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AlN-on-Si Square Diaphragm Piezoelectric Micromachined Ultrasonic Transducer with Extended Range of Detection
 
 

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Journal: Proceedings, 2018
Volume: 2
Number: 925

Article: Squared PMUT with Enhanced Pressure Sensitivities
Authors: by Eyglis Ledesma, Iván Zamora, Francesc Torres, Arantxa Uranga, Vassil Tzanov, Nuria Barniol, Eloi Marigó and Mohan Soundara-Pandian
Link: https://www.mdpi.com/2504-3900/2/13/925

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