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Journal: Proceedings, 2019
Volume: 3
Number: 9
Article:
Atomic Layer Deposition of Li–Me–O Thin Films as Electrode Materials for Nanodevices Power Sources
Authors:
by
Maxim Yu. Maximov, Denis Nazarov, Yury Koshtyal, ILya Mitrofanov and Anatoly Popovich
Link:
https://www.mdpi.com/2504-3900/3/1/9
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