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Inductive Medium Pressure UV-Source

Light Technology Institute, Karlsruhe Institute of Technology, Engesserstr. 13, 76131 Karlsruhe, Germany
Author to whom correspondence should be addressed.
Plasma 2020, 3(1), 1-9;
Received: 24 June 2019 / Revised: 12 August 2019 / Accepted: 29 October 2019 / Published: 31 December 2019
In this paper, an efficient inductively coupled medium pressure source for ultraviolet radiation (UV-source) is demonstrated. The lamp was operated with powers up to 3 kW while the radiation and the coldest point temperature were measured. In addition, different coil geometries were investigated. Here a symmetrical and asymmetrical winding density were compared. Also the operation pressures and DC to radiation efficiencies are presented. In this work, an operation pressure of one atmosphere and an UV-efficiency (200–380 nm) of 15.5% was achieved. This is comparable to conventional medium pressure Hg-lamp technology. The main advantage of the presented inductive lamp is the electrodeless operation and therefore the longer service life, since an electrode failure is eliminated. View Full-Text
Keywords: inductive plasma; ICP; UV generation; MHz inverter; SiC FETs inductive plasma; ICP; UV generation; MHz inverter; SiC FETs
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Gehring, T.; Denk, F.; Jin, Q.; Eizaguirre, S.; Kling, R. Inductive Medium Pressure UV-Source. Plasma 2020, 3, 1-9.

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