A CMOS-Based Thermopile Array Fabricated on a Single SiO2 Membrane †
1
ams Sensors UK Limited, Cambridge CB4 0DL, UK
2
Department of Engineering, University of Cambridge, Cambridge CB3 0FA, UK
*
Author to whom correspondence should be addressed.
†
Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
Proceedings 2018, 2(13), 878; https://doi.org/10.3390/proceedings2130878
Published: 22 November 2018
(This article belongs to the Proceedings of EUROSENSORS 2018)
We present a novel thermopile-based infrared (IR) sensor array fabricated on a single CMOS dielectric membrane, comprising of poly-silicon p+ and n+ elements. Processing of the chip is simplified by fabricating the entire array on a single membrane and by using standard CMOS Al metal layers for thermopile cold junction heatsinking. On a chip area of 1.76 mm × 1.76 mm, with a membrane size of 1.2 mm × 1.2 mm, we fabricated IR sensor arrays with 8 × 8 to 100 × 100 pixels. The 8 × 8 pixel device has <2% thermal crosstalk, a responsivity of 36 V/W and enhanced optical absorption in the 8–14 µm waveband, making it particularly suitable for people presence sensing.
Keywords:
MEMS; CMOS; infrared; thermopile array; IR image sensor; presence sensing
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited
MDPI and ACS Style
Hopper, R.; Ali, S.Z.; Boual, S.; Luca, A.D.; Dai, Y.; Popa, D.; Udrea, F. A CMOS-Based Thermopile Array Fabricated on a Single SiO2 Membrane. Proceedings 2018, 2, 878. https://doi.org/10.3390/proceedings2130878
AMA Style
Hopper R, Ali SZ, Boual S, Luca AD, Dai Y, Popa D, Udrea F. A CMOS-Based Thermopile Array Fabricated on a Single SiO2 Membrane. Proceedings. 2018; 2(13):878. https://doi.org/10.3390/proceedings2130878
Chicago/Turabian StyleHopper, Richard, Syed Zeeshan Ali, Sophie Boual, Andrea De Luca, Ying Dai, Daniel Popa, and Florin Udrea. 2018. "A CMOS-Based Thermopile Array Fabricated on a Single SiO2 Membrane" Proceedings 2, no. 13: 878. https://doi.org/10.3390/proceedings2130878
Find Other Styles
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.
