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Open AccessProceedings

Optimizing a Cantilever Measurement System towards High Speed, Nonreactive Contact-Resonance-Profilometry

1
Institute of Semiconductor Technology (IHT), Braunschweig University of Technology, HansSommerStraße 66, 38106 Braunschweig, Germany
2
Laboratory for Emerging Nanometrology (LENA), Langer Kamp 6a, 38106 Braunschweig, Germany
*
Author to whom correspondence should be addressed.
Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
Proceedings 2018, 2(13), 889; https://doi.org/10.3390/proceedings2130889
Published: 21 November 2018
(This article belongs to the Proceedings of EUROSENSORS 2018)
An existing phase-locked-loop (PLL) based contact-resonance measurement system is studied and optimized. Improvements to the electronics’ circuit to reduce both nonlinear behavior and noise are realized and experimentally tested. The improvements enable to analyze signals even at highly damped vibrations of the cantilever.
Keywords: contact resonance spectroscopy; layer analysis; piezoresistive; tactile cantilever; automatic gain control; phase-locked-loop contact resonance spectroscopy; layer analysis; piezoresistive; tactile cantilever; automatic gain control; phase-locked-loop
MDPI and ACS Style

Fahrbach, M.; Krieg, L.; Voss, T.; Bertke, M.; Xu, J.; Peiner, E. Optimizing a Cantilever Measurement System towards High Speed, Nonreactive Contact-Resonance-Profilometry. Proceedings 2018, 2, 889.

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