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Article

Ion Beam Effect on the Structural and Optical Properties of AlN:Er

1
College of Nuclear Science and Technology, Harbin Engineering University, Harbin 150400, China
2
Experimental Physics Division, National Center for Physics, Islamabad 44000, Pakistan
3
Department of Textile Engineering, Balochista University of Information Technology, Engineering, and Management Sciences, Quetta 87800, Pakistan
4
College of Material Science and Chemical Engineering, Harbin Engineering University, Harbin 150400, China
5
Department of Clinical & Diagnostic Sciences, The University of Alabama at Birmingham, Birmingham, AL 35294, USA
*
Author to whom correspondence should be addressed.
Academic Editor: Francesco Tornabene
J. Compos. Sci. 2022, 6(4), 110; https://doi.org/10.3390/jcs6040110
Received: 22 February 2022 / Revised: 27 March 2022 / Accepted: 1 April 2022 / Published: 7 April 2022
(This article belongs to the Special Issue Feature Papers in Journal of Composites Science in 2022)
Erbium (Er)-doped Aluminum Nitride (AlN) thin films were deposited and fabricated on Si (100) and Si (111) substrates in a Nitrogen atmosphere using the plasma magnetron sputtering technique. The deposited and fabricated thin films were thermally annealed at 900 °C in Argon (Ar) atmosphere. The samples were irradiated with protons at a dose of 1 × 1014 ions/cm2 which carried an incident energy of 335 keV, using a tandem pelletron accelerator. Rutherford backscattering spectroscopy (RBS) and X-ray diffraction (XRD) were used for the stoichiometric and structural analysis of the films, while Fourier transforms infrared spectroscopy (FTIR) was performed to track the changes in the optical characteristics of thin films before and after the ions’ irradiation and implantation. The irradiation has affected the optical and structural properties of the films, which could be exploited to use the AlN:Er films for various optoelectronic and solid-state device applications. View Full-Text
Keywords: aluminum nitride; magnetron sputtering; tandem accelerator; thermal annealing; spectroscopy aluminum nitride; magnetron sputtering; tandem accelerator; thermal annealing; spectroscopy
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MDPI and ACS Style

Ullah, A.; Usman, M.; Shah, A.H.; Shar, A.H.; Maqbool, M. Ion Beam Effect on the Structural and Optical Properties of AlN:Er. J. Compos. Sci. 2022, 6, 110. https://doi.org/10.3390/jcs6040110

AMA Style

Ullah A, Usman M, Shah AH, Shar AH, Maqbool M. Ion Beam Effect on the Structural and Optical Properties of AlN:Er. Journal of Composites Science. 2022; 6(4):110. https://doi.org/10.3390/jcs6040110

Chicago/Turabian Style

Ullah, Asmat, Muhammad Usman, Ahmer Hussain Shah, Altaf Hussain Shar, and Muhammad Maqbool. 2022. "Ion Beam Effect on the Structural and Optical Properties of AlN:Er" Journal of Composites Science 6, no. 4: 110. https://doi.org/10.3390/jcs6040110

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