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Keywords = GIXRF

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30 pages, 3283 KB  
Review
Bioanalytical Application of the Total-Reflection X-Ray Fluorescence Spectrometry
by Ramón Fernández-Ruiz
Int. J. Mol. Sci. 2025, 26(3), 1049; https://doi.org/10.3390/ijms26031049 - 26 Jan 2025
Cited by 14 | Viewed by 4179
Abstract
This paper briefly overviews the application of total-reflection X-ray fluorescence (TXRF) spectrometry in the biosciences, focusing on key bioanalytical applications. It seeks to review and update the current state of TXRF’s use in biomedical, biochemical, and pharmacological research. The review highlights relevant works [...] Read more.
This paper briefly overviews the application of total-reflection X-ray fluorescence (TXRF) spectrometry in the biosciences, focusing on key bioanalytical applications. It seeks to review and update the current state of TXRF’s use in biomedical, biochemical, and pharmacological research. The review highlights relevant works in the field, summarising past achievements and incorporating the latest developments. The goal is to demonstrate how the analytical application of TXRF spectrometry in this area has evolved and what its role is in analysing trace elements and other biomolecules in diverse biological samples and diseases. Physical foundations to understand its analytical power and its comparison with related analytical techniques are presented to gain objective knowledge of the benefits, limitations, and drawbacks that TXRF spectrometry can offer. Full article
(This article belongs to the Special Issue X-ray Spectroscopy in Life Sciences)
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17 pages, 7389 KB  
Review
Traceable Characterization of Nanomaterials by X-ray Spectrometry Using Calibrated Instrumentation
by Burkhard Beckhoff
Nanomaterials 2022, 12(13), 2255; https://doi.org/10.3390/nano12132255 - 30 Jun 2022
Cited by 28 | Viewed by 4085
Abstract
Traceable characterization methods allow for the accurate correlation of the functionality or toxicity of nanomaterials with their underlaying chemical, structural or physical material properties. These correlations are required for the directed development of nanomaterials to reach target functionalities such as conversion efficiencies or [...] Read more.
Traceable characterization methods allow for the accurate correlation of the functionality or toxicity of nanomaterials with their underlaying chemical, structural or physical material properties. These correlations are required for the directed development of nanomaterials to reach target functionalities such as conversion efficiencies or selective sensitivities. The reliable characterization of nanomaterials requires techniques that often need to be adapted to the nano-scaled dimensions of the samples with respect to both the spatial dimensions of the probe and the instrumental or experimental discrimination capability. The traceability of analytical methods revealing information on chemical material properties relies on reference materials or qualified calibration samples, the spatial elemental distributions of which must be very similar to the nanomaterial of interest. At the nanoscale, however, only few well-known reference materials exist. An alternate route to establish the required traceability lays in the physical calibration of the analytical instrument’s response behavior and efficiency in conjunction with a good knowledge of the various interaction probabilities. For the elemental analysis, speciation, and coordination of nanomaterials, such a physical traceability can be achieved with X-ray spectrometry. This requires the radiometric calibration of energy- and wavelength-dispersive X-ray spectrometers, as well as the reliable determination of atomic X-ray fundamental parameters using such instrumentation. In different operational configurations, the information depths, discrimination capability, and sensitivity of X-ray spectrometry can be considerably modified while preserving its traceability, allowing for the characterization of surface contamination as well as interfacial thin layer and nanoparticle chemical compositions. Furthermore, time-resolved and hybrid approaches provide access to analytical information under operando conditions or reveal dimensional information, such as elemental or species depth profiles of nanomaterials. The aim of this review is to demonstrate the absolute quantification capabilities of SI-traceable X-ray spectrometry based upon calibrated instrumentation and knowledge about X-ray interaction probabilities. Full article
(This article belongs to the Special Issue Nanometrology)
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15 pages, 5065 KB  
Article
Shape- and Element-Sensitive Reconstruction of Periodic Nanostructures with Grazing Incidence X-ray Fluorescence Analysis and Machine Learning
by Anna Andrle, Philipp Hönicke, Grzegorz Gwalt, Philipp-Immanuel Schneider, Yves Kayser, Frank Siewert and Victor Soltwisch
Nanomaterials 2021, 11(7), 1647; https://doi.org/10.3390/nano11071647 - 23 Jun 2021
Cited by 24 | Viewed by 4039
Abstract
The characterization of nanostructured surfaces with sensitivity in the sub-nm range is of high importance for the development of current and next-generation integrated electronic circuits. Modern transistor architectures for, e.g., FinFETs are realized by lithographic fabrication of complex, well-ordered nanostructures. Recently, a novel [...] Read more.
The characterization of nanostructured surfaces with sensitivity in the sub-nm range is of high importance for the development of current and next-generation integrated electronic circuits. Modern transistor architectures for, e.g., FinFETs are realized by lithographic fabrication of complex, well-ordered nanostructures. Recently, a novel characterization technique based on X-ray fluorescence measurements in grazing incidence geometry was proposed for such applications. This technique uses the X-ray standing wave field, arising from an interference between incident and the reflected radiation, as a nanoscale sensor for the dimensional and compositional parameters of the nanostructure. The element sensitivity of the X-ray fluorescence technique allows for a reconstruction of the spatial element distribution using a finite element method. Due to a high computational time, intelligent optimization methods employing machine learning algorithms are essential for timely provision of results. Here, a sampling of the probability distributions by Bayesian optimization is not only fast, but it also provides an initial estimate of the parameter uncertainties and sensitivities. The high sensitivity of the method requires a precise knowledge of the material parameters in the modeling of the dimensional shape provided that some physical properties of the material are known or determined beforehand. The unknown optical constants were extracted from an unstructured but otherwise identical layer system by means of soft X-ray reflectometry. The spatial distribution profiles of the different elements contained in the grating structure were compared to scanning electron and atomic force microscopy and the influence of carbon surface contamination on the modeling results were discussed. This novel approach enables the element sensitive and destruction-free characterization of nanostructures made of silicon nitride and silicon oxide with sub-nm resolution. Full article
(This article belongs to the Special Issue Nanometrology)
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14 pages, 5167 KB  
Article
Self-Organized In-Depth Gradients in Highly Ti-Doped ZnO Films: Thermal Versus MW Plasma Annealing
by Rehab Ramadan, Ramón Fernández-Ruiz and Miguel Manso Silván
Coatings 2020, 10(4), 418; https://doi.org/10.3390/coatings10040418 - 23 Apr 2020
Cited by 1 | Viewed by 3822
Abstract
Highly Ti-doped ZnO films have been produced by a spin-casting sol-gel process. The spin-casted films show high in plane homogeneity and optical quality. However, when inspected in depth, the surface composition is Ti rich. We show that two possible annealing processes can be [...] Read more.
Highly Ti-doped ZnO films have been produced by a spin-casting sol-gel process. The spin-casted films show high in plane homogeneity and optical quality. However, when inspected in depth, the surface composition is Ti rich. We show that two possible annealing processes can be considered depending on the properties to exploit. To promote in-depth homogenization, thermal annealing processes have been applied. Meanwhile, the gradients can be exacerbated, thanks to a non-negligible surface sputtering, by applying microwave (MW) plasma treatments with Ar discharges at different pressures. The microstructural properties of the differently processed films have been obtained prior to a study by grazing incidence X-ray fluorescence (GI-XRF) spectroscopy, which reveals the in-depth composition trends induced by the two alternative annealing procedures. The final wetting, electrical and optical properties of the films are described in accordance with the Ti distribution pattern revealed by GI-XRF. The study underlines for the first time how MW plasma annealing processes can be used to exacerbate self-induced atomic gradients in sol-gel films with potential implications in catalytic and biomedical applications. Full article
(This article belongs to the Special Issue 1D, 2D and 3D ZnO: Synthesis, Characterization and Applications)
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13 pages, 697 KB  
Article
Characterization of High-k Nanolayers by Grazing Incidence X-ray Spectrometry
by Matthias Müller, Philipp Hönicke, Blanka Detlefs and Claudia Fleischmann
Materials 2014, 7(4), 3147-3159; https://doi.org/10.3390/ma7043147 - 17 Apr 2014
Cited by 43 | Viewed by 9645
Abstract
The accurate characterization of nanolayered systems is an essential topic for today’s developments in many fields of material research. Thin high-k layers and gate stacks are technologically required for the design of current and future electronic devices and can be deposited, e.g., by [...] Read more.
The accurate characterization of nanolayered systems is an essential topic for today’s developments in many fields of material research. Thin high-k layers and gate stacks are technologically required for the design of current and future electronic devices and can be deposited, e.g., by Atomic Layer Deposition (ALD). However, the metrological challenges to characterize such systems demand further development of analytical techniques. Reference-free Grazing Incidence X-ray Fluorescence (GIXRF) based on synchrotron radiation can significantly contribute to the characterization of such nanolayered systems. GIXRF takes advantage of the incident angle dependence of XRF, in particular below the substrate’s critical angle where changes in the X-ray Standing Wave field (XSW) intensity influence the angular intensity profile. The reliable modeling of the XSW in conjunction with the radiometrically calibrated instrumentation at the PTB allows for reference-free, fundamental parameter-based quantitative analysis. This approach is very well suited for the characterization of nanoscaled materials, especially when no reference samples with sufficient quality are available. The capabilities of this method are demonstrated by means of two systems for transistor gate stacks, i.e., Al2O3 high-k layers grown on Si or Si/SiO2 and Sc2O3 layers on InGaAs/InP substrates. Full article
(This article belongs to the Special Issue High-k Materials and Devices 2014)
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