Highly Ti-doped ZnO films have been produced by a spin-casting sol-gel process. The spin-casted films show high in plane homogeneity and optical quality. However, when inspected in depth, the surface composition is Ti rich. We show that two possible...
The accurate characterization of nanolayered systems is an essential topic for today’s developments in many fields of material research. Thin high-k layers and gate stacks are technologically required for the design of current and future electronic d...
The characterization of nanostructured surfaces with sensitivity in the sub-nm range is of high importance for the development of current and next-generation integrated electronic circuits. Modern transistor architectures for, e.g., FinFETs are reali...
Traceable characterization methods allow for the accurate correlation of the functionality or toxicity of nanomaterials with their underlaying chemical, structural or physical material properties. These correlations are required for the directed deve...