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Journal: Eng. Proc., 2020
Volume: 2
Number: 95
95
Article: A Stochastic Model to Describe the Scattering in the Response of Polysilicon MEMS
Authors: by Luca Dassi, Marco Merola, Eleonora Riva, Angelo Santalucia, Andrea Venturelli, Aldo Ghisi and Stefano Mariani
Link: https://www.mdpi.com/2673-4591/2/1/95

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