transducers with their mm to cm dimensions are rather impractical in fields in which both frequencies in the kHz region and small-feature sizes are required. This fact mainly relates to the inverse relationship between the resonance frequency constant and the transducers’ dimension, yielding a higher frequency and attenuation with a decreasing size. Piezoelectric micromachined ultrasonic transducers (PMUTs), in comparison, incorporate a small-scale µm design while preserving the operating frequency in the desired kHz range. This contribution presents the detailed manufacturing of such a PMUT with a multiple ring electrode‑based structure to additionally adjust the sound pressure fields. The PMUT will be characterized by its deflection in air along with the characterization of the piezoelectric material lead zirconate titanate (PZT) itself. The measurements showed a maximum polarization of 21.8 µC/cm2 at 50 kV/cm, the PMUT’s displacement of 30.50 nm/V in air when all electrodes are driven, and an adjustable deflection via different electrode excitations without the need for additional hardware. The ring design also offered the possibility to emit two distinct frequencies simultaneously. These results demonstrate the potential of the designs for small-feature-size applications as they are in high demand for implantable devices, miniaturized ultrasonic-based communication or drug delivery. Full article
(This article belongs to the Special Issue MEMS Ultrasonic Transducers)
Show Figures

Figure 1

15 pages, 8737 KiB  
Article
A Piezoelectric Micromachined Ultrasonic Transducer-Based Bone Conduction Microphone System for Enhancing Speech Recognition Accuracy
by Chongbin Liu, Xiangyang Wang, Jianbiao Xiao, Jun Zhou and Guoqiang Wu
Micromachines 2025, 16(6), 613; https://doi.org/10.3390/mi16060613 - 23 May 2025
Viewed by 588
Abstract
Speech recognition in noisy environments has long posed a challenge. Air conduction microphone (ACM), the devices typically used, are susceptible to environmental noise. In this work, a customized bone conduction microphone (BCM) system based on a piezoelectric micromachined ultrasonic transducer is developed to [...] Read more.
Speech recognition in noisy environments has long posed a challenge. Air conduction microphone (ACM), the devices typically used, are susceptible to environmental noise. In this work, a customized bone conduction microphone (BCM) system based on a piezoelectric micromachined ultrasonic transducer is developed to capture speech through real-time bone conduction (BC), while a commercial ACM is integrated for simultaneous capture of speech through air conduction (AC). The system enables simpler and more robust BC speech capture. The BC speech capture achieves a signal-to-noise amplitude ratio over five times greater than that of AC speech capture in an environment with a noise level of 68 dB. Instead of using only AC-captured speech, both BC- and AC-captured speech are input into a speech enhancement module. The noise-insensitive BC-captured speech serves as a speech reference to adapt the SE backbone of AC-captured speech. The two types of speech are fused, and noise suppression is applied to generate enhanced speech. Compared with the original noisy speech, the enhanced speech achieves a character error rate reduction of over 20%, approaching the speech recognition accuracy of clean speech. The results indicate that this speech enhancement method based on the fusion of BC- and AC-captured speech efficiently integrates the features of both types of speech, thereby improving speech recognition accuracy in noisy environments. This work presents an innovative system designed to efficiently capture BC speech and enhance speech recognition in noisy environments. Full article
(This article belongs to the Special Issue Advances in Piezoelectric Sensors)
Show Figures

Figure 1

13 pages, 3107 KiB  
Article
Defecation Warning Monitor Based on ScAlN Piezoelectric Ultrasonic Transducer (PMUT)
by Tao Yao, Jianwei Zong, Haoyue Zhang, Zhiyuan Hou and Liang Lou
Micromachines 2025, 16(5), 498; https://doi.org/10.3390/mi16050498 - 24 Apr 2025
Viewed by 2633
Abstract
This study proposes an innovative health management solution to address the defecation care needs of the elderly population. Traditional post-defecation care methods have significant limitations, particularly imposing a considerable psychological burden on patients. By leveraging the rich physiological information contained in bowel sounds, [...] Read more.
This study proposes an innovative health management solution to address the defecation care needs of the elderly population. Traditional post-defecation care methods have significant limitations, particularly imposing a considerable psychological burden on patients. By leveraging the rich physiological information contained in bowel sounds, in this work, we designed and implemented a wearable defecation warning monitor based on scandium aluminum nitride (ScAlN) piezoelectric thin films and piezoelectric micromachined ultrasonic transducers (PMUTs). The proposed device mainly incorporates two core components: a bowel sound signal acquisition module and a real-time signal display graphical user interface (GUI) developed using the MATLAB R2023a platform. The research focuses on the systematic characterization and comparative analysis of the sound pressure sensitivity of three different signal readout structures. Experimental results demonstrate that the differential readout structure exhibits superior sensitivity. By continuously monitoring bowel sounds in healthy subjects both with and without the urge to defecate using the defecation warning monitor and a modified stethoscope, and conducting a comparative analysis of the experimental data, it is verified that the defecation warning monitor has significant advantages in clinical applications and demonstrates promising potential for defecation warning monitoring. Full article
(This article belongs to the Section A:Physics)
Show Figures

Figure 1

12 pages, 3517 KiB  
Article
High-Efficiency Wireless Power Transfer System Based on Low-Frequency AlScN Piezoelectric Micromechanical Ultrasonic Transducers for Implantable Medical Devices
by Wanyun Cui, Jianwei Zong, Junxiang Li, Qiang Ping, Lei Qiu and Liang Lou
Micromachines 2025, 16(4), 471; https://doi.org/10.3390/mi16040471 - 15 Apr 2025
Viewed by 674
Abstract
In recent years, implantable medical devices (IMDs) have introduced groundbreaking solutions for managing various health conditions. However, traditional implanted batteries necessitate periodic surgical replacement and tend to be relatively bulky, posing significant inconvenience to patients. To overcome these limitations, researchers have investigated various [...] Read more.
In recent years, implantable medical devices (IMDs) have introduced groundbreaking solutions for managing various health conditions. However, traditional implanted batteries necessitate periodic surgical replacement and tend to be relatively bulky, posing significant inconvenience to patients. To overcome these limitations, researchers have investigated various wireless power transfer (WPT) techniques, among which the ultrasonic wireless power transmission (UWPT) technique has distinct advantages. However, limited research has been conducted on ultrasonic power transfer at lower operating frequencies. Therefore, this study explores wireless power transfer using scandium-doped aluminum nitride (AlScN) piezoelectric micro-electromechanical transducers (PMUTs) in deionized (DI) water. Experimental results indicate that at an operating frequency of 14.075 kHz, the power transfer efficiency (PTE) can reach up to 2.68% under optimal load resistance conditions. Furthermore, a low-frequency UWPT system based on a AlScN PMUT has been developed, delivering a stable 3.3 V output for implantable medical devices and contributing to the advancement of a full-spectrum UWPT framework. Full article
(This article belongs to the Section A:Physics)
Show Figures

Figure 1

24 pages, 9547 KiB  
Article
Integrating Artificial Intelligence and Bioinformatics Methods to Identify Disruptive STAT1 Variants Impacting Protein Stability and Function
by Ebtihal Kamal, Lamis A. Kaddam, Mehad Ahmed and Abdulaziz Alabdulkarim
Genes 2025, 16(3), 303; https://doi.org/10.3390/genes16030303 - 1 Mar 2025
Cited by 2 | Viewed by 1086
Abstract
Background: The Signal Transducer and Activator of Transcription 1 (STAT1) gene is an essential component of the JAK-STAT signaling pathway. This pathway plays a pivotal role in the regulation of different cellular processes, including immune responses, cell growth, and apoptosis. Mutations [...] Read more.
Background: The Signal Transducer and Activator of Transcription 1 (STAT1) gene is an essential component of the JAK-STAT signaling pathway. This pathway plays a pivotal role in the regulation of different cellular processes, including immune responses, cell growth, and apoptosis. Mutations in the STAT1 gene contribute to a variety of immune system dysfunctions. Objectives: We aim to identify disease-susceptible single-nucleotide polymorphisms (SNPs) in STAT1 gene and predict structural changes associated with the mutations that disrupt normal protein–protein interactions using different computational algorithms. Methods: Several in silico tools, such as SIFT, Polyphen v2, PROVEAN, SNAP2, PhD-SNP, SNPs&GO, Pmut, and PANTHER, were used to determine the deleterious nsSNPs of the STAT1. Further, we evaluated the potentially deleterious SNPs for their effect on protein stability using I-Mutant, MUpro, and DDMUT. Additionally, we predicted the functional and structural effects of the nsSNPs using MutPred. We used Alpha-Missense to predict missense variant pathogenicity. Moreover, we predicted the 3D structure of STAT1 using an artificial intelligence system, alphafold, and the visualization of the 3D structures of the wild-type amino acids and the mutant residues was performed using ChimeraX 1.9 software. Furthermore, we analyzed the structural and conformational variations that have resulted from SNPs using Project Hope, while changes in the biological interactions between wild type, mutant amino acids, and neighborhood residues was studied using DDMUT. Conservational analysis and surface accessibility prediction of STAT1 was performed using ConSurf. We predicted the protein–protein interaction using STRING database. Results: In the current study, we identified six deleterious nsSNPs (R602W, I648T, V642D, L600P, I578N, and W504C) and their effect on protein structure, function, and stability. Conclusions: These findings highlight the potential of approaches to pinpoint pathogenic SNPs, providing a time- and cost-effective alternative to experimental approaches. To the best of our knowledge, this is the first comprehensive study in which we analyze STAT1 gene variants using both bioinformatics and artificial-intelligence-based model tools. Full article
(This article belongs to the Section Bioinformatics)
Show Figures

Figure 1

15 pages, 4549 KiB  
Article
Performance Analysis of Scandium-Doped Aluminum Nitride-Based PMUTs Under High-Temperature Conditions
by Haochen Lyu and Ahmad Safari
Appl. Sci. 2025, 15(5), 2428; https://doi.org/10.3390/app15052428 - 24 Feb 2025
Viewed by 631
Abstract
PMUTs have been widely studied in recent years, particularly those based on the SOI (silicon-on-insulator) process, which have been partially commercialized and are extensively used in advanced applications such as ultrasonic ranging and spatial positioning. However, there has been little research on their [...] Read more.
PMUTs have been widely studied in recent years, particularly those based on the SOI (silicon-on-insulator) process, which have been partially commercialized and are extensively used in advanced applications such as ultrasonic ranging and spatial positioning. However, there has been little research on their high-temperature reliability, a critical area for their use in extreme environmental conditions. In this study, we investigate the high-temperature characteristics of air-coupled PMUTs based on SOI under various structural conditions, employing both finite element analysis (FEA) and experimental validation. We assess the performance of PMUTs at elevated temperatures by examining key parameters such as resonant frequency, the electromechanical coupling coefficient, mechanical amplitude, and warpage, all analyzed as functions of temperature. The experimental results show that temperature-induced drift becomes more significant as the back cavity size increases and the top silicon layer thickness decreases. These findings are consistent with the trends observed in the finite element analysis. Specifically, a PMUT with a back cavity diameter of 1000 μm and a top silicon thickness of 4 μm exhibits a temperature drift rate of up to 47.3% when the operating temperature rises from room temperature to 200 °C. Furthermore, at elevated temperatures, the maximum electromechanical coupling coefficient improves by 68.6%, and the mechanical amplitude increases by 66.1%. Heating experiments using a 3D profiler reveal that warpage increases from 0.3 μm to 2.15 μm as the temperature reaches 150 °C. These findings offer important theoretical insights into the temperature-induced drift behavior of PMUTs under high-temperature conditions. This study provides a comprehensive understanding of the performance variations of PMUTs, including changes in electromechanical coupling, mechanical amplitude, and structural warpage, which are critical for their reliable operation in extreme environments. The results presented here can serve as a foundation for the design and optimization of PMUTs in applications that require high-temperature stability, ensuring their enhanced reliability and performance in such demanding conditions. Full article
(This article belongs to the Special Issue Applications of Thin Films and Their Physical Properties)
Show Figures

Figure 1

13 pages, 7247 KiB  
Article
Reconfigurable ScAlN Piezoelectric Micromachined Ultrasonic Transducer Arrays for Range Finding
by Wenling Shang, Danrui Wang, Bin Miao, Shutao Yao, Guifeng Ta, Haojie Liu, Jinyan Tao, Xiaonan Liu, Xiangyong Zhao and Jiadong Li
Micromachines 2025, 16(2), 145; https://doi.org/10.3390/mi16020145 - 26 Jan 2025
Viewed by 1019
Abstract
Due to their compact sizes, low power consumption levels, and convenient integration capabilities, piezoelectric micromachined ultrasonic transducers (PMUTs) have gained significant attention for enabling environmental sensing functionalities. However, the frequency inconsistency of the PMUT arrays often leads to directional errors with the ultrasonic [...] Read more.
Due to their compact sizes, low power consumption levels, and convenient integration capabilities, piezoelectric micromachined ultrasonic transducers (PMUTs) have gained significant attention for enabling environmental sensing functionalities. However, the frequency inconsistency of the PMUT arrays often leads to directional errors with the ultrasonic beams. Herein, we propose a reconfigurable PMUT array based on a Sc0.2Al0.8N piezoelectric thin film for in-air ranging. Each element of the reconfigurable PMUT array possesses the ability to be independently replaced, enabling matching of the required frequency characteristics, which enhances the reusability of the device. The experimental results show that the frequency uniformity of the 2 × 2 PMUT array reaches 0.38% and the half-power beam width (θ−3dB) of the array measured at 20 cm is 60°. At a resonance of 69.7 kHz, the sound pressure output reaches 7.4 Pa (sound pressure level of 108.2 dB) at 19 mm, with a reception sensitivity of approximately 11.6 mV/Pa. Ultimately, the maximum sensing distance of the array is 7.9 m, and it extends to 14.1 m with a horn, with a signal-to-noise ratio (SNR) of 19.5 dB. This research significantly expands the ranging capability of PMUTs and showcases their great potential in environmental perception applications. Full article
Show Figures

Figure 1

15 pages, 14371 KiB  
Article
Impact of Radial Electrode Coverage on the Performance of Liquid-Deployed PMUTs: A Dynamic and Kinematic Study
by Stephen Sammut, Edward Gatt and Ruben Paul Borg
Micromachines 2025, 16(1), 80; https://doi.org/10.3390/mi16010080 - 12 Jan 2025
Viewed by 3266
Abstract
This paper highlights the optimisation of a key design parameter essential to the development of PMUTs, which are part of the transmitting components of microsensors. These microsensors are designed for use in the Structural Health Monitoring of reinforced concrete structures. Enhancing the effectiveness [...] Read more.
This paper highlights the optimisation of a key design parameter essential to the development of PMUTs, which are part of the transmitting components of microsensors. These microsensors are designed for use in the Structural Health Monitoring of reinforced concrete structures. Enhancing the effectiveness of the transmitting component allows for greater spacing between microsensors, which in turn reduces the number of devices needed to implement a full structural health monitoring system. PMUTs designed for integration into the pore solution of reinforced concrete structures need to operate effectively with liquid coupling fluids to ensure optimal sonic energy transfer into the structure. This paper outlines the techniques employed to optimize the central electrode’s percentage radial cover of the piezoelectric layer, in circular PMUTs resonating at around 100 kHz. This optimisation was achieved using Finite Element Modelling, laser vibrometry, and hydrophone experimental techniques. The results demonstrated that a radial electrode cover between 65 and 70% significantly enhances the kinematic and dynamic characteristics of a PMUT’s diaphragm when subjected to the excitation of a sine wave electrical signal. The paper also includes advanced time domain finite element analysis, through which the authors aimed to illustrate the diaphragm’s movements at various levels of radial electrode coverage. Full article
(This article belongs to the Special Issue MEMS Ultrasonic Transducers)
Show Figures

Figure 1

16 pages, 5459 KiB  
Article
Impact of Cell Layout on Bandwidth of Multi-Frequency Piezoelectric Micromachined Ultrasonic Transducer Array
by Wanli Yang, Huimin Li, Yuewu Gong, Zhuochen Wang, Xingli Xu, Xiaofan Hu, Pengfei Niu and Wei Pang
Micromachines 2025, 16(1), 49; https://doi.org/10.3390/mi16010049 - 31 Dec 2024
Cited by 1 | Viewed by 3940
Abstract
Piezoelectric micromachined ultrasonic transducers (PMUTs) show considerable promise for application in ultrasound imaging, but the limited bandwidth of the traditional PMUTs largely affects the imaging quality. This paper focuses on how to arrange cells with different frequencies to maximize the bandwidth and proposes [...] Read more.
Piezoelectric micromachined ultrasonic transducers (PMUTs) show considerable promise for application in ultrasound imaging, but the limited bandwidth of the traditional PMUTs largely affects the imaging quality. This paper focuses on how to arrange cells with different frequencies to maximize the bandwidth and proposes a multi-frequency PMUT (MF-PMUT) linear array. Seven cells with gradually changing frequencies are arranged in a monotonic trend to form a unit, and 32 units are distributed across four lines, forming one element. To investigate how the arrangement of cells affects the bandwidth, three different arrays were designed according to the extent of unit aggregation from the same frequency. Underwater experiments were conducted to assess the acoustic performance, especially the bandwidth. We found that the densest arrangement of the same cells produced the largest bandwidth, achieving a 92% transmission bandwidth and a 50% burst-echo bandwidth at 6 MHz. The mechanism was investigated from the coupling point of view by finite element analysis and laser Doppler vibrometry, focusing on the cell displacements. The results demonstrated strong ultrasound coupling in the devices, resulting in larger bandwidths. To exploit the advanced bandwidth but reduce the crosstalk, grooves for isolation were fabricated between elements. This work proposes an effective strategy for developing advanced PMUT arrays that would benefit ultrasound imaging applications. Full article
(This article belongs to the Section A:Physics)
Show Figures

Figure 1

16 pages, 14457 KiB  
Article
ScAlN PMUTs Based on Flexurally Suspended Membrane for Long-Range Detection
by Shutao Yao, Wenling Shang, Guifeng Ta, Jinyan Tao, Haojie Liu, Xiangyong Zhao, Jianhe Liu, Bin Miao and Jiadong Li
Micromachines 2024, 15(11), 1377; https://doi.org/10.3390/mi15111377 - 14 Nov 2024
Cited by 3 | Viewed by 2508
Abstract
Piezoelectric micromachined ultrasonic transducers (PMUTs) have been widely applied in distance sensing applications. However, the rapid movement of miniature robots in complex environments necessitates higher ranging capabilities from sensors, making the enhancement of PMUT sensing distance critically important. In this paper, a scandium-doped [...] Read more.
Piezoelectric micromachined ultrasonic transducers (PMUTs) have been widely applied in distance sensing applications. However, the rapid movement of miniature robots in complex environments necessitates higher ranging capabilities from sensors, making the enhancement of PMUT sensing distance critically important. In this paper, a scandium-doped aluminum nitride (ScAlN) PMUT based on a flexurally suspended membrane is proposed. Unlike the traditional fully clamped design, the PMUT incorporates a partially clamped membrane, thereby extending the vibration displacement and enhancing the output sound pressure. Experimental results demonstrate that at a resonant frequency of 78 kHz, a single PMUT generates a sound pressure level (SPL) of 112.2 dB at a distance of 10 mm and achieves a high receiving sensitivity of 12.3 mV/Pa. Distance testing reveals that a single PMUT equipped with a horn can achieve a record-breaking distance sensing range of 11.2 m when used alongside a device capable of simultaneously transmitting and receiving ultrasound signals. This achievement is significant for miniaturized and integrated applications that utilize ultrasound for long-range target detection. Full article
(This article belongs to the Special Issue MEMS Ultrasonic Transducers)
Show Figures

Figure 1

16 pages, 8186 KiB  
Article
On the Dynamics of a Novel Liquid-Coupled Piezoelectric Micromachined Ultrasonic Transducer Designed to Have a Reduced Resonant Frequency and Enhanced Ultrasonic Reception Capabilities
by Stephen Sammut, Edward Gatt and Ruben P. Borg
Micromachines 2024, 15(10), 1210; https://doi.org/10.3390/mi15101210 - 29 Sep 2024
Cited by 1 | Viewed by 4116
Abstract
This paper introduces a novel design for a liquid-deployed Piezoelectric Micromachined Ultrasonic Transducer (PMUT). This design was specifically developed to resonate at a lower ultrasonic frequency than a PMUT with a circular, fully clamped diaphragm with the same diameter. Furthermore, the novel design [...] Read more.
This paper introduces a novel design for a liquid-deployed Piezoelectric Micromachined Ultrasonic Transducer (PMUT). This design was specifically developed to resonate at a lower ultrasonic frequency than a PMUT with a circular, fully clamped diaphragm with the same diameter. Furthermore, the novel design was also optimised to enhance its ultrasonic radiation reception capabilities. These parametric enhancements were necessary to develop a PMUT device that could form part of an eventual microscale sensory device used for the Structural Health Monitoring (SHM) of reinforced concrete (RC) structures. Through these two enhancements, an eventual microscale sensor can be made smaller, thus taking up a smaller die footprint and also be able to be deployed further apart from each other. Eventually, this would reduce the developed distributed sensor system’s cost. The innovative design employed a configuration where the diaphragm was only pinned at particular points along its circumference. This paper presents results from Finite Element Modelling (FEM), as well as experimental work that was conducted to develop and test this novel PMUT. The experimental work presented involved both laser vibrometry and ultrasonic radiation lab work. The results show that when compared to a clamped diaphragm design, the novel device managed to achieve the required reduction in resonant frequency and presented an enhanced sensitivity to incoming ultrasonic radiation. Full article
(This article belongs to the Special Issue MEMS Ultrasonic Transducers)
Show Figures

Figure 1

9 pages, 2056 KiB  
Article
Design and Fabrication of High-Performance Piezoelectric Micromachined Ultrasonic Transducers Based on Aluminum Nitride Thin Films
by Le Zhang, Kunxian Yan, Lei Ye, Xiangyu Luo, Jian He and Xiujian Chou
Micromachines 2024, 15(8), 1001; https://doi.org/10.3390/mi15081001 - 1 Aug 2024
Viewed by 1837
Abstract
Ultrasound is widely applied in diverse domains, such as medical imaging, non-destructive evaluation, and acoustic communication. Piezoelectric micromachined ultrasonic transducers (PMUTs) capable of generating and receiving ultrasonic signals at the micrometer level have become a prominent technology in the field of ultrasound. It [...] Read more.
Ultrasound is widely applied in diverse domains, such as medical imaging, non-destructive evaluation, and acoustic communication. Piezoelectric micromachined ultrasonic transducers (PMUTs) capable of generating and receiving ultrasonic signals at the micrometer level have become a prominent technology in the field of ultrasound. It is important to enrich the models of the PMUTs to meet the varied applications. In this study, a series of PMUT devices featured with various top electrode configurations, square, circular, and doughnut, were designed to assess the influence of shape on the emission efficacy. It was demonstrated that the PMUTs with a circular top electrode were outperformed, which was calculated from the external acoustic pressure produced by the PMUTs operating in the fundamental resonant mode at a specified distance. Furthermore, the superior performance of PMUT arrays were exhibited through computational simulations for the circular top electrode geometries. Conventional microelectromechanical systems (MEMS) techniques were used to fabricate an array of PMUTs based on aluminum nitride (AlN) films. These findings make great contributions for enhancing the signal transmission sensitivity and bandwidth of PMUTs, which have significant potential in non-destructive testing and medical imaging applications. Full article
Show Figures

Figure 1

Back to TopTop